From seymour at snf.stanford.edu Fri Apr 16 08:42:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Apr 2010 08:42:10 -0700 Subject: Comment tylanbpsg SNF 2010-04-16 08:42:09: oil changed level glass clean Message-ID: From daesung at snf.stanford.edu Fri Apr 16 20:09:43 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 16 Apr 2010 20:09:43 -0700 Subject: Problem tylanbpsg SNF 2010-04-16 20:09:43: MFS alarm Message-ID: From king at snf.stanford.edu Fri Apr 16 20:51:49 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 16 Apr 2010 20:51:49 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-16 20:51:49: Broken Sheath Message-ID: That was the cause of the above error. From king at snf.stanford.edu Fri Apr 16 20:54:17 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 16 Apr 2010 20:54:17 -0700 Subject: Comment tylanbpsg SNF 2010-04-16 20:54:17: Tube will be cold Message-ID: Eric turned off the heaters so it will be ready for maintenance to pull the sheath. From seymour at snf.stanford.edu Mon Apr 19 13:54:11 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Apr 2010 13:54:11 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-16 20:51:49: Broken Sheath Message-ID: replaced loader sheath rebuilt loader door and loader motor. test needed From seymour at snf.stanford.edu Mon Apr 19 13:54:29 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Apr 2010 13:54:29 -0700 Subject: Comment tylanbpsg SNF 2010-04-16 20:54:17: Tube will be cold Message-ID: element breaker on and tube is hot. From seymour at snf.stanford.edu Mon Apr 19 13:54:50 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Apr 2010 13:54:50 -0700 Subject: Problem tylanbpsg SNF 2010-04-16 20:09:43: MFS alarm Message-ID: replaced broken loader sheath. From seymour at snf.stanford.edu Mon Apr 19 13:55:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Apr 2010 13:55:57 -0700 Subject: Problem tylanbpsg SNF 2010-04-19 13:55:56: needs test after repair Message-ID: base pressure was 6 mT and ROR was 8 mT/min From king at snf.stanford.edu Tue Apr 20 01:25:27 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 20 Apr 2010 01:25:27 -0700 Subject: Comment tylanbpsg SNF 2010-04-20 01:25:27: LTO400PC dep rate a little high Message-ID: LTO400PC gave 191.5 A/min and 191.6 A/min in two runs: 1312A in 6 min 50 sec and 1053.6A in 5.5 min. It's usually around 160A/min or so. From king at snf.stanford.edu Tue Apr 20 03:00:00 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 20 Apr 2010 03:00:00 -0700 Subject: Comment tylanbpsg SNF 2010-04-20 02:59:59: High dep rate Message-ID: (resubmitting msg) LTO400PC is 191.6 A/min repeatably over two runs. It's usually about 160 A/min. From maurice at snf.stanford.edu Tue Apr 20 08:29:33 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Apr 2010 08:29:33 -0700 Subject: Problem tylanbpsg SNF 2010-04-19 13:55:56: needs test after repair Message-ID: LTO400PC gave 191.5 A/min and 191.6 A/min in two runs: 1312A in 6 min 50 sec and 1053.6A in 5.5 min. It's usually around 160A/min or so. From maurice at snf.stanford.edu Tue Apr 20 08:30:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Apr 2010 08:30:25 -0700 Subject: Problem tylanbpsg SNF 2010-04-20 08:30:24: Higher dep rate Message-ID: Robin reports: LTO400PC gave 191.5 A/min and 191.6 A/min in two runs: 1312A in 6 min 50 sec and 1053.6A in 5.5 min. It's usually around 160A/min or so. From cmcg at snf.stanford.edu Tue Apr 20 20:44:06 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 20 Apr 2010 20:44:06 -0700 Subject: Problem tylanbpsg SNF 2010-04-20 20:44:06: high dep rate and large thickness variations Message-ID: Dep rate: 160A/min (nominal) 185A/min (today) Std across wafer (measuring ~1" in from edge of wafer for ~.5um dep): 1% (nominal) 3% (today) Std between wafers (std(avg)): 1-2% (nominal) 6.5% (today) From seymour at snf.stanford.edu Wed Apr 21 14:19:19 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 21 Apr 2010 14:19:19 -0700 Subject: Comment tylanbpsg SNF 2010-03-19 08:28:26: oil changed Message-ID: noted From seymour at snf.stanford.edu Wed Apr 21 14:20:38 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 21 Apr 2010 14:20:38 -0700 Subject: Problem tylanbpsg SNF 2010-04-21 14:20:38: broken