From ajamo at snf.stanford.edu Fri Apr 1 22:16:36 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 1 Apr 2011 22:16:36 -0700 Subject: Problem tylanbpsg SNF 2011-04-01 22:16:36: Door was sticky Message-ID: Door was a bit sticky. Yes, I waited a long time (15+min) after venting to try to manually test the door. It did open on the 4th try From seymour at snf.stanford.edu Mon Apr 4 07:28:54 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:28:54 -0700 Subject: Comment tylanbpsg SNF 2011-04-04 07:28:54: alarming for O2 flow, no operator around Message-ID: From seymour at snf.stanford.edu Mon Apr 4 08:39:08 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Apr 2011 08:39:08 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-04 08:39:08: oxygen flow issues Message-ID: From seymour at snf.stanford.edu Mon Apr 4 15:17:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Apr 2011 15:17:46 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-04 08:39:08: oxygen flow issues Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. needs a test after repair From seymour at snf.stanford.edu Mon Apr 4 15:18:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Apr 2011 15:18:23 -0700 Subject: Comment tylanbpsg SNF 2011-04-04 15:18:22: needs test after repair Message-ID: From seymour at snf.stanford.edu Tue Apr 5 09:13:16 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 5 Apr 2011 09:13:16 -0700 Subject: Problem tylanbpsg SNF 2011-04-01 22:16:36: Door was sticky Message-ID: checked vac valves and theu were not leaking. Adjusted clutch on loader and vented tube. and pushed run and tube opened. From maurice at snf.stanford.edu Tue Apr 5 16:43:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Apr 2011 16:43:14 -0700 Subject: Comment tylanbpsg SNF 2011-04-04 15:18:22: needs test after repair Message-ID: Ran LTO400OC 00:20:00 expected 2450ang actual 2652 ang A lttle thicker than expected From maurice at snf.stanford.edu Wed Apr 6 11:14:52 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:14:52 -0700 Subject: Problem tylanbpsg SNF 2011-02-08 02:41:48: MFS alarm + thickness variation Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. From maurice at snf.stanford.edu Wed Apr 6 11:15:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:15:02 -0700 Subject: Problem tylanbpsg SNF 2011-02-10 11:12:40: O2 MFS alarm during deposition Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. From maurice at snf.stanford.edu Wed Apr 6 11:15:20 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:15:20 -0700 Subject: Comment tylanbpsg SNF 2011-02-15 10:51:19: O2 MFS Alarm Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. From maurice at snf.stanford.edu Wed Apr 6 11:15:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:15:41 -0700 Subject: Comment tylanbpsg SNF 2011-02-09 00:17:55: test run Message-ID: logged From maurice at snf.stanford.edu Wed Apr 6 11:15:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:15:55 -0700 Subject: Problem tylanbpsg SNF 2011-02-17 20:05:29: MFS alarm Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. From maurice at snf.stanford.edu Wed Apr 6 11:16:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:16:05 -0700 Subject: Comment tylanbpsg SNF 2011-03-06 19:18:55: mfs alarm Message-ID: replaced darlington xstr for channel 1 (O2) and checked operation. From maurice at snf.stanford.edu Wed Apr 6 11:16:16 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:16:16 -0700 Subject: Comment tylanbpsg SNF 2011-03-10 10:54:49: new dummies added Message-ID: logged From maurice at snf.stanford.edu Wed Apr 6 11:18:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:18:04 -0700 Subject: Problem tylanbpsg SNF 2011-04-06 11:18:02: O2 update Message-ID: Ray has changed a component in the O2 portion of the controller. We hope this has fixed the intermittent O2 issue that we have had for months.- We are clearing the old reports of O2 MFS errors from coral and ask youall to report any new issues you see (we know that once it is reported a few time users don't see the need of reporting a documented problem). - We still recommend that you monitor your whole deposition...and require that you record your deposition pressure in the logbook. From maurice at snf.stanford.edu Wed Apr 6 11:18:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:18:33 -0700 Subject: Comment tylanbpsg SNF 2011-03-25 10:49:46: o2 mfs error Message-ID: Ray has changed a component in the O2 portion of the controller. From maurice at snf.stanford.edu Wed Apr 6 11:18:46 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:18:46 -0700 Subject: Comment tylanbpsg SNF 2011-04-04 07:28:54: alarming for O2 flow, no operator around Message-ID: logged From tberg at snf.stanford.edu Wed Apr 6 12:17:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Apr 2011 12:17:53 -0700 Subject: Comment tylanbpsg SNF 2010-12-10 14:42:51: Removed Pressure tolerance from LTO400PC Message-ID: logged From cursive at snf.stanford.edu Wed Apr 6 18:57:51 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 6 Apr 2011 18:57:51 -0700 Subject: Problem tylanbpsg SNF 2011-04-06 18:57:50: the light of "soft pump" is always off Message-ID: From jprovine at snf.stanford.edu Wed Apr 6 23:13:29 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 6 Apr 2011 23:13:29 -0700 Subject: Problem tylanbpsg SNF 2011-04-06 23:13:28: MFS alarm during LTO400 Message-ID: multiple MFS alarms in first minutes of LTO400 run. the O2 flow output is 120, but the input read is 0.7 so clearly this is not working. aborted run and removed my wafers then ran pump11 for standby. From tberg at snf.stanford.edu Thu Apr 7 08:33:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Apr 2011 08:33:57 -0700 Subject: Comment tylanbpsg SNF 2011-04-07 08:33:56: Ran LTO400 Message-ID: Ran LTO400 for 30 minutes with data logger no issues. Started again for another 30 minute run. From maurice at snf.stanford.edu Thu Apr 7 10:45:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Apr 2011 10:45:14 -0700 Subject: Comment tylanbpsg SNF 2011-04-07 10:45:13: LTO O2 test Message-ID: Started again for another 30 minute run. From ajamo at snf.stanford.edu Thu Apr 7 18:59:06 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 7 Apr 2011 18:59:06 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-07 18:59:05: Door? loud noise Message-ID: There was a loud turbo-like noise coming from the door of the LTO furnace. - not pumping down. I left a message on the SNF staff phone, when I came back the Pump 11 program aborted, don't know if it aborted on it's own or if someone stopped it. I was not using it today, I am at innotec & came over when I heard the noise. From tberg at snf.stanford.edu Fri Apr 8 07:22:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:22:57 -0700 Subject: Comment tylanbpsg SNF 2011-04-07 08:33:56: Ran LTO400 Message-ID: Ran 3 30 minute LTO400 tests with data logger,. No problems From tberg at snf.stanford.edu Fri Apr 8 07:23:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:23:07 -0700 Subject: Comment tylanbpsg SNF 2011-04-07 10:45:13: LTO O2 test Message-ID: Ran 3 30 minute LTO400 tests with data logger,. No problems From seymour at snf.stanford.edu Fri Apr 8 10:31:34 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Apr 2011 10:31:34 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-07 18:59:05: Door? loud noise Message-ID: door not sealing properly. I adjusted loader/door for good seal. replaced loader board. checked operation in manual and auto and tube pumped down. graphics panel led for door slo pump and gate valve not working but signals from controller know door is closes position and valves do open. As a precaution, please stay with the tube for a few mins after starting wait about 3 mins to makesure door seals if not push abort and contactmaintenance. From seymour at snf.stanford.edu Fri Apr 8 10:33:31 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Apr 2011 10:33:31 -0700 Subject: Problem tylanbpsg SNF 2011-04-08 10:33:31: door had a seal problem Message-ID: I adjusted door/loader and checked operation as a precaution please stay with the tube for a few mins when starting pumpdown. From narii at snf.stanford.edu Mon Apr 11 11:00:45 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 11 Apr 2011 11:00:45 -0700 Subject: Problem tylanbpsg SNF 2011-04-11 11:00:45: Boat handler fell on the ground Message-ID: An arm of the handler got loose, and fell on the ground. Need decontamination From seymour at snf.stanford.edu Fri Apr 15 09:29:22 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Apr 2011 09:29:22 -0700 Subject: Comment tylanbpsg SNF 2011-04-15 09:29:21: oil and filter changed Message-ID: levle glass cleaned From jcdoll at snf.stanford.edu Sat Apr 16 09:15:37 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 