From tberg at snf.stanford.edu Mon Aug 1 06:27:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Aug 2011 06:27:50 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-01 06:27:49: Broken cantilever sheaths Message-ID: From seymour at snf.stanford.edu Mon Aug 1 07:29:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Aug 2011 07:29:17 -0700 Subject: Comment tylanbpsg SNF 2011-08-01 07:29:16: replacing broken quartz Message-ID: From seymour at snf.stanford.edu Mon Aug 1 11:04:14 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:04:14 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-01 06:27:49: Broken cantilever sheaths Message-ID: passed cold and hot leak checks From seymour at snf.stanford.edu Mon Aug 1 11:06:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:06:01 -0700 Subject: Problem tylanbpsg SNF 2011-07-29 13:07:16: LCD screen next to tube is out Message-ID: display working fine at this time From mtan at snf.stanford.edu Sun Aug 7 16:36:16 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 7 Aug 2011 16:36:16 -0700 Subject: Problem tylanbpsg SNF 2011-08-07 16:36:16: tube not pumped down Message-ID: loaded program pump 11 From sgchong at snf.stanford.edu Tue Aug 9 19:35:34 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Tue, 9 Aug 2011 19:35:34 -0700 Subject: Problem tylanbpsg SNF 2011-08-09 19:35:34: Not enough nonmetal dummy wafers Message-ID: nonmetal boat is not filled with dummy wafers From tberg at snf.stanford.edu Fri Aug 12 07:25:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Aug 2011 07:25:11 -0700 Subject: Problem tylanbpsg SNF 2011-08-12 07:25:11: no PH3 Message-ID: Phosphine is currently off From seymour at snf.stanford.edu Fri Aug 12 07:44:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 12 Aug 2011 07:44:49 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-12 07:44:48: checking exhaust Message-ID: From tberg at snf.stanford.edu Fri Aug 12 13:38:37 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Aug 2011 13:38:37 -0700 Subject: Comment tylanbpsg SNF 2011-08-12 13:38:37: System down for the weekend Message-ID: System down for the weekend. Still checkijng out exhaust. Pump changed and all fittings checked. Checked exhaust line to burn box. Ted From tberg at snf.stanford.edu Mon Aug 15 10:00:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 10:00:48 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-12 07:44:48: checking exhaust Message-ID: Checked exhaust.ran system with gases back for undoped oxide at this time. Will monitor with eagle while running. From tberg at snf.stanford.edu Mon Aug 15 11:45:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 11:45:35 -0700 Subject: Comment tylanbpsg SNF 2011-08-12 13:38:37: System down for the weekend Message-ID: Checked exhaust.ran system with gases back for undoped oxide at this time. Will monitor with eagle while running. From tberg at snf.stanford.edu Mon Aug 15 14:10:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 14:10:16 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-15 14:10:15: Both injectors are broken Message-ID: Both injectors are broken cooling down for replacement From seymour at snf.stanford.edu Tue Aug 16 14:33:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:33:19 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-15 14:10:15: Both injectors are broken Message-ID: injectors replaced and leak check passed. tube will need a test before running process wafers. From seymour at snf.stanford.edu Tue Aug 16 14:33:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:33:55 -0700 Subject: Problem tylanbpsg SNF 2011-08-16 14:33:54: needs testing after repair. Message-ID: From lennonl at snf.stanford.edu Tue Aug 16 16:34:29 2011 From: lennonl at snf.stanford.edu (lennonl at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:34:29 -0700 Subject: Problem tylanbpsg SNF 2011-08-16 16:34:28: MFS Alarm Message-ID: could not run my process also could not run pump program From tberg at snf.stanford.edu Wed Aug 17 06:22:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 17 Aug 2011 06:22:47 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-17 06:22:47: Injector broken Message-ID: From seymour at snf.stanford.edu Wed Aug 17 08:32:28 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Aug 2011 08:32:28 -0700 Subject: Comment tylanbpsg SNF 2011-08-17 08:32:27: tube has a crack at door end Message-ID: pulling tube From seymour at snf.stanford.edu Fri Aug 19 13:56:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:56:23 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-17 06:22:47: Injector broken Message-ID: injectors and tube replaced From seymour at snf.stanford.edu Fri Aug 19 13:56:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:56:39 -0700 Subject: Comment tylanbpsg SNF 2011-08-17 08:32:27: tube has a crack at door end Message-ID: tube replaced From seymour at snf.stanford.edu Fri Aug 19 13:57:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:57:05 -0700 Subject: Problem tylanbpsg SNF 2011-08-16 16:34:28: MFS Alarm Message-ID: injector was broken From seymour at snf.stanford.edu Fri Aug 19 13:57:40 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:57:40 -0700 Subject: Problem tylanbpsg SNF 2011-08-07 16:36:16: tube not pumped down Message-ID: noted From seymour at snf.stanford.edu Fri Aug 19 13:58:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:58:19 -0700 Subject: Problem tylanbpsg SNF 2011-08-09 19:35:34: Not enough nonmetal dummy wafers Message-ID: noted From maurice at snf.stanford.edu Fri Aug 19 14:19:09 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 14:19:09 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-19 14:19:08: testing after tube replaced Message-ID: From maurice at snf.stanford.edu Fri Aug 19 16:50:45 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 16:50:45 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-19 14:19:08: testing after tube replaced Message-ID: Test complete Ran LTO400PC 00:20:00 expected~2700ang Actual 3001 From maurice at snf.stanford.edu Fri Aug 19 16:50:56 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 16:50:56 -0700 Subject: Problem tylanbpsg SNF 2011-08-16 14:33:54: needs testing after repair. Message-ID: test complete From rik at snf.stanford.edu Mon Aug 22 00:14:30 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 22 Aug 2011 00:14:30 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-22 00:14:29: Tube not pumping Message-ID: Tried running LTO400PC twice. Tube did not pump down. Also got multiple MFS alarms in between. Last - the left glass tube on the boat holder is broken. From maurice at snf.stanford.edu Mon Aug 22 16:15:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Aug 2011 16:15:55 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-22 16:15:55: quartz sheaths broken Message-ID: System will be down tonight From seymour at snf.stanford.edu Tue Aug 23 13:26:09 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 23 Aug 2011 13:26:09 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-22 00:14:29: Tube not pumping Message-ID: new tube installed From seymour at snf.stanford.edu Tue Aug 23 13:26:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 23 Aug 2011 13:26:33 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-22 16:15:55: quartz sheaths broken Message-ID: new tube installed From seymour at snf.stanford.edu Tue Aug 23 13:28:26 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 23 Aug 2011 13:28:26 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-23 13:28:25: needs test after repair Message-ID: new tube installed. passed cold and hot leak check. running coat recipe at this time. will need a test after coat. From maurice at snf.stanford.edu Tue Aug 23 16:50:20 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 23 Aug 2011 16:50:20 -0700 Subject: Shutdown tylanbpsg SNF 2011-08-23 13:28:25: needs test after repair Message-ID: Yellow for the night...still needs a test From bchui at snf.stanford.edu Tue Aug 23 23:01:30 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 23 Aug 2011 23:01:30 -0700 Subject: Comment tylanbpsg SNF 2011-08-23 23:01:29: Test runs went well Message-ID: Ran LTO400PC for 70 min, target 1 micron, got results as follows: second (metal) boat (leftmost slot): 9750A third (non-metal) boat: wafer #3 (from left): 1.03u, wafer #7 (middle wafer) 1.02u center, 1.03-1.08 edge wafer #11 (near the right): 1.04u 13 wafers (every other slot) in each boat Daesung ran his process after me targeting half micron and also got results consistent with my run From tberg at snf.stanford.edu Thu Aug 25 06:47:55 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 06:47:55 -0700 Subject: Comment tylanbpsg SNF 2011-07-27 09:39:44: needs test after repair and pull and clean Message-ID: noted From tberg at snf.stanford.edu Thu Aug 25 06:49:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 06:49:04 -0700 Subject: Comment tylanbpsg SNF 2011-08-01 07:29:16: replacing broken quartz Message-ID: noted From tberg at snf.stanford.edu Thu Aug 25 08:40:42 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:40:42 -0700 Subject: Problem tylanbpsg SNF 2011-08-12 07:25:11: no PH3 Message-ID: Ran PH3 at 15 sccm with Silane and O2. Monitored every 5 minutes -no readings Should be OK to run. From tberg at snf.stanford.edu Thu Aug 25 08:42:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:42:32 -0700 Subject: Problem tylanbpsg SNF 2011-04-06 11:18:02: O2 update Message-ID: No Problem wth MFS alarms for several months From tberg at snf.stanford.edu Thu Aug 25 08:43:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:43:09 -0700 Subject: Problem tylanbpsg SNF 2011-04-06 23:13:28: MFS alarm during LTO400 Message-ID: No problem with MFS alarms for months From tberg at snf.stanford.edu Thu Aug 25 08:43:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:43:35 -0700 Subject: Comment tylanbpsg SNF 2011-07-19 12:16:03: new dummies added Message-ID: noted