From cmcg at snf.stanford.edu Mon May 3 12:16:25 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 3 May 2010 12:16:25 -0700 Subject: Problem tylanbpsg SNF 2010-05-03 12:16:24: low dep rate Message-ID: about 130 A/min. An MFS alarm went off during the dep, but I never determined what caused it. It went away after pushin alarm ack once. The next user should keep an eye on this. From yeh at snf.stanford.edu Tue May 4 10:02:25 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 4 May 2010 10:02:25 -0700 Subject: Comment tylanbpsg SNF 2010-05-04 10:02:25: found tube not in pump down Message-ID: Tube was not pumped down. Found PUMP11 program loaded but not running. From mtan at snf.stanford.edu Sun May 9 11:11:23 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 9 May 2010 11:11:23 -0700 Subject: Problem tylanbpsg SNF 2010-05-09 11:11:23: tycom is stuck Message-ID: From seymour at snf.stanford.edu Mon May 10 06:51:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 May 2010 06:51:33 -0700 Subject: Problem tylanbpsg SNF 2010-05-09 11:11:23: tycom is stuck Message-ID: pump 11 running for 4 hours From maurice at snf.stanford.edu Mon May 10 08:56:22 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 May 2010 08:56:22 -0700 Subject: Problem tylanbpsg SNF 2010-05-10 08:56:22: boat fork sheath broken Message-ID: From seymour at snf.stanford.edu Mon May 10 09:08:12 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 10 May 2010 09:08:12 -0700 Subject: Problem tylanbpsg SNF 2010-05-10 08:56:22: boat fork sheath broken Message-ID: sheath replaced From cmcg at snf.stanford.edu Mon May 10 12:28:05 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 10 May 2010 12:28:05 -0700 Subject: Problem tylanbpsg SNF 2010-05-10 12:28:05: dep rate still low Message-ID: 136.7A/min, typically around 160A/min. All gas flows, temps, and pressure were at set point during deposition. Purge valve may need to be cleaned? From maurice at snf.stanford.edu Thu May 13 09:16:32 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 May 2010 09:16:32 -0700 Subject: Comment tylanbpsg SNF 2010-05-13 09:16:31: Moved boats back to center Message-ID: Boats were about 4 inch forward of the center. A user must have moved them forward to replace dummies and didn't move them back. They were centered after the last pull/clean. - Also visually checked injector...no breaks From seymour at snf.stanford.edu Fri May 14 08:32:16 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 May 2010 08:32:16 -0700 Subject: Comment tylanbpsg SNF 2010-05-14 08:32:14: oil changed Message-ID: level glass cleaned From cursive at snf.stanford.edu Tue May 18 16:48:27 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 18 May 2010 16:48:27 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:48:26: Message-ID: From maurice at snf.stanford.edu Tue May 18 16:50:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 May 2010 16:50:00 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:50:00: broken injector Message-ID: user Cursive reported no deposition...we looked in tube with flashlight and saw right injector (as you look into the tube) broken. From cursive at snf.stanford.edu Tue May 18 16:51:12 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 18 May 2010 16:51:12 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:51:12: no depostion Message-ID: gas injector is borken in the furnace. From latta at snf.stanford.edu Tue May 18 16:59:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 18 May 2010 16:59:45 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:48:26: Message-ID: np problem stated. See other shutdown msgs.... From seymour at snf.stanford.edu Wed May 19 10:12:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 May 2010 10:12:08 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:50:00: broken injector Message-ID: replaced broken loader sheath and silane injector. good base and leak rate. turned on element breaker and will do a hopt leak check before releasing tube. From seymour at snf.stanford.edu Wed May 19 10:13:05 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 May 2010 10:13:05 -0700 Subject: Comment tylanbpsg SNF 2010-05-04 10:02:25: found tube not in pump down Message-ID: noted From seymour at snf.stanford.edu Wed May 19 10:34:49 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 May 2010 10:34:49 -0700 Subject: Shutdown tylanbpsg SNF 2010-05-18 16:51:12: no depostion Message-ID: replaced broken quartz. tube base 3 mT, ROR 6 mT/min. Element breaker on and temp 160 deg at this time. running pump11. I will put system to problem for a test. From seymour at snf.stanford.edu Wed May 19 10:35:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 May 2010 10:35:26 -0700 Subject: Problem tylanbpsg SNF 2010-05-19 10:35:26: needs test after quartz replaced Message-ID: From maurice at snf.stanford.edu Wed May 19 11:47:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 May 2010 11:47:26 -0700 Subject: Comment tylanbpsg SNF 2010-05-19 11:47:26: Cursive running a test Message-ID: User cursive is running a test on BPSG after quartz replacement From tberg at snf.stanford.edu Fri May 21 07:00:05 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:00:05 -0700 Subject: Comment tylanbpsg SNF 2010-03-12 02:16:19: ran two runs, looks normal Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:00:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:00:23 -0700 Subject: Comment tylanbpsg SNF 2010-03-26 12:23:31: Dummy strip policy changed? Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:00:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:00:41 -0700 Subject: Comment tylanbpsg SNF 2010-03-30 17:17:17: all dummies are clean, none are loaded in the tube Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:00:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:00:52 -0700 Subject: Comment tylanbpsg SNF 2010-04-16 08:42:09: oil changed level glass clean Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:01:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:01:02 -0700 Subject: Comment tylanbpsg SNF 2010-04-20 01:25:27: LTO400PC dep rate a little high Message-ID: Noted From tberg at snf.stanford.edu Fri May 21 07:01:12 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:01:12 -0700 Subject: Comment tylanbpsg SNF 2010-04-20 02:59:59: High dep rate Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:01:30 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:01:30 -0700 Subject: Comment tylanbpsg SNF 2010-04-22 16:59:34: can't open door manually Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:01:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:01:52 -0700 Subject: Comment tylanbpsg SNF 2010-04-23 07:49:54: door opens now Message-ID: noted From tberg at snf.stanford.edu Fri May 21 07:02:06 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 May 2010 07:02:06 -0700 Subject: Comment tylanbpsg SNF 2010-04-30 08:32:57: oil changed Message-ID: noted From seymour at snf.stanford.edu Wed May 26 10:31:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 May 2010 10:31:06 -0700 Subject: Comment tylanbpsg SNF 2010-05-26 10:31:06: pull and clean starting Tuesday 6/1/10 Message-ID: At 6 am the tube will be turned down for the clean. From seymour at snf.stanford.edu Thu May 27 16:01:38 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 May 2010 16:01:38 -0700 Subject: Comment tylanbpsg SNF 2010-05-27 16:01:38: oil changed Message-ID: From seymour at snf.stanford.edu Fri May 28 07:54:19 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 May 2010 07:54:19 -0700 Subject: Problem tylanbpsg SNF 2010-05-19 10:35:26: needs test after quartz replaced Message-ID: system has many runs since this From seymour at snf.stanford.edu Fri May 28 07:54:45 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 May 2010 07:54:45 -0700 Subject: Comment tylanbpsg SNF 2010-05-14 08:32:14: oil changed Message-ID: noted