From tberg at snf.stanford.edu Thu Oct 7 06:32:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Oct 2010 06:32:46 -0700 Subject: Comment tylanbpsg SNF 2010-10-07 06:32:46: Found tube open-loaded pump11 Message-ID: From tberg at snf.stanford.edu Mon Oct 11 06:17:24 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:17:24 -0700 Subject: Problem tylanbpsg SNF 2010-07-22 11:41:28: Phosphine flow problem? Message-ID: resolved From tberg at snf.stanford.edu Mon Oct 11 06:17:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:17:41 -0700 Subject: Problem tylanbpsg SNF 2010-08-02 18:29:58: MFS O2 Alarm twice in LTO400PC. Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:17:50 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:17:50 -0700 Subject: Comment tylanbpsg SNF 2010-08-12 07:10:28: testing no Phosphine Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:18:02 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:18:02 -0700 Subject: Comment tylanbpsg SNF 2010-08-31 18:44:59: LTO 400 deposition run is ok Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:18:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:18:27 -0700 Subject: Problem tylanbpsg SNF 2010-08-14 16:49:47: low deposition rate Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:18:48 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:18:48 -0700 Subject: Comment tylanbpsg SNF 2010-09-09 09:29:55: PSG400 test Message-ID: noted From tberg at snf.stanford.edu Mon Oct 11 06:19:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:19:13 -0700 Subject: Comment tylanbpsg SNF 2010-10-07 06:32:46: Found tube open-loaded pump11 Message-ID: resolved From seymour at snf.stanford.edu Wed Oct 13 09:22:16 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Oct 2010 09:22:16 -0700 Subject: Comment tylanbpsg SNF 2010-10-13 09:22:16: oil changed Message-ID: sight glass cleaned From cursive at snf.stanford.edu Wed Oct 13 15:23:38 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 13 Oct 2010 15:23:38 -0700 Subject: Problem tylanbpsg SNF 2010-10-13 15:23:35: Running PSG400 10min, but no film on wafers Message-ID: Running PSG400(8%). Using nanospec, and can't measure any film on it. From jasonlin at snf.stanford.edu Thu Oct 14 20:10:21 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Thu, 14 Oct 2010 20:10:21 -0700 Subject: Comment tylanbpsg SNF 2010-10-14 20:10:20: LTO300PC Message-ID: LTO300PC 5 min should give 300A, only got 100A From liangjl at snf.stanford.edu Fri Oct 15 19:30:30 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Fri, 15 Oct 2010 19:30:30 -0700 Subject: Problem tylanbpsg SNF 2010-10-15 19:30:29: LTO300PC low deposition rate Message-ID: expect 60nm, got only 18nm From cursive at snf.stanford.edu Fri Oct 15 22:04:18 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 15 Oct 2010 22:04:18 -0700 Subject: Problem tylanbpsg SNF 2010-10-15 22:04:17: deposition rate prblem Message-ID: PSG 400 1hours After Woolam, it's about 34 A. From karthikv at snf.stanford.edu Sat Oct 16 10:20:42 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sat, 16 Oct 2010 10:20:42 -0700 Subject: Comment tylanbpsg SNF 2010-10-16 10:20:41: Non metal LTO dummies Message-ID: Found the box by the YES oven this morning. From karthikv at snf.stanford.edu Sat Oct 16 16:07:45 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sat, 16 Oct 2010 16:07:45 -0700 Subject: Problem tylanbpsg SNF 2010-10-16 16:07:44: MFS alarm Message-ID: Did a 3hr LTO400PC dep. Received no errors for the first 30mins in the deposition step. On returning at completion of dep there was an MFS alarm which resulted in almost no deposition (only 350nm). From jcdoll at snf.stanford.edu Sun Oct 17 12:58:59 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 17 Oct 2010 12:58:59 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-17 12:58:58: broken sheath Message-ID: temperature was ~100C below setpoint and system wasn't pumping down. eric helped debug a broken sheath - we could hear a gas leak and visually confirmed the crack. From seymour at snf.stanford.edu Mon Oct 18 09:17:11 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Oct 2010 09:17:11 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-17 12:58:58: broken sheath Message-ID: replaced broken quartz. passed cold leak test. heating up for a coat. will need a test after that. From seymour at snf.stanford.edu Mon Oct 18 09:17:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Oct 2010 09:17:55 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-18 09:17:54: needs test after coat Message-ID: From maurice at snf.stanford.edu Mon Oct 18 16:50:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Oct 2010 16:50:20 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-18 16:50:20: MFS: SiH4 interlock Message-ID: Ran LTO400PC 00:20:00 During the 20 minute deposition the system gave the SiH4 interlock error 6 times. The first 3 times it took the ~2 minutes for the Si to flow again. After that the Si stayed at zero. Pressing the alarm ack silenced the alarm and the SiH4 LED stpped flashing on the panel but two minutes later it would give the same alarm. From seymour at snf.stanford.edu Tue Oct 19 07:53:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 07:53:08 -0700 Subject: Comment tylanbpsg SNF 2010-10-19 07:53:08: running gas flow test Message-ID: From seymour at snf.stanford.edu Tue Oct 19 09:22:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 09:22:33 -0700 Subject: Comment tylanbpsg SNF 2010-10-19 09:22:33: flow test ran without faults Message-ID: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:05:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:05:02 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-18 16:50:20: MFS: SiH4 interlock Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:06:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:06:35 -0700 Subject: Shutdown tylanbpsg SNF 2010-10-18 09:17:54: needs test after coat Message-ID: Ran LTO400PC 00:20:00 expected ~2300Ang actually 2580 Dep rate higher than normal From maurice at snf.stanford.edu Tue Oct 19 12:07:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:07:13 -0700 Subject: Problem tylanbpsg SNF 2010-10-16 16:07:44: MFS alarm Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:07:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:07:26 -0700 Subject: Problem tylanbpsg SNF 2010-10-15 22:04:17: deposition rate prblem Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:07:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:07:38 -0700 Subject: Problem tylanbpsg SNF 2010-10-15 19:30:29: LTO300PC low deposition rate Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:07:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:07:50 -0700 Subject: Problem tylanbpsg SNF 2010-10-13 15:23:35: Running PSG400 10min, but no film on wafers Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:08:05 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:08:05 -0700 Subject: Comment tylanbpsg SNF 2010-10-16 10:20:41: Non metal LTO dummies Message-ID: logged From maurice at snf.stanford.edu Tue Oct 19 12:08:16 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:08:16 -0700 Subject: Comment tylanbpsg SNF 2010-10-14 20:10:20: LTO300PC Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From maurice at snf.stanford.edu Tue Oct 19 12:08:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:08:36 -0700 Subject: Problem tylanbpsg SNF 2010-09-12 23:18:33: MFC Alarm Message-ID: >From Ray: I ran LTO400 for 30 mins after reconnecting air line to electric solenoids for gas nupro valves. Checked solenoid electricial connections. Ready for process test. From cfchiang at snf.stanford.edu Sun Oct 31 17:15:47 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 31 Oct 2010 17:15:47 -0700 Subject: Problem tylanbpsg SNF 2010-10-31 17:15:46: encountered O2 MFS alarm several times Message-ID: