From zzp at snf.stanford.edu Thu Jul 1 00:22:04 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 1 Jul 2010 00:22:04 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-01 00:22:03: as per previous user Message-ID: O2 MFC errors From seymour at snf.stanford.edu Thu Jul 1 13:47:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 1 Jul 2010 13:47:18 -0700 Subject: Comment tylanbpsg SNF 2010-07-01 13:47:17: waiting for O2 MFC. Message-ID: From seymour at snf.stanford.edu Fri Jul 2 10:18:47 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Jul 2010 10:18:47 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-01 00:22:03: as per previous user Message-ID: checked mfc control and did a 30 min dep with no further O2 MFC errors I am removing shutdown on tool . Users mauy run the tool and if there is an O2 error pushing alarm selience on MFS460 panel will turn O2 back on From seymour at snf.stanford.edu Fri Jul 2 10:21:34 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Jul 2010 10:21:34 -0700 Subject: Problem tylanbpsg SNF 2010-07-02 10:21:33: removing shutdown to allow use if desaired. Message-ID: If there is an an alarm during dep, pushing alarm silence on MFS460 front panel will turn O2 back on. Dep will continue. From seymour at snf.stanford.edu Fri Jul 2 11:01:13 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Jul 2010 11:01:13 -0700 Subject: Comment tylanbpsg SNF 2010-07-02 11:01:13: O2 MFC has been replaced Message-ID: O2 line leak checked and flow setpoints up to max amount flow ok. From filip at snf.stanford.edu Sat Jul 3 13:14:17 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 3 Jul 2010 13:14:17 -0700 Subject: Problem tylanbpsg SNF 2010-07-03 13:14:17: no O2 flow Message-ID: even after pressing "Clear" to silence the alarm This should befixed please. Pressing buttons to clear faulty MFCs should not be standrad practice. The tube should be maintained better. From filip at snf.stanford.edu Sat Jul 3 13:18:08 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 3 Jul 2010 13:18:08 -0700 Subject: Comment tylanbpsg SNF 2010-07-03 13:18:08: previous message Message-ID: I do realize that I pressed the 'wrong' button, however I was under the impression that the MFC was replaced, and therefore fixed. From cursive at snf.stanford.edu Sat Jul 3 15:47:12 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 3 Jul 2010 15:47:12 -0700 Subject: Problem tylanbpsg SNF 2010-07-03 15:47:11: interlock pin at metal side cap is broken Message-ID: From gth at snf.stanford.edu Tue Jul 6 00:50:38 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 6 Jul 2010 00:50:38 -0700 Subject: Problem tylanbpsg SNF 2010-07-06 00:50:37: non metal dummies disappearing ! Message-ID: From gth at snf.stanford.edu Tue Jul 6 02:19:38 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 6 Jul 2010 02:19:38 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-06 02:19:38: MFS alarm, fails in Pump11, LTO400PC Message-ID: From seymour at snf.stanford.edu Tue Jul 6 11:21:09 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 6 Jul 2010 11:21:09 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-06 11:21:09: pull and clean in progress Message-ID: From seymour at snf.stanford.edu Wed Jul 7 14:24:03 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:24:03 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-06 11:21:09: pull and clean in progress Message-ID: foune tube cracked so we pulled it and cleaned all good parts and reassembled. Cold and hot leak cjheck passed. Tube coating at this time From seymour at snf.stanford.edu Wed Jul 7 14:24:32 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:24:32 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-06 02:19:38: MFS alarm, fails in Pump11, LTO400PC Message-ID: tube cracked, replaced with another cleaned one From seymour at snf.stanford.edu Wed Jul 7 14:25:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:25:06 -0700 Subject: Comment tylanbpsg SNF 2010-07-01 13:47:17: waiting for O2 MFC. Message-ID: O2 MFC installed From seymour at snf.stanford.edu Wed Jul 7 14:25:43 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:25:43 -0700 Subject: Problem tylanbpsg SNF 2010-07-02 10:21:33: removing shutdown to allow use if desaired. Message-ID: no ,more problems reported From seymour at