From maurice at snf.stanford.edu Wed Sep 1 11:16:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Sep 2010 11:16:17 -0700 Subject: Problem tylanbpsg SNF 2010-08-31 16:53:39: Thin dep Message-ID: cursive ran two runs last night and both had the correct dep rate for LTO400pc From seymour at snf.stanford.edu Fri Sep 3 09:00:00 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Sep 2010 09:00:00 -0700 Subject: Comment tylanbpsg SNF 2010-09-03 08:59:59: oil changed Message-ID: level glass cleaned From tberg at snf.stanford.edu Fri Sep 3 10:02:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Sep 2010 10:02:43 -0700 Subject: Comment tylanbpsg SNF 2010-09-03 10:02:42: replaced I/O board in MFS 460 Message-ID: replaced I/O board in MFS 460 to try and address intermittent MFS alarms From bchui at snf.stanford.edu Sun Sep 5 21:52:06 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 5 Sep 2010 21:52:06 -0700 Subject: Problem tylanbpsg SNF 2010-09-05 21:52:05: Still got MFC error Message-ID: the first time i ran it; got only half the desired thickness. Re-ran, this time no error and got expected thickness. From chienyuc at snf.stanford.edu Mon Sep 6 22:52:22 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Mon, 6 Sep 2010 22:52:22 -0700 Subject: Problem tylanbpsg SNF 2010-09-06 22:52:22: fork shell broken Message-ID: The quartz shell of the fork was loose and I unintentionally broke it. Sorry about that. From tberg at snf.stanford.edu Tue Sep 7 06:33:41 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Sep 2010 06:33:41 -0700 Subject: Problem tylanbpsg SNF 2010-09-06 22:52:22: fork shell broken Message-ID: Replaced boat fork From seymour at snf.stanford.edu Tue Sep 7 08:07:34 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 7 Sep 2010 08:07:34 -0700 Subject: Comment tylanbpsg SNF 2010-09-07 08:07:34: installed new O2 pneumatic solenoid Message-ID: From seymour at snf.stanford.edu Tue Sep 7 08:10:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 7 Sep 2010 08:10:10 -0700 Subject: Comment tylanbpsg SNF 2010-07-20 09:05:40: oil change Message-ID: noted From maurice at snf.stanford.edu Tue Sep 7 15:08:06 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:08:06 -0700 Subject: Comment tylanbpsg SNF 2010-09-07 15:08:05: non metal dummies added Message-ID: 18 new diffusion cleaned non-metal dummies added to the cart From maurice at snf.stanford.edu Tue Sep 7 15:08:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:08:37 -0700 Subject: Comment tylanbpsg SNF 2010-08-06 15:21:29: pump too be replaced Monday morning. Message-ID: completed From maurice at snf.stanford.edu Tue Sep 7 15:08:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:08:50 -0700 Subject: Comment tylanbpsg SNF 2010-08-09 08:55:17: Pump has been changed Message-ID: completed From maurice at snf.stanford.edu Tue Sep 7 15:09:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 7 Sep 2010 15:09:17 -0700 Subject: Problem tylanbpsg SNF 2010-07-22 12:11:53: Phosphine/ilane tank very near empty Message-ID: logged From jaehlee at snf.stanford.edu Wed Sep 8 06:35:30 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Wed, 8 Sep 2010 06:35:30 -0700 Subject: Comment tylanbpsg SNF 2010-09-08 06:35:30: nonmetal / metal dummies LTO stripped Message-ID: From maurice at snf.stanford.edu Thu Sep 9 09:29:56 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 9 Sep 2010 09:29:56 -0700 Subject: Comment tylanbpsg SNF 2010-09-09 09:29:55: PSG400 test Message-ID: Diff team ran PSG400 00:30:00 SiH4= 15 PH3=85 O2= 136 Hand held eagle and MDA stayed at zero thoughout the entire run. Process pressure sat around 217 mtorr. From kyunglok at snf.stanford.edu Thu Sep 9 15:21:49 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Thu, 9 Sep 2010 15:21:49 -0700 Subject: Comment tylanbpsg SNF 2010-09-09 15:21:49: Not enough Nonmetal dummies Message-ID: Front boat just had one wafer. From maurice at snf.stanford.edu Thu Sep 9 17:07:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 9 Sep 2010 17:07:11 -0700 Subject: Comment tylanbpsg SNF 2010-09-09 15:21:49: Not enough Nonmetal dummies Message-ID: There are 22 dummies in the Non metal box in tghe LTO cart! From seymour at snf.stanford.edu Fri Sep 10 07:38:45 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Sep 2010 07:38:45 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-10 07:38:45: burnbox liner broken Message-ID: From seymour at snf.stanford.edu Fri Sep 10 11:27:54 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Sep 2010 11:27:54 -0700 Subject: Comment tylanbpsg SNF 2010-09-10 11:27:54: oil changed Message-ID: level glass cleaned From seymour at snf.stanford.edu Fri Sep 10 15:17:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Sep 2010 15:17:26 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-10 07:38:45: burnbox liner broken Message-ID: liner reploaced and burnbox up to temp, tube running pump11 From mtan at snf.stanford.edu Sun Sep 12 15:31:36 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 12 Sep 2010 15:31:36 -0700 Subject: Problem tylanbpsg SNF 2010-09-12 15:31:36: failed leak check LTO450 Message-ID: Skipped from step 45 to 110. Process not completed From jasonlin at snf.stanford.edu Sun Sep 12 23:18:34 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 12 Sep 2010 23:18:34 -0700 Subject: Problem tylanbpsg SNF 2010-09-12 23:18:33: MFC Alarm Message-ID: Got MFC alarm about 1 minute into deposition step. I saw the process pressure at this point was about 300. After clearing alarm and waiting about 30s, the pressure went back down to 200. Actual thickness was close