Problem tylanbpsg SNF 2010-07-16 17:59:25: No Silane

liangjl at snf.stanford.edu liangjl at snf.stanford.edu
Fri Jul 16 17:59:26 PDT 2010


Both Silane and O2 gives MFS alarm. Silane flow is only 0.1. O2 flow is normal.




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