From seymour at snf.stanford.edu Mon Feb 1 13:26:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:26:08 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-29 05:52:45: Pull and clean Message-ID: pull and clean completed. A coat run is close to finishing at this time. a test will be required before tube is up. From seymour at snf.stanford.edu Mon Feb 1 13:26:30 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:26:30 -0800 Subject: Comment tylanbpsg SNF 2009-11-25 08:53:45: strip the spare dummy wafers in the cart Message-ID: noted From seymour at snf.stanford.edu Mon Feb 1 13:26:39 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:26:39 -0800 Subject: Comment tylanbpsg SNF 2009-11-25 11:17:19: oil changed Message-ID: noted From seymour at snf.stanford.edu Mon Feb 1 13:26:59 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:26:59 -0800 Subject: Comment tylanbpsg SNF 2009-12-02 03:19:10: Strip dummies plz. Message-ID: noted From seymour at snf.stanford.edu Mon Feb 1 13:27:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:27:23 -0800 Subject: Comment tylanbpsg SNF 2010-01-15 14:23:30: oil changed Message-ID: noted From seymour at snf.stanford.edu Mon Feb 1 13:27:40 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:27:40 -0800 Subject: Comment tylanbpsg SNF 2010-01-27 09:01:54: oil changed Message-ID: noted From seymour at snf.stanford.edu Mon Feb 1 13:28:19 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Feb 2010 13:28:19 -0800 Subject: Problem tylanbpsg SNF 2010-02-01 13:28:18: needs test after pull and clean Message-ID: The coat run will be finished soon. From maurice at snf.stanford.edu Tue Feb 2 14:29:58 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Feb 2010 14:29:58 -0800 Subject: Problem tylanbpsg SNF 2010-02-01 13:28:18: needs test after pull and clean Message-ID: CMCG reports that the tube ran good after pull and clean From cursive at snf.stanford.edu Thu Feb 4 19:45:35 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 4 Feb 2010 19:45:35 -0800 Subject: Problem tylanbpsg SNF 2010-02-04 19:45:34: nonmetal boat not match well Message-ID: boat not match well. There is a gap between them. From cursive at snf.stanford.edu Thu Feb 4 20:16:18 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 4 Feb 2010 20:16:18 -0800 Subject: Comment tylanbpsg SNF 2010-02-04 20:16:17: boat is ok Message-ID: I tried it agian. Put and adjust the cap slowly. From tberg at snf.stanford.edu Fri Feb 5 06:11:06 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Feb 2010 06:11:06 -0800 Subject: Problem tylanbpsg SNF 2010-02-04 19:45:34: nonmetal boat not match well Message-ID: operator malfunction From tberg at snf.stanford.edu Fri Feb 5 06:11:17 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Feb 2010 06:11:17 -0800 Subject: Comment tylanbpsg SNF 2010-02-04 20:16:17: boat is ok Message-ID: operator malfunction From seymour at snf.stanford.edu Fri Feb 5 08:53:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Feb 2010 08:53:44 -0800 Subject: Comment tylanbpsg SNF 2010-02-05 08:53:44: oil changed Message-ID: level glass cleaned From tberg at snf.stanford.edu Fri Feb 5 10:45:57 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Feb 2010 10:45:57 -0800 Subject: Comment tylanbpsg SNF 2010-02-05 10:45:56: TCU had an excursion Message-ID: TCU had an excursion. I cleaned TC contacts and reset TCU. It seem to be fine now From cfchiang at snf.stanford.edu Sat Feb 6 19:32:30 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sat, 6 Feb 2010 19:32:30 -0800 Subject: Problem tylanbpsg SNF 2010-02-06 19:32:30: unexpected low dep rate Message-ID: Run LTO400 for 1hr and 55min and got thickness of 575A ... From cursive at snf.stanford.edu Sun Feb 7 14:09:20 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 7 Feb 2010 14:09:20 -0800 Subject: Problem tylanbpsg SNF 2010-02-07 14:09:19: no film after deposition Message-ID: From maurice at snf.stanford.edu Mon Feb 8 08:55:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:55:24 