August 2010 Archives by date

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Starting: Sun Aug 1 10:54:14 PDT 2010
Ending: Tue Aug 31 18:52:17 PDT 2010
Messages: 46

• Shutdown tylanbpsg SNF 2010-08-01 10:54:13: Pumping problem ....   shott at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-01 10:54:13: Pumping problem ....   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-07-31 16:36:52: no deposition at first run   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-07-31 20:32:17: low dep rate   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-07-29 16:20:18: Dust on the wafer surface   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-02 18:10:50: one leg of nonmetal boat cover is broken   kyunglok at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-02 18:29:58: MFS O2 Alarm twice in LTO400PC.   gth at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-02 18:10:50: one leg of nonmetal boat cover is broken   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-07-31 22:13:20: my second run also have low dep. rate   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-04 01:47:40: MFS alarm for oxygen line during deposition   gth at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-06 15:21:29: pump too be replaced Monday morning.   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-09 08:55:17: Pump has been changed   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-12 07:10:28: testing no Phosphine   tberg at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-05 07:26:39: Gas problems   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-12 08:58:33: Tube available for non doped process   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-14 16:49:47: low deposition rate   mtan at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-15 15:36:05: MFS alarmed 5-6 times using LTO 450   mtan at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-15 23:19:57: MFC alarmed using LTO400PC   cchen86 at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-16 00:26:31: Can't pump down   gth at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-17 10:30:53: Sheath replaced/waiting for a pump   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-23 11:45:52: being tested at this time   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-23 11:46:27: Running test   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-16 00:26:31: Can't pump down   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-23 11:46:27: Running test   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-23 13:41:50: Running PSG400 WITH N2   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-17 10:30:53: Sheath replaced/waiting for a pump   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-15 23:19:57: MFC alarmed using LTO400PC   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-23 11:45:52: being tested at this time   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-23 13:41:50: Running PSG400 WITH N2   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-25 12:50:44: Temperature controller problem   cursive at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-25 13:57:55: tcu error   tberg at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-25 12:50:44: Temperature controller problem   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-25 13:57:55: tcu error   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-26 00:06:52: Dummy wafers are dirty   zeyuan at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-26 12:07:11: huge sound from back side   cursive at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-26 12:33:47: Tube in pieces   tberg at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-31 12:02:29: started LTO400 for coat   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-31 12:02:29: started LTO400 for coat   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-08-26 12:33:47: Tube in pieces   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-26 12:07:11: huge sound from back side   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-31 13:57:16: needs testing after repair   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-31 13:57:16: needs testing after repair   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-31 16:53:39: Thin dep   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-31 18:44:59: LTO 400 deposition run is ok   cursive at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-31 18:52:17: make sure no MFC alarm during deposition   cursive at snf.stanford.edu

Last message date: Tue Aug 31 18:52:17 PDT 2010
Archived on: Fri Jan 11 13:15:36 PST 2013

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