From pponce at snf.stanford.edu Fri Dec 10 04:06:17 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Fri, 10 Dec 2010 04:06:17 -0800 Subject: Problem tylanbpsg SNF 2010-12-10 04:06:17: MFS alarm Message-ID: Ran recipe LTO400PC. MFC alarm was going off when I fetched wafers. Deposition was much lower than expected (got 8.5kA, expected ~26 kA) From maurice at snf.stanford.edu Fri Dec 10 14:42:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Dec 2010 14:42:52 -0800 Subject: Comment tylanbpsg SNF 2010-12-10 14:42:51: Removed Pressure tolerance from LTO400PC Message-ID: Removed Step 0040.0010 PSPR tolerence=1.0 - pponce noticed the process pressure drop for a few seconds in the deposition step to 155mtorr and then recover back to 200mtorr. A few seconds after it recovered the system gave an MFS alarm. - We will continue to monitor tube and investigate the pressure drop.