quartz Message-ID: replaced bottom and top boat and guartz fork cover broken when user loading wafers. From shuluc at snf.stanford.edu Thu Apr 22 16:59:35 2010 From: shuluc at snf.stanford.edu (shuluc at snf.stanford.edu) Date: Thu, 22 Apr 2010 16:59:35 -0700 Subject: Comment tylanbpsg SNF 2010-04-22 16:59:34: can't open door manually Message-ID: After the chamber vented (15 minutes after end pump11), door still can't be open manually after several tries with Nancy. From seymour at snf.stanford.edu Fri Apr 23 07:49:54 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Apr 2010 07:49:54 -0700 Subject: Comment tylanbpsg SNF 2010-04-23 07:49:54: door opens now Message-ID: I vented tube and opened the door my hand. I then pumped on the tube for a while and then vented again. I loaded LTO400 and pushed run and the tube opened. Tube back in pump11 recipe. From seymour at snf.stanford.edu Fri Apr 23 07:50:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Apr 2010 07:50:33 -0700 Subject: Problem tylanbpsg SNF 2010-04-21 14:20:38: broken quartz Message-ID: Quartz replaced on 4/21/10 From tberg at snf.stanford.edu Mon Apr 26 06:04:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Apr 2010 06:04:38 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-26 06:04:38: Pull and clean Message-ID: From seymour at snf.stanford.edu Tue Apr 27 10:39:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 27 Apr 2010 10:39:57 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-26 06:04:38: Pull and clean Message-ID: pull and clean completed, running coat recipe at this time. will need a test when coat completed From seymour at snf.stanford.edu Tue Apr 27 10:40:36 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 27 Apr 2010 10:40:36 -0700 Subject: Problem tylanbpsg SNF 2010-04-27 10:40:35: needs test after coat complete Message-ID: From maurice at snf.stanford.edu Tue Apr 27 13:27:39 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Apr 2010 13:27:39 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-27 13:27:38: running test Message-ID: testing after pull/clean From maurice at snf.stanford.edu Tue Apr 27 15:03:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:03:59 -0700 Subject: Shutdown tylanbpsg SNF 2010-04-27 13:27:38: running test Message-ID: test complete ran lto400pc 00:20:00 expected 2750 actually 2715 From maurice at snf.stanford.edu Tue Apr 27 15:04:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:04:13 -0700 Subject: Problem tylanbpsg SNF 2010-04-27 10:40:35: needs test after coat complete Message-ID: complete From maurice at snf.stanford.edu Tue Apr 27 15:04:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:04:59 -0700 Subject: Problem tylanbpsg SNF 2010-04-20 20:44:06: high dep rate and large thickness variations Message-ID: Rate looks normal From maurice at snf.stanford.edu Tue Apr 27 15:05:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:05:13 -0700 Subject: Problem tylanbpsg SNF 2010-04-20 08:30:24: Higher dep rate Message-ID: rate back to normal From skoh at snf.stanford.edu Tue Apr 27 18:01:15 2010 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 27 Apr 2010 18:01:15 -0700 Subject: Problem tylanbpsg SNF 2010-04-27 18:01:14: Load zone "b" Message-ID: Thermocouple contacts may be poor/bad. From tberg at snf.stanford.edu Wed Apr 28 06:17:06 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Apr 2010 06:17:06 -0700 Subject: Problem tylanbpsg SNF 2010-04-27 18:01:14: Load zone "b" Message-ID: checked connections no bs From skoh at snf.stanford.edu Wed Apr 28 13:23:09 2010 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 28 Apr 2010 13:23:09 -0700 Subject: Problem tylanbpsg SNF 2010-04-28 13:23:08: Load zone "b" Message-ID: The "b" appears intermittently. From seymour at snf.stanford.edu Wed Apr 28 15:34:34 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 28 Apr 2010 15:34:34 -0700 Subject: Problem tylanbpsg SNF 2010-04-28 13:23:08: Load zone "b" Message-ID: the "b" be gone I checked and tightened t/c connections From seymour at snf.stanford.edu Fri Apr 30 08:32:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Apr 2010 08:32:57 -0700 Subject: Comment tylanbpsg SNF 2010-04-30 08:32:57: oil changed Message-ID: level glass cleaned