July 2010 Archives by author

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Starting: Thu Jul 1 00:22:04 PDT 2010
Ending: Sat Jul 31 22:13:21 PDT 2010
Messages: 81

Problem tylanbpsg SNF 2010-07-03 15:47:11: interlock pin at metal side cap is broken cursive at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-09 12:24:04: something coat on the non-metal boat cursive at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-29 16:20:18: Dust on the wafer surface daesung at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-30 00:31:02: vertical plate dongrip at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-03 13:14:17: no O2 flow filip at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-03 13:18:08: previous message filip at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-10 08:24:51: non-metal wand found cracked filip at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-12 12:38:35: O2 MFS alarm filip at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-13 14:44:48: 4mins in MFS alarm filip at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-06 00:50:37: non metal dummies disappearing ! gth at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-06 02:19:38: MFS alarm, fails in Pump11, LTO400PC gth at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-07 22:11:46: O2 MFC alarm again ! gth at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-08 22:03:33: O2 MFC flashing. gth at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-20 01:10:36: MFS O2 alarm twice gth at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-12 21:02:56: MFS Alarm During PUMP11 jrjain at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 17:54:08: MFS alarm liangjl at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 17:59:25: No Silane liangjl at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 19:48:58: Still no deposition at 2nd run liangjl at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-07 17:04:27: testing maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-07 17:04:27: testing maurice at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-07 14:28:23: needs test after pull and clean maurice at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-06 00:50:37: non metal dummies disappearing ! maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-03 13:18:08: previous message maurice at snf.stanford.edu
Problem tylanbpsg SNF 2010-06-30 17:27:03: only three non-metal dummies maurice at snf.stanford.edu
Problem tylanbpsg SNF 2010-06-30 06:14:12: please replace dummy wafers. They look very bad. maurice at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-09 12:24:04: something coat on the non-metal boat maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 10:19:35: testing after pull/clean maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 10:19:35: testing after pull/clean maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 09:00:57: Needs test maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-27 05:58:23: Pull and clean maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-06-15 11:03:18: Dep rate result for LTO400PC maurice at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-16 01:55:46: Continued MFS alarm pcristman at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-01 13:47:17: waiting for O2 MFC. seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-01 00:22:03: as per previous user seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-02 10:21:33: removing shutdown to allow use if desaired. seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-02 11:01:13: O2 MFC has been replaced seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-06 11:21:09: pull and clean in progress seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-06 11:21:09: pull and clean in progress seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-06 02:19:38: MFS alarm, fails in Pump11, LTO400PC seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-01 13:47:17: waiting for O2 MFC. seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-02 10:21:33: removing shutdown to allow use if desaired. seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-03 13:14:17: no O2 flow seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-03 15:47:11: interlock pin at metal side cap is broken seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-06-30 15:12:21: O2 MFC alarm seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-07 14:28:23: needs test after pull and clean seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-09 08:14:51: oil changed seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-09 09:17:46: I am looking at the intermitten Oxygen seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-16 10:23:52: replacing I/O board seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-16 10:23:52: replacing I/O board seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-16 11:44:56: replaced I/O board in MFS460 seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-20 09:05:40: oil change seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-06-10 08:29:03: oil changed seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-06-28 14:01:33: oil changed seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-09 08:14:51: oil changed seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-22 12:11:53: Phosphine/ilane tank very near empty seymour at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-27 14:47:51: pull and clean completed but not coat seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-30 00:31:02: vertical plate seymour at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-10 08:24:51: non-metal wand found cracked tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-12 21:02:56: MFS Alarm During PUMP11 tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-02 11:01:13: O2 MFC has been replaced tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-07 22:11:46: O2 MFC alarm again ! tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-08 22:03:33: O2 MFC flashing. tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-09 09:17:46: I am looking at the intermitten Oxygen tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-12 12:38:35: O2 MFS alarm tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-13 14:44:48: 4mins in MFS alarm tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-16 01:55:46: Continued MFS alarm tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-16 11:44:56: replaced I/O board in MFS460 tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 17:54:08: MFS alarm tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 17:59:25: No Silane tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-16 19:48:58: Still no deposition at 2nd run tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-20 01:10:36: MFS O2 alarm twice tberg at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-27 05:58:23: Pull and clean tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 06:28:55: Running coaT tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-27 14:47:51: pull and clean completed but not coat tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 06:28:55: Running coaT tberg at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-28 09:00:57: Needs test tberg at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-31 20:32:17: low dep rate ywidjaja at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-22 11:41:28: Phosphine flow problem? zappe at snf.stanford.edu
Shutdown tylanbpsg SNF 2010-07-01 00:22:03: as per previous user zzp at snf.stanford.edu
Problem tylanbpsg SNF 2010-07-31 16:36:52: no deposition at first run zzp at snf.stanford.edu
Comment tylanbpsg SNF 2010-07-31 22:13:20: my second run also have low dep. rate zzp at snf.stanford.edu

Last message date: Sat Jul 31 22:13:21 PDT 2010
Archived on: Fri Jan 11 13:15:35 PST 2013

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