snf.stanford.edu Wed Jul 7 14:26:04 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:26:04 -0700 Subject: Problem tylanbpsg SNF 2010-07-03 13:14:17: no O2 flow Message-ID: O2 MFC replaced From seymour at snf.stanford.edu Wed Jul 7 14:26:43 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:26:43 -0700 Subject: Problem tylanbpsg SNF 2010-07-03 15:47:11: interlock pin at metal side cap is broken Message-ID: Two new boats added during clean. From seymour at snf.stanford.edu Wed Jul 7 14:27:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:27:23 -0700 Subject: Problem tylanbpsg SNF 2010-06-30 15:12:21: O2 MFC alarm Message-ID: O2 mfc replaced From seymour at snf.stanford.edu Wed Jul 7 14:28:24 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 7 Jul 2010 14:28:24 -0700 Subject: Problem tylanbpsg SNF 2010-07-07 14:28:23: needs test after pull and clean Message-ID: tube being coated at this time. From maurice at snf.stanford.edu Wed Jul 7 17:04:29 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 17:04:29 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-07 17:04:27: testing Message-ID: Running test after pull/clean From maurice at snf.stanford.edu Wed Jul 7 18:25:42 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:25:42 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-07 17:04:27: testing Message-ID: ran LTO400PC 00:20:00 expected 2650 ang actual 2591 ang From maurice at snf.stanford.edu Wed Jul 7 18:25:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:25:52 -0700 Subject: Problem tylanbpsg SNF 2010-07-07 14:28:23: needs test after pull and clean Message-ID: ran LTO400PC 00:20:00 expected 2650 ang actual 2591 ang From maurice at snf.stanford.edu Wed Jul 7 18:26:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:26:15 -0700 Subject: Problem tylanbpsg SNF 2010-07-06 00:50:37: non metal dummies disappearing ! Message-ID: added 12 more non metal dummies From maurice at snf.stanford.edu Wed Jul 7 18:26:27 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:26:27 -0700 Subject: Comment tylanbpsg SNF 2010-07-03 13:18:08: previous message Message-ID: log From maurice at snf.stanford.edu Wed Jul 7 18:26:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:26:47 -0700 Subject: Problem tylanbpsg SNF 2010-06-30 17:27:03: only three non-metal dummies Message-ID: added 12 non metal dummies From maurice at snf.stanford.edu Wed Jul 7 18:27:05 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jul 2010 18:27:05 -0700 Subject: Problem tylanbpsg SNF 2010-06-30 06:14:12: please replace dummy wafers. They look very bad. Message-ID: adeed more non metal dummies From gth at snf.stanford.edu Wed Jul 7 22:11:47 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 7 Jul 2010 22:11:47 -0700 Subject: Problem tylanbpsg SNF 2010-07-07 22:11:46: O2 MFC alarm again ! Message-ID: From gth at snf.stanford.edu Thu Jul 8 22:03:33 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 8 Jul 2010 22:03:33 -0700 Subject: Problem tylanbpsg SNF 2010-07-08 22:03:33: O2 MFC flashing. Message-ID: again it happened during "zappe" user run. He was running PSG400 He was not around, I checked O2 flow rate was 0 I checked with Eric and we pushed the Alarm Ack and then it was OK. This is a definite issue and I am surprised that we are witnessing this for the first time :) From seymour at snf.stanford.edu Fri Jul 9 08:14:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jul 2010 08:14:51 -0700 Subject: Comment tylanbpsg SNF 2010-07-09 08:14:51: oil changed Message-ID: level glass cleaned From seymour at snf.stanford.edu Fri Jul 9 09:17:47 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:17:47 -0700 Subject: Comment tylanbpsg SNF 2010-07-09 09:17:46: I am looking at the intermitten Oxygen Message-ID: situation. I have checked the output connections and the MFC has been replaced. I will continue to monitor this. From cursive at snf.stanford.edu Fri Jul 9 12:24:05 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 9 Jul 2010 12:24:05 -0700 Subject: Problem tylanbpsg SNF 2010-07-09 12:24:04: something coat on the non-metal boat Message-ID: It looks like carbon...... From maurice at snf.stanford.edu Fri Jul 9 15:41:33 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Jul 2010 15:41:33 -0700 Subject: Problem tylanbpsg SNF 2010-07-09 