Comment tylanbpsg SNF 2010-09-09 09:29:55: PSG400 test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Sep 9 09:29:56 PDT 2010


Diff team ran PSG400  00:30:00
SiH4= 15
PH3=85 
O2= 136
Hand held eagle and MDA stayed at zero thoughout the entire run.
Process pressure sat around 217 mtorr.




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