From maurice at snf.stanford.edu Mon Jan 4 15:25:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:25:47 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-04 15:25:47: Test had no dep Message-ID: Will repeat test in morning. Wafers loaded. From maurice at snf.stanford.edu Tue Jan 5 09:21:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Jan 2010 09:21:15 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-05 09:21:15: broken injector Message-ID: From seymour at snf.stanford.edu Tue Jan 5 12:05:46 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 Jan 2010 12:05:46 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-05 09:21:15: broken injector Message-ID: replaced injector, pumpdown good and ror good From seymour at snf.stanford.edu Tue Jan 5 12:06:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 Jan 2010 12:06:18 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-04 15:25:47: Test had no dep Message-ID: replaced broken injector for silane. From seymour at snf.stanford.edu Tue Jan 5 12:08:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 Jan 2010 12:08:08 -0800 Subject: Problem tylanbpsg SNF 2010-01-05 12:08:07: needs test after repair Message-ID: When the temp reaches 400 deg the system is ready for test. From maurice at snf.stanford.edu Tue Jan 5 15:44:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:44:24 -0800 Subject: Problem tylanbpsg SNF 2010-01-05 12:08:07: needs test after repair Message-ID: ran lto400pc 00:20:00 expected 2700 ang actual 3350 ang Thickness much higher, but uniformity better across wafer. Will run another test. Was the replaced injector the same size? 3220,3269,3279,3309,3292,3264,3354,3569 #2 tilted 3308,3382,3389,3394,3376,3374,3369,3450,3660 3879,4076,4036,3944,3901,3736,3904,4108,3986 3695,3766,3793,3832,3846,3811,3773,38363930 3367,3575,3738,3905,4147,3799,3794,3741,3659 From maurice at snf.stanford.edu Tue Jan 5 15:44:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:44:53 -0800 Subject: Problem tylanbpsg SNF 2010-01-05 15:44:52: dep rate high! Message-ID: expected 2700 ang actual 3350 ang Thickness much higher, but uniformity better across wafer. Will run another test. 3220,3269,3279,3309,3292,3264,3354,3569 #2 tilted 3308,3382,3389,3394,3376,3374,3369,3450,3660 3879,4076,4036,3944,3901,3736,3904,4108,3986 3695,3766,3793,3832,3846,3811,3773,38363930 3367,3575,3738,3905,4147,3799,3794,3741,3659 From seymour at snf.stanford.edu Fri Jan 15 14:23:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Jan 2010 14:23:31 -0800 Subject: Comment tylanbpsg SNF 2010-01-15 14:23:30: oil changed Message-ID: level glass cleaned From cmcg at snf.stanford.edu Fri Jan 15 19:07:28 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 15 Jan 2010 19:07:28 -0800 Subject: Problem tylanbpsg SNF 2010-01-15 19:07:27: display screen dead Message-ID: screen on tylan control panel appears to be dead From cfchiang at snf.stanford.edu Sun Jan 17 20:17:16 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 17 Jan 2010 20:17:16 -0800 Subject: Problem tylanbpsg SNF 2010-01-17 20:17:15: dep rate unexpected low Message-ID: used LTO400 expected thickness: 1.6um actual thickness: ~700A initial dep pressure was correct From ludwig at snf.stanford.edu Mon Jan 18 17:53:46 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Mon, 18 Jan 2010 17:53:46 -0800 Subject: Problem tylanbpsg SNF 2010-01-18 17:53:45: Process failed Message-ID: Ran 50 wafers, in metal and non-metal wafer holder. The Non-metal oxide thickness came out at 154A, target was 1um, the Metal wafers cameout at 1134A, target 1um Process run : LTO450 for 100min From maurice at snf.stanford.edu Tue Jan 19 09:43:42 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 09:43:42 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-19 09:42:45: broken injector Message-ID: From seymour at snf.stanford.edu Tue Jan 19 13:54:01 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Jan 2010 13:54:01 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-19 09:42:45: broken injector Message-ID: replaced broken injector and loader rails. good base and rate of rise. Needs testing after repair. From seymour at snf.stanford.edu Tue Jan 19 13:54:36 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Jan 2010 13:54:36 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-19 13:54:36: needs test after repair. Message-ID: From maurice at snf.stanford.edu Tue Jan 19 15:19:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:19:13 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-19 13:54:36: needs test after repair. Message-ID: testing now From maurice at snf.stanford.edu Tue Jan 19 15:19:41 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:19:41 -0800 Subject: Problem tylanbpsg SNF 2010-01-18 17:53:45: Process failed Message-ID: found an injector broken From maurice at snf.stanford.edu Tue Jan 19 15:19:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:19:53 -0800 Subject: Problem tylanbpsg SNF 2010-01-17 20:17:15: dep rate unexpected low Message-ID: found an injector broken From maurice at snf.stanford.edu Tue Jan 19 15:20:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:20:15 -0800 Subject: Problem tylanbpsg SNF 2010-01-15 19:07:27: display screen dead Message-ID: tapped on screen From ludwig at snf.stanford.edu Tue Jan 19 16:34:44 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 19 Jan 2010 16:34:44 -0800 Subject: Comment tylanbpsg SNF 2010-01-19 16:34:43: Test run Message-ID: Did a test run, target 2750A, result: 2800A Good to go From tberg at snf.stanford.edu Wed Jan 20 06:43:58 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Jan 2010 06:43:58 -0800 Subject: Problem tylanbpsg SNF 2010-01-05 15:44:52: dep rate high! Message-ID: Test good per Ludwig From ytsuji at snf.stanford.edu Thu Jan 21 07:47:55 2010 From: ytsuji at snf.stanford.edu (ytsuji at snf.stanford.edu) Date: Thu, 21 Jan 2010 07:47:55 -0800 Subject: Problem tylanbpsg SNF 2010-01-21 07:47:54: Vent problem Message-ID: I could not verify the tube is vented. From seymour at snf.stanford.edu Thu Jan 21 08:38:24 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 Jan 2010 08:38:24 -0800 Subject: Problem tylanbpsg SNF 2010-01-21 07:47:54: Vent problem Message-ID: found tube pumped down. vented manually with a high N2 flow. Opened pump line and verified that there was no leaks in pump valves. repumped tube and vented with normal N2 flow. Thiis took 11 mins to complete. tube is operating normally. From seymour at snf.stanford.edu Wed Jan 27 09:01:54 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jan 2010 09:01:54 -0800 Subject: Comment tylanbpsg SNF 2010-01-27 09:01:54: oil changed Message-ID: ss cleaned From tberg at snf.stanford.edu Fri Jan 29 05:52:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jan 2010 05:52:46 -0800 Subject: Shutdown tylanbpsg SNF 2010-01-29 05:52:45: Pull and clean Message-ID: