Problem tylanbpsg SNF 2010-07-22 11:41:28: Phosphine flow problem?

zappe at snf.stanford.edu zappe at snf.stanford.edu
Thu Jul 22 11:41:29 PDT 2010


When I run PSG400, the process pressure is very high.  Targeting for close to 8% PSG with SiH4=30 and Ph3=80 gave me yesterday a starting deposition pressure of 950 that kept rising up to 1050.  Today I started a run with SiH4=45 and Ph3=65.  The pressure started at 690 and dropped to 214 when the phosphine ran out.




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