From shott at snf.stanford.edu Sun Aug 1 10:54:14 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 1 Aug 2010 10:54:14 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-01 10:54:13: Pumping problem .... Message-ID: LTO400 was loaded and running ... without the tool enabled. Pump was "puffing" smoke out the back of the pump cabinet every 20 seconds. Aborted recipe and loaded PUMP11 program. Not clear where smoke was coming from but it may have been the crankcase purge port. Probably a pump replacement is the first order of business, but that is only a guess. John From seymour at snf.stanford.edu Mon Aug 2 09:09:58 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:09:58 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-01 10:54:13: Pumping problem .... Message-ID: checked pump and exhaust lines to burnbox. replaced broken O2 injector. Base and cold ROR were good. Turned on element power. releasing to rub LTO300 PC and will monitor system performance. From seymour at snf.stanford.edu Mon Aug 2 09:10:37 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:10:37 -0700 Subject: Problem tylanbpsg SNF 2010-07-31 16:36:52: no deposition at first run Message-ID: replaced O2 injector From seymour at snf.stanford.edu Mon Aug 2 09:11:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:11:10 -0700 Subject: Problem tylanbpsg SNF 2010-07-31 20:32:17: low dep rate Message-ID: replaced broken O2 injector From seymour at snf.stanford.edu Mon Aug 2 09:12:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:12:23 -0700 Subject: Problem tylanbpsg SNF 2010-07-29 16:20:18: Dust on the wafer surface Message-ID: I did not see any large amounts of dust in the systekm when I removed loader and replaced injector. From kyunglok at snf.stanford.edu Mon Aug 2 18:10:51 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 2 Aug 2010 18:10:51 -0700 Subject: Comment tylanbpsg SNF 2010-08-02 18:10:50: one leg of nonmetal boat cover is broken Message-ID: Might be better to fix or replace it. From gth at snf.stanford.edu Mon Aug 2 18:29:58 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 2 Aug 2010 18:29:58 -0700 Subject: Problem tylanbpsg SNF 2010-08-02 18:29:58: MFS O2 Alarm twice in LTO400PC. Message-ID: From tberg at snf.stanford.edu Tue Aug 3 06:55:15 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2010 06:55:15 -0700 Subject: Comment tylanbpsg SNF 2010-08-02 18:10:50: one leg of nonmetal boat cover is broken Message-ID: replaced boat top From maurice at snf.stanford.edu Tue Aug 3 13:44:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2010 13:44:02 -0700 Subject: Comment tylanbpsg SNF 2010-07-31 22:13:20: my second run also have low dep. rate Message-ID: broken injector replaced From gth at snf.stanford.edu Wed Aug 4 01:47:40 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 4 Aug 2010 01:47:40 -0700 Subject: Problem tylanbpsg SNF 2010-08-04 01:47:40: MFS alarm for oxygen line during deposition Message-ID: The MFS alarm for oxygen went on close to the end of my deposition step. This probelm can be cleared by pressing ACK. Please check if there is something wrong with the oxygen valve. From tberg at snf.stanford.edu Thu Aug 5 07:26:39 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Aug 2010 07:26:39 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems Message-ID: From seymour at snf.stanford.edu Fri Aug 6 15:21:30 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:21:30 -0700 Subject: Comment tylanbpsg SNF 2010-08-06 15:21:29: pump too be replaced Monday morning. Message-ID: From seymour at snf.stanford.edu Mon Aug 9 08:55:17 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Aug 2010 08:55:17 -0700 Subject: Comment tylanbpsg SNF 2010-08-09 08:55:17: Pump has been changed Message-ID: pump exhaust lines cleaned from pump to burnbox and reassembled. From tberg at snf.stanford.edu Thu Aug 12 07:10:29 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Aug 2010 07:10:29 -0700 Subject: Comment tylanbpsg SNF 2010-08-12 07:10:28: testing no Phosphine Message-ID: From seymour at snf.stanford.edu Thu Aug 12 08:54:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 Aug 2010 08:54:28 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems Message-ID: pump changed, exhaust lines cleaned and new seals put in. Ran LTO400 30 mins,and monitored pump cabinet, gas cabinet, exhaust lines, and tube front loader area. No