Problem tylanbpsg SNF 2010-09-12 23:18:33: MFC Alarm

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Sep 12 23:18:34 PDT 2010


Got MFC alarm about 1 minute into deposition step.  I saw the process pressure at this point was about 300.  After clearing alarm and waiting about 30s, the pressure went back down to 200.  Actual thickness was close to expected (450nm expected, 490nm actual).




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