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-08 08:55:23: broken injector Message-ID: From seymour at snf.stanford.edu Mon Feb 8 09:54:15 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:54:15 -0800 Subject: Problem tylanbpsg SNF 2010-02-06 19:32:30: unexpected low dep rate Message-ID: broken injector From seymour at snf.stanford.edu Mon Feb 8 09:54:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:54:28 -0800 Subject: Problem tylanbpsg SNF 2010-02-07 14:09:19: no film after deposition Message-ID: broken injector From seymour at snf.stanford.edu Mon Feb 8 09:55:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:55:23 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-08 08:55:23: broken injector Message-ID: replaced bnroken injector. base pressure and ROR are good. Needs testing after repair. From seymour at snf.stanford.edu Mon Feb 8 09:56:24 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:56:24 -0800 Subject: Problem tylanbpsg SNF 2010-02-08 09:56:24: needs testing after repair Message-ID: tube is heating up at this time, tube running pump11. From maurice at snf.stanford.edu Mon Feb 8 11:58:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:58:17 -0800 Subject: Comment tylanbpsg SNF 2010-02-08 11:58:17: Running test after injector replaced Message-ID: From seymour at snf.stanford.edu Mon Feb 8 15:17:50 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Feb 2010 15:17:50 -0800 Subject: Comment tylanbpsg SNF 2010-02-08 15:17:49: the O2 injector replaced. Message-ID: The breaker is on and tube running pump11 From maurice at snf.stanford.edu Tue Feb 9 10:13:03 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Feb 2010 10:13:03 -0800 Subject: Comment tylanbpsg SNF 2010-02-08 11:58:17: Running test after injector replaced Message-ID: Ran LTO400PC 00:20:00 (Yeh ran the run and pnataraj measured wafers) expected~ 3179 ang actual 3150 From maurice at snf.stanford.edu Tue Feb 9 10:13:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Feb 2010 10:13:11 -0800 Subject: Problem tylanbpsg SNF 2010-02-08 09:56:24: needs testing after repair Message-ID: Ran LTO400PC 00:20:00 (Yeh ran the run and pnataraj measured wafers) expected~ 3179 ang actual 3150 From maurice at snf.stanford.edu Tue Feb 9 15:57:03 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Feb 2010 15:57:03 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-09 15:57:02: cantilever sheath broke during run Message-ID: From seymour at snf.stanford.edu Wed Feb 10 11:30:07 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Feb 2010 11:30:07 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-09 15:57:02: cantilever sheath broke during run Message-ID: Replaced broken quartz. Base pressure and ROR are good. started LTO400 for 45 mins to coat the tube. Will need a test after coat run complete. From seymour at snf.stanford.edu Wed Feb 10 11:30:20 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Feb 2010 11:30:20 -0800 Subject: Problem tylanbpsg SNF 2010-02-10 11:30:19: Message-ID: From seymour at snf.stanford.edu Wed Feb 10 11:31:00 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Feb 2010 11:31:00 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-10 11:31:00: needs test after coat. Message-ID: From maurice at snf.stanford.edu Wed Feb 10 15:37:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 15:37:55 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-10 11:31:00: needs test after coat. Message-ID: Ran LTO400PC 00:20:00 expected 3250 actual 2750 (this is back to the dep rate we had all of last year) Check logbook for current rate. From maurice at snf.stanford.edu Wed Feb 10 15:39:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 15:39:35 -0800 Subject: Problem tylanbpsg SNF 2010-02-10 11:30:19: Message-ID: archive From narii at snf.stanford.edu Thu Feb 11 22:08:30 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 11 Feb 2010 22:08:30 -0800 Subject: Problem tylanbpsg SNF 2010-02-11 22:08:29: No deposition