Comment tylanbpsg SNF 2011-08-23 23:01:29: Test runs went well

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Aug 23 23:01:30 PDT 2011


Ran LTO400PC for 70 min, target 1 micron, got results as follows:
second (metal) boat (leftmost slot): 9750A
third (non-metal) boat: wafer #3 (from left): 1.03u,
wafer #7 (middle wafer) 1.02u center, 1.03-1.08 edge
wafer #11 (near the right): 1.04u
13 wafers (every other slot) in each boat
Daesung ran his process after me targeting half micron and also got results consistent with my run




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