October 2010 Archives by date

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Starting: Thu Oct 7 06:32:46 PDT 2010
Ending: Sun Oct 31 17:15:47 PDT 2010
Messages: 31

• Comment tylanbpsg SNF 2010-10-07 06:32:46: Found tube open-loaded pump11   tberg at snf.stanford.edu
• Problem tylanbpsg SNF 2010-07-22 11:41:28: Phosphine flow problem?   tberg at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-02 18:29:58: MFS O2 Alarm twice in LTO400PC.   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-12 07:10:28: testing no Phosphine   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-08-31 18:44:59: LTO 400 deposition run is ok   tberg at snf.stanford.edu
• Problem tylanbpsg SNF 2010-08-14 16:49:47: low deposition rate   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-09-09 09:29:55: PSG400 test   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-07 06:32:46: Found tube open-loaded pump11   tberg at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-13 09:22:16: oil changed   seymour at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-13 15:23:35: Running PSG400 10min, but no film on wafers   cursive at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-14 20:10:20: LTO300PC   jasonlin at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-15 19:30:29: LTO300PC low deposition rate   liangjl at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-15 22:04:17: deposition rate prblem   cursive at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-16 10:20:41: Non metal LTO dummies   karthikv at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-16 16:07:44: MFS alarm   karthikv at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-17 12:58:58: broken sheath   jcdoll at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-17 12:58:58: broken sheath   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-18 09:17:54: needs test after coat   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-18 16:50:20: MFS: SiH4 interlock   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-19 07:53:08: running gas flow test   seymour at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-19 09:22:33: flow test ran without faults   seymour at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-18 16:50:20: MFS: SiH4 interlock   maurice at snf.stanford.edu
• Shutdown tylanbpsg SNF 2010-10-18 09:17:54: needs test after coat   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-16 16:07:44: MFS alarm   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-15 22:04:17: deposition rate prblem   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-15 19:30:29: LTO300PC low deposition rate   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-13 15:23:35: Running PSG400 10min, but no film on wafers   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-16 10:20:41: Non metal LTO dummies   maurice at snf.stanford.edu
• Comment tylanbpsg SNF 2010-10-14 20:10:20: LTO300PC   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-09-12 23:18:33: MFC Alarm   maurice at snf.stanford.edu
• Problem tylanbpsg SNF 2010-10-31 17:15:46: encountered O2 MFS alarm several times   cfchiang at snf.stanford.edu

Last message date: Sun Oct 31 17:15:47 PDT 2010
Archived on: Fri Jan 11 13:15:37 PST 2013

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