12:24:04: something coat on the non-metal boat Message-ID: Someone touched the top of both center boats with a glove. Ray re[laced them. From filip at snf.stanford.edu Sat Jul 10 08:24:52 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 10 Jul 2010 08:24:52 -0700 Subject: Problem tylanbpsg SNF 2010-07-10 08:24:51: non-metal wand found cracked Message-ID: From tberg at snf.stanford.edu Mon Jul 12 07:03:25 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Jul 2010 07:03:25 -0700 Subject: Problem tylanbpsg SNF 2010-07-10 08:24:51: non-metal wand found cracked Message-ID: Replaced shaft cover From filip at snf.stanford.edu Mon Jul 12 12:38:35 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:38:35 -0700 Subject: Problem tylanbpsg SNF 2010-07-12 12:38:35: O2 MFS alarm Message-ID: at the very end (last 15 seconds) of the deposition step (LTO300PC) From jrjain at snf.stanford.edu Mon Jul 12 21:02:56 2010 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 12 Jul 2010 21:02:56 -0700 Subject: Problem tylanbpsg SNF 2010-07-12 21:02:56: MFS Alarm During PUMP11 Message-ID: Get alarm at start of recipe From tberg at snf.stanford.edu Tue Jul 13 06:33:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Jul 2010 06:33:02 -0700 Subject: Problem tylanbpsg SNF 2010-07-12 21:02:56: MFS Alarm During PUMP11 Message-ID: Pump was off found a loose connection on pump line. Loaded pump11 worked fine From filip at snf.stanford.edu Tue Jul 13 14:44:48 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 13 Jul 2010 14:44:48 -0700 Subject: Comment tylanbpsg SNF 2010-07-13 14:44:48: 4mins in MFS alarm Message-ID: in case the info helps troubleshooting (LTO300PC) From pcristman at snf.stanford.edu Fri Jul 16 01:55:47 2010 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Fri, 16 Jul 2010 01:55:47 -0700 Subject: Comment tylanbpsg SNF 2010-07-16 01:55:46: Continued MFS alarm Message-ID: Had multiple alarms 4-5 while running LTO400PC starting about 20 minutes into my deposition. Tube alarmed intermitantely for about 20 minutes then completed the 80 minute run. In a second run directly after the first running LTO400PC for 90 minutes and had only one alarm around 35 minutes into the deposition. From seymour at snf.stanford.edu Fri Jul 16 10:23:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 10:23:52 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-16 10:23:52: replacing I/O board Message-ID: From seymour at snf.stanford.edu Fri Jul 16 11:43:09 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 11:43:09 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-16 10:23:52: replacing I/O board Message-ID: installed another rebuilt and calibrated I/O. Checked for gas flows to setpoint and correct valve operation. back running pump11. From seymour at snf.stanford.edu Fri Jul 16 11:44:56 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 11:44:56 -0700 Subject: Comment tylanbpsg SNF 2010-07-16 11:44:56: replaced I/O board in MFS460 Message-ID: troubleshooting intermitten O2 flow alarms. I will continue monitoring tube for problems From liangjl at snf.stanford.edu Fri Jul 16 17:54:09 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Fri, 16 Jul 2010 17:54:09 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 17:54:08: MFS alarm Message-ID: MFS alarm sounds at step 75, 3min. I'm running a LTO300PC recipe for 10min. From liangjl at snf.stanford.edu Fri Jul 16 17:59:26 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Fri, 16 Jul 2010 17:59:26 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 17:59:25: No Silane Message-ID: Both Silane and O2 gives MFS alarm. Silane flow is only 0.1. O2 flow is normal. From liangjl at snf.stanford.edu Fri Jul 16 19:48:59 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Fri, 16 Jul 2010 19:48:59 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 19:48:58: Still no deposition at 2nd run Message-ID: No silane, still A lot of MFS alarm. From gth at snf.stanford.edu Tue Jul 20 01:10:36 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 20 Jul 2010 01:10:36 -0700 Subject: Problem tylanbpsg SNF 2010-07-20 01:10:36: MFS O2 alarm twice Message-ID: LTO300PC - 5min first 30 sec - alarm last 30 sec - alarm. Could it just be a loose connection ? From seymour at snf.stanford.edu Tue Jul 20 09:05:40 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 09:05:40 -0700 Subject: Comment tylanbpsg SNF 2010-07-20 09:05:40: oil change Message-ID: level glass cleaned From seymour at snf.stanford.edu Tue Jul 20 09:07:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 09:07:18 -0700 Subject: Comment tylanbpsg SNF 2010-06-10 08:29:03: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Jul 20 09:07:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 09:07:28 -0700 Subject: Comment tylanbpsg SNF 2010-06-28 14:01:33: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Jul 20 09:07:41 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jul 2010 09:07:41 -0700 Subject: Comment tylanbpsg SNF 2010-07-09 08:14:51: oil changed Message-ID: noted From zappe at snf.stanford.edu Thu Jul 22 11:41:29 2010 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Thu, 22 Jul 2010 11:41:29 -0700 Subject: Problem tylanbpsg SNF 2010-07-22 11:41:28: Phosphine flow problem? Message-ID: When I run PSG400, the process pressure is very high. Targeting for close to 8% PSG with SiH4=30 and Ph3=80 gave me yesterday a starting deposition pressure of 950 that kept rising up to 1050. Today I started a run with SiH4=45 and Ph3=65. The pressure started at 690 and dropped to 214 when the phosphine ran out. From seymour at snf.stanford.edu Thu Jul 22 12:11:54 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 22 Jul 2010 12:11:54 -0700 Subject: Problem tylanbpsg SNF 2010-07-22 12:11:53: Phosphine/ilane tank very near empty Message-ID: There was about 100 psi used yesterday. I have one on order and it is due in about 7/29 The useage has been very high on two days in the last couple of weeks. From tberg at snf.stanford.edu Mon Jul 26 06:28:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:28:40 -0700 Subject: Comment tylanbpsg SNF 2010-07-02 11:01:13: O2 MFC has been replaced Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:28:49 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:28:49 -0700 Subject: Problem tylanbpsg SNF 2010-07-07 22:11:46: O2 MFC alarm again ! Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:29:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:29:00 -0700 Subject: Problem tylanbpsg SNF 2010-07-08 22:03:33: O2 MFC flashing. Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:29:44 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:29:44 -0700 Subject: Comment tylanbpsg SNF 2010-07-09 09:17:46: I am looking at the intermitten Oxygen Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:29:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:29:52 -0700 Subject: Problem tylanbpsg SNF 2010-07-12 12:38:35: O2 MFS alarm Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:30:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:30:14 -0700 Subject: Comment tylanbpsg SNF 2010-07-13 14:44:48: 4mins in MFS alarm Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:30:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:30:23 -0700 Subject: Comment tylanbpsg SNF 2010-07-16 01:55:46: Continued MFS alarm Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:30:35 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:30:35 -0700 Subject: Comment tylanbpsg SNF 2010-07-16 11:44:56: replaced I/O board in MFS460 Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:30:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:30:43 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 17:54:08: MFS alarm Message-ID: MFC replaced and MFS 460 voltages adjusted. No problems since From tberg at snf.stanford.edu Mon Jul 26 06:31:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:31:08 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 17:59:25: No Silane Message-ID: no reoccuring problem From tberg at snf.stanford.edu Mon Jul 26 06:31:18 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:31:18 -0700 Subject: Problem tylanbpsg SNF 2010-07-16 19:48:58: Still no deposition at 2nd run Message-ID: no reoccuring problem From tberg at snf.stanford.edu Mon Jul 26 06:32:36 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Jul 2010 06:32:36 -0700 Subject: Problem tylanbpsg SNF 2010-07-20 01:10:36: MFS O2 alarm twice Message-ID: MFC, I/O board replaced, Voltages adjusted-no morte problems From tberg at snf.stanford.edu Tue Jul 27 