hydrides detected with the Eagle. removing shutdown to allow use for undoped LTO process. From seymour at snf.stanford.edu Thu Aug 12 08:58:34 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 Aug 2010 08:58:34 -0700 Subject: Problem tylanbpsg SNF 2010-08-12 08:58:33: Tube available for non doped process Message-ID: The Phosphine is shut off and the new cylinder is in transit from supplier. When cylinder arrives system will be checked out again with doped LTO recipe ran. From mtan at snf.stanford.edu Sat Aug 14 16:49:48 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 14 Aug 2010 16:49:48 -0700 Subject: Problem tylanbpsg SNF 2010-08-14 16:49:47: low deposition rate Message-ID: LTO450 for 2 hours deposited 0.74um of oxide. The deposition last month was 2.4um MFS alarm was reported. From mtan at snf.stanford.edu Sun Aug 15 15:36:06 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 15 Aug 2010 15:36:06 -0700 Subject: Problem tylanbpsg SNF 2010-08-15 15:36:05: MFS alarmed 5-6 times using LTO 450 Message-ID: From cchen86 at snf.stanford.edu Sun Aug 15 23:19:58 2010 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Sun, 15 Aug 2010 23:19:58 -0700 Subject: Problem tylanbpsg SNF 2010-08-15 23:19:57: MFC alarmed using LTO400PC Message-ID: PS: Deposition results are incorrect. I am targeting 2um LTO, but only got ~100nm. From gth at snf.stanford.edu Mon Aug 16 00:26:32 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 16 Aug 2010 00:26:32 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-16 00:26:31: Can't pump down Message-ID: Tube can't be pumped down under LTO300PC recipe and PUmp11. MFC alarm showed up and the process was aborted. From maurice at snf.stanford.edu Tue Aug 17 10:30:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Aug 2010 10:30:53 -0700 Subject: Comment tylanbpsg SNF 2010-08-17 10:30:53: Sheath replaced/waiting for a pump Message-ID: Ray replaced a broken sheath. The pump installed in the sytem last week has a problem. It will be sent out for repair. We are waiting for one of the two pumps we already have out for repair to return. From seymour at snf.stanford.edu Mon Aug 23 11:45:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Aug 2010 11:45:52 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-23 11:45:52: being tested at this time Message-ID: From maurice at snf.stanford.edu Mon Aug 23 11:46:28 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 11:46:28 -0700 Subject: Comment tylanbpsg SNF 2010-08-23 11:46:27: Running test Message-ID: Running LTO400pc 00:20:00 From seymour at snf.stanford.edu Mon Aug 23 11:47:29 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Aug 2010 11:47:29 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-16 00:26:31: Can't pump down Message-ID: replaced vacuum pump. checked base and ROR both were good. ready for testing. From maurice at snf.stanford.edu Mon Aug 23 13:39:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 13:39:21 -0700 Subject: Comment tylanbpsg SNF 2010-08-23 11:46:27: Running test Message-ID: Ran LTO400pc 00:20:00 Expected~3100 ang Actual 2993 Dep rate ok after pump change/ sheath replaced From maurice at snf.stanford.edu Mon Aug 23 13:41:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 13:41:50 -0700 Subject: Comment tylanbpsg SNF 2010-08-23 13:41:50: Running PSG400 WITH N2 Message-ID: RUNNING PSG400 01:20:00 N2 FLOWING IN PH3 LINE SIH4=22 PH3(N2 IN THE LINE)=86 MONITORING FLOWS AND PRESSURE From maurice at snf.stanford.edu Mon Aug 23 13:42:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 13:42:12 -0700 Subject: Comment tylanbpsg SNF 2010-08-17 10:30:53: Sheath replaced/waiting for a pump Message-ID: PUMP REPLACED From maurice at snf.stanford.edu Mon Aug 23 13:42:27 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 13:42:27 -0700 Subject: Problem tylanbpsg SNF 2010-08-15 23:19:57: MFC alarmed using LTO400PC Message-ID: PUMP REPLACED From maurice at snf.stanford.edu Mon Aug 23 17:03:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 17:03:59 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-23 11:45:52: being tested at this time Message-ID: Ran LTO400pc 00:20:00 Expected~3100 ang Actual 2993 Dep rate ok after pump change/ sheath replaced From maurice at snf.stanford.edu Mon Aug 23 17:06:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Aug 2010 17:06:09 -0700 Subject: Comment tylanbpsg SNF 