From maurice at snf.stanford.edu Tue Jul 12 13:19:23 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Jul 2011 13:19:23 -0700 Subject: Problem tylanbpsg SNF 2011-07-12 13:19:22: glass sheath on boat loading tongs broken Message-ID: user DWNam reported: glass sheath on boat loading tongs broken From seymour at snf.stanford.edu Tue Jul 12 13:30:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 12 Jul 2011 13:30:55 -0700 Subject: Problem tylanbpsg SNF 2011-07-12 13:19:22: glass sheath on boat loading tongs broken Message-ID: quartz sheath replaced From seymour at snf.stanford.edu Thu Jul 14 09:06:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jul 2011 09:06:38 -0700 Subject: Comment tylanbpsg SNF 2011-07-14 09:06:38: oil changed Message-ID: filter changed, sight glass clean From maurice at snf.stanford.edu Tue Jul 19 12:16:03 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jul 2011 12:16:03 -0700 Subject: Comment tylanbpsg SNF 2011-07-19 12:16:03: new dummies added Message-ID: added 11 new clean dummies From jaehlee at snf.stanford.edu Tue Jul 19 16:40:58 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 19 Jul 2011 16:40:58 -0700 Subject: Problem tylanbpsg SNF 2011-07-19 16:40:58: LTO came out really thin Message-ID: I was expecting something close to 3 um but it was only 0.5 um. Maurice thinks that it might be due to the inject problem. From zpatel at snf.stanford.edu Tue Jul 19 18:14:37 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 19 Jul 2011 18:14:37 -0700 Subject: Problem tylanbpsg SNF 2011-07-19 18:14:36: LTO400PC Message-ID: Problems running LTO400PC 1. Temperature never went above 300C (set point 400C) 2. Silane flow was low 69 (set pt 85) 3. Silane interlock alarm 4. gate valve alarm 5. pressure during deposition PRCPR = 2000 (set pt 200) From zpatel at snf.stanford.edu Tue Jul 19 18:25:12 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 19 Jul 2011 18:25:12 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-19 18:25:12: Problems running LTO400PC Message-ID: Problems running LTO400PC 1. Temperature never went above 300C (set point 400C) 2. Silane flow was low 69 (set pt 85) 3. Silane interlock alarm 4. gate valve alarm 5. pressure during deposition PRCPR = 2000 (set pt 200) From seymour at snf.stanford.edu Wed Jul 20 11:28:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:28:23 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-19 18:25:12: Problems running LTO400PC Message-ID: replaced broken loader sheaths and injectors. Passed cold and hot leak check. loaded ltocoat to check temps and gas flows. will need a test. From seymour at snf.stanford.edu Wed Jul 20 11:28:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:28:52 -0700 Subject: Problem tylanbpsg SNF 2011-07-19 16:40:58: LTO came out really thin Message-ID: replaced broken quartz. From seymour at snf.stanford.edu Wed Jul 20 11:29:20 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:29:20 -0700 Subject: Problem tylanbpsg SNF 2011-07-19 18:14:36: LTO400PC Message-ID: replaced broken quartz. From seymour at snf.stanford.edu Wed Jul 20 11:29:44 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Jul 2011 11:29:44 -0700 Subject: Problem tylanbpsg SNF 2011-07-20 11:29:43: tube needs testing after repair. Message-ID: From tberg at snf.stanford.edu Thu Jul 21 06:20:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jul 2011 06:20:27 -0700 Subject: Problem tylanbpsg SNF 2011-07-20 11:29:43: tube needs testing after repair. Message-ID: SUsers have run with no reported problems From tberg at snf.stanford.edu Thu Jul 21 06:20:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Jul 2011 06:20:41 -0700 Subject: Comment tylanbpsg SNF 2011-05-10 09:10:08: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Mon Jul 25 06:08:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jul 2011 06:08:13 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-25 06:08:12: pull and clean Message-ID: From seymour at snf.stanford.edu Tue Jul 26 11:59:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Jul 2011 11:59:02 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-25 06:08:12: pull and clean Message-ID: completed pullo and clean From seymour at snf.stanford.edu Tue Jul 26 12:00:24 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Jul 2011 12:00:24 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-26 12:00:23: heating up for hot leak check Message-ID: cold leak checkl was good. heating up now to operating temp From seymour at snf.stanford.edu Tue Jul 26 14:09:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:09:35 -0700 Subject: Comment tylanbpsg SNF 2011-07-26 14:09:34: running LTOCOAT Message-ID: all leak checks good, started LTOCOAT for 45 mins. will need test after that. From seymour at snf.stanford.edu Tue Jul 26 15:27:59 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Jul 2011 15:27:59 -0700 Subject: Problem tylanbpsg SNF 2011-07-26 15:27:59: Silane MFC alarmed for flow issues Message-ID: flow was not at setpoint for much of the coat run. flow varied from 140 to 162 sccm. From seymour at snf.stanford.edu Wed Jul 27 09:37:07 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:37:07 -0700 Subject: Shutdown tylanbpsg SNF 2011-07-26 12:00:23: heating up for hot leak check Message-ID: From seymour at snf.stanford.edu Wed Jul 27 09:38:12 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:38:12 -0700 Subject: Problem tylanbpsg SNF 2011-07-26 15:27:59: Silane MFC alarmed for flow issues Message-ID: replaced silane mfc. ran lotcoat for 30 mins with no flow errors From seymour at snf.stanford.edu Wed Jul 27 09:38:31 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:38:31 -0700 Subject: Comment tylanbpsg SNF 2011-07-26 14:09:34: running LTOCOAT Message-ID: noted From seymour at snf.stanford.edu Wed Jul 27 09:39:44 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:39:44 -0700 Subject: Comment tylanbpsg SNF 2011-07-27 09:39:44: needs test after repair and pull and clean Message-ID: ltocoat has been ran From cursive at snf.stanford.edu Wed Jul 27 23:56:04 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 27 Jul 2011 23:56:04 -0700 Subject: Problem tylanbpsg SNF 2011-07-27 23:56:04: second wafer boat broken (non-metal) Message-ID: par of the second wafer boat (non-metal one) is broken. From seymour at snf.stanford.edu Thu Jul 28 10:59:58 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Jul 2011 10:59:58 -0700 Subject: Problem tylanbpsg SNF 2011-07-27 23:56:04: second wafer boat broken (non-metal) Message-ID: user replacing lower boat half while loading his run. From sclaussen at snf.stanford.edu Fri Jul 29 13:07:17 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 29 Jul 2011 13:07:17 -0700 Subject: Problem tylanbpsg SNF 2011-07-29 13:07:16: LCD screen next to tube is out Message-ID: