Problem tylanbpsg SNF 2011-08-12 07:25:11: no PH3

tberg at snf.stanford.edu tberg at snf.stanford.edu
Thu Aug 25 08:40:42 PDT 2011


Ran PH3 at 15 sccm with Silane and O2. Monitored every 5 minutes -no readings Should be OK to run.




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