2010-08-23 13:41:50: Running PSG400 WITH N2 Message-ID: Ran PSG400 01:20:00 N2 FLOWING IN PH3 LINE SIH4=22 PH3(N2 IN THE LINE)=86 MONITORED FLOWS AND PRESSURE Flows were stable at their setpoints. Pressure was stable at 233 during the entire run From cursive at snf.stanford.edu Wed Aug 25 12:50:45 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:50:45 -0700 Subject: Problem tylanbpsg SNF 2010-08-25 12:50:44: Temperature controller problem Message-ID: TCU error No power supplly. From tberg at snf.stanford.edu Wed Aug 25 13:57:56 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 Aug 2010 13:57:56 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-25 13:57:55: tcu error Message-ID: From seymour at snf.stanford.edu Wed Aug 25 14:50:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 14:50:55 -0700 Subject: Problem tylanbpsg SNF 2010-08-25 12:50:44: Temperature controller problem Message-ID: tcu error has been cleared From seymour at snf.stanford.edu Wed Aug 25 14:51:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 14:51:51 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-25 13:57:55: tcu error Message-ID: the tcu error hqas been cleared and the tube is almost to setpoint. running pump11 From zeyuan at snf.stanford.edu Thu Aug 26 00:06:53 2010 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Thu, 26 Aug 2010 00:06:53 -0700 Subject: Comment tylanbpsg SNF 2010-08-26 00:06:52: Dummy wafers are dirty Message-ID: Dummy wafers are quite dirty. Have unknown dots on them. From cursive at snf.stanford.edu Thu Aug 26 12:07:12 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 26 Aug 2010 12:07:12 -0700 Subject: Problem tylanbpsg SNF 2010-08-26 12:07:11: huge sound from back side Message-ID: huge sound from back side and from tube looks like broken From tberg at snf.stanford.edu Thu Aug 26 12:33:48 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Aug 2010 12:33:48 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-26 12:33:47: Tube in pieces Message-ID: From seymour at snf.stanford.edu Tue Aug 31 12:02:29 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Aug 2010 12:02:29 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-31 12:02:29: started LTO400 for coat Message-ID: tube change completed. base and ROR good. From seymour at snf.stanford.edu Tue Aug 31 13:55:45 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Aug 2010 13:55:45 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-31 12:02:29: started LTO400 for coat Message-ID: coat complete needs test From seymour at snf.stanford.edu Tue Aug 31 13:56:09 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Aug 2010 13:56:09 -0700 Subject: Shutdown tylanbpsg SNF 2010-08-26 12:33:47: Tube in pieces Message-ID: tube replaced From seymour at snf.stanford.edu Tue Aug 31 13:56:27 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Aug 2010 13:56:27 -0700 Subject: Problem tylanbpsg SNF 2010-08-26 12:07:11: huge sound from back side Message-ID: replaced tube From seymour at snf.stanford.edu Tue Aug 31 13:57:17 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Aug 2010 13:57:17 -0700 Subject: Problem tylanbpsg SNF 2010-08-31 13:57:16: needs testing after repair Message-ID: From maurice at snf.stanford.edu Tue Aug 31 16:51:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Aug 2010 16:51:37 -0700 Subject: Problem tylanbpsg SNF 2010-08-31 13:57:16: needs testing after repair Message-ID: Ran LTO400pc 00:20:00 expected ~2600 ang Actual 1431 (ir =1.45 good) Cursive will run another test and post it on Coral From maurice at snf.stanford.edu Tue Aug 31 16:53:39 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Aug 2010 16:53:39 -0700 Subject: Problem tylanbpsg SNF 2010-08-31 16:53:39: Thin dep Message-ID: Ran LTO400PC after tube pull. 00:20:00 expected 2600 actual 1431 Cursive will run anothe test From cursive at snf.stanford.edu Tue Aug 31 18:45:00 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 31 Aug 2010 18:45:00 -0700 Subject: Comment tylanbpsg SNF 2010-08-31 18:44:59: LTO 400 deposition run is ok Message-ID: deposit LTO400 10 min: expect 1100A real 1150A(first wafer)~1200A(fourth wafer) non-metal boat From cursive at snf.stanford.edu Tue Aug 31 18:52:17 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 31 Aug 2010 18:52:17 -0700 Subject: Comment tylanbpsg SNF 2010-08-31 18:52:17: make sure no MFC alarm during deposition Message-ID: