From ericp at snf.stanford.edu Fri Feb 4 00:12:49 2011 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 4 Feb 2011 00:12:49 -0800 Subject: Problem tylanbpsg SNF 2011-02-04 00:12:48: MFS alarm few minutes into dep Message-ID: MFS alarm 5 min into dep. Appears to be O2. From seymour at snf.stanford.edu Fri Feb 4 08:41:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Feb 2011 08:41:46 -0800 Subject: Comment tylanbpsg SNF 2011-02-04 08:41:45: oil changed Message-ID: oil filter replaced and view window cleaned. From sclaussen at snf.stanford.edu Tue Feb 8 02:28:31 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 8 Feb 2011 02:28:31 -0800 Subject: Problem tylanbpsg SNF 2011-02-08 02:28:31: MFS alarm Message-ID: Alarmed sometime after 10 minutes into deposition. Hit "clear" to stop alarm. Process continued. After the tube opened and I unloaded my wafers, I hit "ALARM ACK" twice. Then it wouldn't allow me to load the pump program. The tube closed after I hit "ALARM ACK" again, and then I could load the pump program. From sclaussen at snf.stanford.edu Tue Feb 8 02:41:49 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 8 Feb 2011 02:41:49 -0800 Subject: Problem tylanbpsg SNF 2011-02-08 02:41:48: MFS alarm + thickness variation Message-ID: Made comment earlier about this, but it's not showing up. Also, great variation among thickness of 3 wafers (640nm-780nm). All much less than 1um expected. From tberg at snf.stanford.edu Tue Feb 8 05:53:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Feb 2011 05:53:46 -0800 Subject: Shutdown tylanbpsg SNF 2011-02-08 05:53:46: Scheduled pull and clean Message-ID: From seymour at snf.stanford.edu Tue Feb 8 14:32:41 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Feb 2011 14:32:41 -0800 Subject: Comment tylanbpsg SNF 2011-02-08 14:32:41: pull and clean completed Message-ID: heating up tube to run coat recipe. after that a test will be needed. From cursive at snf.stanford.edu Wed Feb 9 00:17:55 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 9 Feb 2011 00:17:55 -0800 Subject: Comment tylanbpsg SNF 2011-02-09 00:17:55: test run Message-ID: running LTO400 6 min expected 800A and got 700A Put 8 wafers inside.(non-metal boat) First wafer got 700A, and last wafer got 700A. From maurice at snf.stanford.edu Wed Feb 9 14:30:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:30:05 -0800 Subject: Shutdown tylanbpsg SNF 2011-02-08 05:53:46: Scheduled pull and clean Message-ID: cursive reports: running LTO400 6 min expected 800A and got 700A Put 8 wafers inside.(non-metal boat) First wafer got 700A, and last wafer got 700A. From maurice at snf.stanford.edu Wed Feb 9 14:31:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:31:14 -0800 Subject: Problem tylanbpsg SNF 2011-02-08 02:28:31: MFS alarm Message-ID: duplicate report From maurice at snf.stanford.edu Wed Feb 9 14:31:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:31:38 -0800 Subject: Problem tylanbpsg SNF 2011-01-27 13:09:29: MFS alarm 08 at step 60 PLTO400 Message-ID: duplicate From maurice at snf.stanford.edu Wed Feb 9 14:32:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:32:37 -0800 Subject: Problem tylanbpsg SNF 2011-01-29 20:18:48: MFS alarm Message-ID: duplicate problem From maurice at snf.stanford.edu Wed Feb 9 14:33:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:33:36 -0800 Subject: Comment tylanbpsg SNF 2010-10-13 09:22:16: oil changed Message-ID: archived From maurice at snf.stanford.edu Wed Feb 9 14:33:51 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 Feb 2011 14:33:51 -0800 Subject: Comment tylanbpsg SNF 2010-11-19 08:15:50: oil changed Message-ID: archived From tberg at snf.stanford.edu Thu Feb 10 06:13:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:13:51 -0800 Subject: Comment tylanbpsg SNF 2011-01-03 16:34:28: qual test Message-ID: pull and clean completed test done From tberg at snf.stanford.edu Thu Feb 10 06:14:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:14:03 -0800 Subject: Comment tylanbpsg SNF 2011-01-27 13:13:34: run aborted by time I got to the tube Message-ID: noted From tberg at snf.stanford.edu Thu Feb 10 06:14:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:14:22 -0800 Subject: Problem tylanbpsg SNF 2011-01-28 08:54:09: needs test when up to temp Message-ID: noted From tberg at snf.stanford.edu Thu Feb 10 06:14:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:14:33 -0800 Subject: Problem tylanbpsg SNF 2011-02-04 00:12:48: MFS alarm few minutes into dep Message-ID: noted From tberg at snf.stanford.edu Thu Feb 10 06:14:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:14:53 -0800 Subject: Comment tylanbpsg SNF 2011-02-08 14:32:41: pull and clean completed Message-ID: test done From tberg at snf.stanford.edu Thu Feb 10 06:15:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:15:03 -0800 Subject: Comment tylanbpsg SNF 2011-01-26 11:11:19: New dummies added Message-ID: noted From tberg at snf.stanford.edu Thu Feb 10 06:15:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:15:17 -0800 Subject: Problem tylanbpsg SNF 2010-11-29 17:31:49: MFC alarm Message-ID: noted From tberg at snf.stanford.edu Thu Feb 10 06:15:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 10 Feb 2011 06:15:33 -0800 Subject: Problem tylanbpsg SNF 2010-12-10 04:06:17: MFS alarm Message-ID: noted From cursive at snf.stanford.edu Thu Feb 10 11:12:40 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 10 Feb 2011 11:12:40 -0800 Subject: Problem tylanbpsg SNF 2011-02-10 11:12:40: O2 MFS alarm during deposition Message-ID: MFS alarm at deposition From jcdoll at snf.stanford.edu Tue Feb 15 10:51:20 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Tue, 15 Feb 2011 10:51:20 -0800 Subject: Comment tylanbpsg SNF 2011-02-15 10:51:19: O2 MFS Alarm Message-ID: the tube alarmed at minute 7 of LTO300PC. i cleared the alarm and the rest of the dep was uneventful. From ajamo at snf.stanford.edu Thu Feb 17 20:05:29 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 17 Feb 2011 20:05:29 -0800 Subject: Problem tylanbpsg SNF 2011-02-17 20:05:29: MFS alarm Message-ID: many MFS alarms during LTO350PC runs From jasonlin at snf.stanford.edu Tue Feb 22 01:58:45 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 22 Feb 2011 01:58:45 -0800 Subject: Problem tylanbpsg SNF 2011-02-22 01:58:44: vacuum wand broken Message-ID: Non-metal vacuum wand is broken. The teflon tip falls off if held upside down. From tberg at snf.stanford.edu Tue Feb 22 14:45:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Feb 2011 14:45:53 -0800 Subject: Problem tylanbpsg SNF 2011-02-22 01:58:44: vacuum wand broken Message-ID: replaced wand