Comment tylanbpsg SNF 2010-06-15 14:10:00: Nonuniform deposition

king at snf.stanford.edu king at snf.stanford.edu
Tue Jun 15 14:10:01 PDT 2010


My second run today had some variation across the two boats (previous run was only 1 wf/boat).  Results:   Metal boat, test wfs, back to front:  1108A, 1134A, 1130A, 941A.  Non metal boat, back to front:  1122A, 936A, 954A, 954A.   Std Dev was about 6A to 13A.   Measured on Nanospec litho. 




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