to expected (450nm expected, 490nm actual). From tberg at snf.stanford.edu Mon Sep 13 06:00:28 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:00:28 -0700 Subject: Comment tylanbpsg SNF 2010-09-08 06:35:30: nonmetal / metal dummies LTO stripped Message-ID: noted From tberg at snf.stanford.edu Mon Sep 13 06:00:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:00:46 -0700 Subject: Comment tylanbpsg SNF 2010-09-07 15:08:05: non metal dummies added Message-ID: noted From tberg at snf.stanford.edu Mon Sep 13 06:01:09 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:01:09 -0700 Subject: Comment tylanbpsg SNF 2010-09-03 08:59:59: oil changed Message-ID: noted From tberg at snf.stanford.edu Mon Sep 13 06:01:35 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:01:35 -0700 Subject: Problem tylanbpsg SNF 2010-08-12 08:58:33: Tube available for non doped process Message-ID: noted From tberg at snf.stanford.edu Mon Sep 13 06:01:54 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Sep 2010 06:01:54 -0700 Subject: Comment tylanbpsg SNF 2010-08-26 00:06:52: Dummy wafers are dirty Message-ID: noted From maurice at snf.stanford.edu Wed Sep 15 15:26:09 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Sep 2010 15:26:09 -0700 Subject: Comment tylanbpsg SNF 2010-09-15 15:26:08: mfc alarm Message-ID: O2 kicked off during LTO450 recipe user: mtan From bchui at snf.stanford.edu Wed Sep 22 15:56:38 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 22 Sep 2010 15:56:38 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-22 15:56:38: failed leak check twice Message-ID: From maurice at snf.stanford.edu Wed Sep 22 16:02:31 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 16:02:31 -0700 Subject: Comment tylanbpsg SNF 2010-09-22 16:02:30: Broken Sheath Message-ID: Bchui reported that system failed leakcheck. The left sheath (looking into the tube) is broken at the source end. - System was already scheduled for a pull/clean tomorrow...it is at 30.6um From seymour at snf.stanford.edu Thu Sep 23 06:48:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Sep 2010 06:48:23 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-23 06:48:23: pull and clean Message-ID: From maurice at snf.stanford.edu Fri Sep 24 16:18:28 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 24 Sep 2010 16:18:28 -0700 Subject: Comment tylanbpsg SNF 2010-09-24 16:18:27: update Message-ID: TylanBPSG will be down for the weekend. The new tube is not pumping down and may have to go back to the vendor. We hope to have the system back together late Monday. We will send out an update Monday. From seymour at snf.stanford.edu Wed Sep 29 09:53:16 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Sep 2010 09:53:16 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-22 15:56:38: failed leak check twice Message-ID: found the air off to gate valve, probably turned off during nitride pump failure From seymour at snf.stanford.edu Wed Sep 29 09:53:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Sep 2010 09:53:52 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-23 06:48:23: pull and clean Message-ID: pull and clean complete. running coat From seymour at snf.stanford.edu Wed Sep 29 09:59:39 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Sep 2010 09:59:39 -0700 Subject: Comment tylanbpsg SNF 2010-09-24 16:18:27: update Message-ID: tube up for a test after coat From seymour at snf.stanford.edu Wed Sep 29 10:00:04 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Sep 2010 10:00:04 -0700 Subject: Problem tylanbpsg SNF 2010-09-12 15:31:36: failed leak check LTO450 Message-ID: passed leak check From maurice at snf.stanford.edu Wed Sep 29 10:26:23 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 10:26:23 -0700 Subject: Comment tylanbpsg SNF 2010-09-29 10:26:23: running test after pull/clean Message-ID: From maurice at snf.stanford.edu Wed Sep 29 11:17:49 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 11:17:49 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-29 11:17:49: testing after pull/clean Message-ID: From maurice at snf.stanford.edu Wed Sep 29 15:53:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:53:30 -0700 Subject: Shutdown tylanbpsg SNF 2010-09-29 11:17:49: testing after pull/clean Message-ID: Ran LTO400PC 00:20:00 expected 2600 ang actual 2330 Layer thinner than expected From maurice at snf.stanford.edu Wed Sep 29 15:53:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:53:37 -0700 Subject: Comment tylanbpsg SNF 2010-09-29 10:26:23: running test after pull/clean Message-ID: Ran LTO400PC 00:20:00 expected 2600 ang actual 2330 Layer thinner than expected From maurice at snf.stanford.edu Wed Sep 29 15:53:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:53:54 -0700 Subject: Comment tylanbpsg SNF 2010-09-22 16:02:30: Broken Sheath Message-ID: replaced during pull/clean From maurice at snf.stanford.edu Wed Sep 29 15:55:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:55:01 -0700 Subject: Problem tylanbpsg SNF 2010-09-05 21:52:05: Still got MFC error Message-ID: same error already reported From maurice at snf.stanford.edu Wed Sep 29 15:55:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:55:17 -0700 Subject: Problem tylanbpsg SNF 2010-08-15 15:36:05: MFS alarmed 5-6 times using LTO 450 Message-ID: same error already reported From maurice at snf.stanford.edu Wed Sep 29 15:55:39 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Sep 2010 15:55:39 -0700 Subject: Problem tylanbpsg SNF 2010-08-04 01:47:40: MFS alarm for oxygen line during deposition Message-ID: same error reported several times