Message-ID: Ran LTO400PC for 10 min. No film was deposited at all. From seymour at snf.stanford.edu Fri Feb 12 12:21:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 12 Feb 2010 12:21:26 -0800 Subject: Problem tylanbpsg SNF 2010-02-11 22:08:29: No deposition Message-ID: tube not pumping properly From seymour at snf.stanford.edu Fri Feb 12 12:22:41 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 12 Feb 2010 12:22:41 -0800 Subject: Problem tylanbpsg SNF 2010-02-12 12:22:40: needs testing after repair Message-ID: removed and reinstalled injectors and sheaths. tube pumps to a good base now. From tura at snf.stanford.edu Fri Feb 12 18:17:07 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 12 Feb 2010 18:17:07 -0800 Subject: Problem tylanbpsg SNF 2010-02-12 18:17:07: uniformity and thickness Message-ID: user reported that actual thickness: 450 where expected thickness:3000, and the uniformity disappoints. From cmcg at snf.stanford.edu Mon Feb 15 11:05:23 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 15 Feb 2010 11:05:23 -0800 Subject: Comment tylanbpsg SNF 2010-02-15 11:05:22: dep rate and uniformity Message-ID: LTO400PC, alternate spacing: Dep rate: 161.6 A/min (158 typical) Uniformity: 3-4% (2-3% typical) From seymour at snf.stanford.edu Fri Feb 19 08:10:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Feb 2010 08:10:06 -0800 Subject: Comment tylanbpsg SNF 2010-02-19 08:10:06: oil changed Message-ID: level glass cleaned From maurice at snf.stanford.edu Mon Feb 22 12:03:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Feb 2010 12:03:59 -0800 Subject: Problem tylanbpsg SNF 2010-02-22 12:03:59: Load zone "b" Message-ID: user reports 'b" in load zone during LTO400 step 20 From seymour at snf.stanford.edu Mon Feb 22 13:33:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 22 Feb 2010 13:33:57 -0800 Subject: Problem tylanbpsg SNF 2010-02-22 12:03:59: Load zone "b" Message-ID: load zone "b" is not. I cleaned t/c contacts From maurice at snf.stanford.edu Wed Feb 24 09:03:06 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Feb 2010 09:03:06 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-24 09:03:05: Broken loader sheath Message-ID: From seymour at snf.stanford.edu Wed Feb 24 11:36:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Feb 2010 11:36:22 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-24 09:03:05: Broken loader sheath Message-ID: replaced loader sheath. tube base pressure good and ROR is good also. running pump11 at this time. From maurice at snf.stanford.edu Wed Feb 24 15:44:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Feb 2010 15:44:50 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-24 15:44:49: failed leak check 2x Message-ID: User reports base pressure as 30 mtorr failed leakcheck within 10 sec From seymour at snf.stanford.edu Wed Feb 24 16:01:30 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Feb 2010 16:01:30 -0800 Subject: Shutdown tylanbpsg SNF 2010-02-24 15:44:49: failed leak check 2x Message-ID: cleaned door seal and tube end, closed tube and pumped in manual. Base was 6 mT and ror was about 16 mT. Started run for user. From ocakkaya at snf.stanford.edu Fri Feb 26 03:35:16 2010 From: ocakkaya at snf.stanford.edu (ocakkaya at snf.stanford.edu) Date: Fri, 26 Feb 2010 03:35:16 -0800 Subject: Problem tylanbpsg SNF 2010-02-26 03:35:15: MSZ Error Message-ID: SIH4 is zero during step 75 From seymour at snf.stanford.edu Fri Feb 26 07:51:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Feb 2010 07:51:31 -0800 Subject: Problem tylanbpsg SNF 2010-02-26 03:35:15: MSZ Error Message-ID: Silane crosover was reset and I flowed the Silane through the tube this morning. From seymour at snf.stanford.edu Fri Feb 26 07:52:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Feb 2010 07:52:22 -0800 Subject: Problem tylanbpsg SNF 2010-02-12 12:22:40: needs testing after repair Message-ID: System has been ran many times with no more comments about testing required.