16 Apr 2011 09:15:37 -0700 Subject: Problem tylanbpsg SNF 2011-04-16 09:15:36: boat handler's right sheath broken Message-ID: along the same lines as the 4/11 problem report, the right arm of the boat handler was so loose that it fell off with the slightest tilt. it fell on the ground and cracked. not sure if the screw is loosening or if someone changed the spacing and forgot to retighten the screw. sorry for the inconvenience. From seymour at snf.stanford.edu Mon Apr 18 08:48:26 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 Apr 2011 08:48:26 -0700 Subject: Problem tylanbpsg SNF 2011-04-16 09:15:36: boat handler's right sheath broken Message-ID: replaced load fork quartz sheath, tightened screw. From sclaussen at snf.stanford.edu Tue Apr 26 21:33:39 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 26 Apr 2011 21:33:39 -0700 Subject: Problem tylanbpsg SNF 2011-04-26 21:33:39: Deposition rate off Message-ID: Both myself and the previous user (kokab) got greatly reduced deposition rates. I was aiming for 30nm and got 5nm; she was aiming for 1.6um and got ~.14. From rik at snf.stanford.edu Tue Apr 26 23:17:22 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Tue, 26 Apr 2011 23:17:22 -0700 Subject: Problem tylanbpsg SNF 2011-04-26 23:17:21: Hardly any deposition happening Message-ID: Ran LTO400PC for 1 hour expecting 1um deposition, but got 660A instead. Previous 2 users also had little to no deposition. From tberg at snf.stanford.edu Wed Apr 27 07:11:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Apr 2011 07:11:20 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-27 07:11:19: looking for problem Message-ID: From tberg at snf.stanford.edu Wed Apr 27 07:28:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Apr 2011 07:28:12 -0700 Subject: Comment tylanbpsg SNF 2011-04-27 07:28:11: injector broken-replacing Message-ID: From seymour at snf.stanford.edu Wed Apr 27 08:52:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:52:00 -0700 Subject: Comment tylanbpsg SNF 2011-04-27 08:51:59: replacing tube Message-ID: From seymour at snf.stanford.edu Wed Apr 27 14:25:26 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:25:26 -0700 Subject: Problem tylanbpsg SNF 2011-04-26 21:33:39: Deposition rate off Message-ID: silane injecter broken From seymour at snf.stanford.edu Wed Apr 27 14:26:20 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:26:20 -0700 Subject: Problem tylanbpsg SNF 2011-04-08 10:33:31: door had a seal problem Message-ID: door sealing ok at this time From seymour at snf.stanford.edu Wed Apr 27 14:27:29 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:27:29 -0700 Subject: Problem tylanbpsg SNF 2011-04-11 11:00:45: Boat handler fell on the ground Message-ID: loader handle is ok after sheath replacement and tightening screw From seymour at snf.stanford.edu Wed Apr 27 14:28:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:28:18 -0700 Subject: Problem tylanbpsg SNF 2011-04-26 23:17:21: Hardly any deposition happening Message-ID: broken injector, replaced From seymour at snf.stanford.edu Wed Apr 27 14:29:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:29:17 -0700 Subject: Shutdown tylanbpsg SNF 2011-04-27 07:11:19: looking for problem Message-ID: removed tube and broken quartz. installed a clean tube and loader From seymour at snf.stanford.edu Wed Apr 27 14:30:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:30:03 -0700 Subject: Comment tylanbpsg SNF 2011-04-27 07:28:11: injector broken-replacing Message-ID: replacement complete From seymour at snf.stanford.edu Wed Apr 27 14:30:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:30:35 -0700 Subject: Comment tylanbpsg SNF 2011-04-27 08:51:59: replacing tube Message-ID: tube in leak check passed and coat running From seymour at snf.stanford.edu Wed Apr 27 14:31:16 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:31:16 -0700 Subject: Problem tylanbpsg SNF 2011-04-27 14:31:15: needs testing after repair and tube replaced Message-ID: From maurice at snf.stanford.edu Thu Apr 28 10:17:13 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Apr 2011 10:17:13 -0700 Subject: Problem tylanbpsg SNF 2011-04-27 14:31:15: needs testing after repair and tube replaced Message-ID: System was run 3 times last night. From the logbook, users are getting the deprate they are expecting and there where no reports of uniformity problems