05:58:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Jul 2010 05:58:23 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-27 05:58:23: Pull and clean Message-ID: From seymour at snf.stanford.edu Tue Jul 27 14:47:53 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 27 Jul 2010 14:47:53 -0700 Subject: Comment tylanbpsg SNF 2010-07-27 14:47:51: pull and clean completed but not coat Message-ID: the tube is heating up at this time so LTOCOAT can be ran.after that a test will be needed. From tberg at snf.stanford.edu Wed Jul 28 06:28:55 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Jul 2010 06:28:55 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 06:28:55: Running coaT Message-ID: From tberg at snf.stanford.edu Wed Jul 28 08:59:56 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Jul 2010 08:59:56 -0700 Subject: Comment tylanbpsg SNF 2010-07-27 14:47:51: pull and clean completed but not coat Message-ID: Coat completed needs test From tberg at snf.stanford.edu Wed Jul 28 09:00:11 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Jul 2010 09:00:11 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 06:28:55: Running coaT Message-ID: Coat completed needs test From tberg at snf.stanford.edu Wed Jul 28 09:00:57 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Jul 2010 09:00:57 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 09:00:57: Needs test Message-ID: From maurice at snf.stanford.edu Wed Jul 28 10:19:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jul 2010 10:19:36 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 10:19:35: testing after pull/clean Message-ID: testing after pull/clean From maurice at snf.stanford.edu Wed Jul 28 13:48:46 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:48:46 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 10:19:35: testing after pull/clean Message-ID: test complete. Expected ~3150 Ang Actual 3207 From maurice at snf.stanford.edu Wed Jul 28 13:49:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:49:09 -0700 Subject: Comment tylanbpsg SNF 2010-07-28 09:00:57: Needs test Message-ID: test complete. Expected ~3150 Ang Actual 3207 From maurice at snf.stanford.edu Wed Jul 28 13:49:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:49:47 -0700 Subject: Shutdown tylanbpsg SNF 2010-07-27 05:58:23: Pull and clean Message-ID: pulled, cleaned, coated and tested From maurice at snf.stanford.edu Wed Jul 28 13:50:18 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:50:18 -0700 Subject: Comment tylanbpsg SNF 2010-06-15 11:03:18: Dep rate result for LTO400PC Message-ID: logged From daesung at snf.stanford.edu Thu Jul 29 16:20:19 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 29 Jul 2010 16:20:19 -0700 Subject: Problem tylanbpsg SNF 2010-07-29 16:20:18: Dust on the wafer surface Message-ID: After processing, dust can be seen on the backside of the wafers. Looks like it can be removed in wet bench. From dongrip at snf.stanford.edu Fri Jul 30 00:31:02 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 30 Jul 2010 00:31:02 -0700 Subject: Problem tylanbpsg SNF 2010-07-30 00:31:02: vertical plate Message-ID: the inside vertical plate was lying, and I can't open the metal boat located in the most inside, because it's back positioned. From seymour at snf.stanford.edu Fri Jul 30 07:54:47 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Jul 2010 07:54:47 -0700 Subject: Problem tylanbpsg SNF 2010-07-30 00:31:02: vertical plate Message-ID: reinstalled rear baffle Ted fixed little "b" on front zone. From zzp at snf.stanford.edu Sat Jul 31 16:36:52 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sat, 31 Jul 2010 16:36:52 -0700 Subject: Problem tylanbpsg SNF 2010-07-31 16:36:52: no deposition at first run Message-ID: second run seems fine From ywidjaja at snf.stanford.edu Sat Jul 31 20:32:17 2010 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 31 Jul 2010 20:32:17 -0700 Subject: Problem tylanbpsg SNF 2010-07-31 20:32:17: low dep rate Message-ID: Running LTO400PC for 20'. Thickness is 1100-1200A, corresponding to a dep rate of 55-60A/min. From zzp at snf.stanford.edu Sat Jul 31 22:13:21 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sat, 31 Jul 2010 22:13:21 -0700 Subject: Comment tylanbpsg SNF 2010-07-31 22:13:20: my second run also have low dep. rate Message-ID: