From tberg at snf.stanford.edu Tue Jun 14 05:50:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Jun 2011 05:50:02 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-14 05:50:01: Pull and clean Message-ID: From maurice at snf.stanford.edu Tue Jun 14 08:34:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 08:34:08 -0700 Subject: Comment tylanbpsg SNF 2011-06-14 08:34:07: 11 dummies added to non metal box Message-ID: From maurice at snf.stanford.edu Tue Jun 14 14:23:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 14:23:50 -0700 Subject: Comment tylanbpsg SNF 2011-06-14 14:23:49: testing after tube pull Message-ID: Running LTO400pc 00:20:00 expecting~2700ang From maurice at snf.stanford.edu Tue Jun 14 16:23:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 16:23:15 -0700 Subject: Comment tylanbpsg SNF 2011-06-14 14:23:49: testing after tube pull Message-ID: Ran LTO400pc 00:20:00 expected~2700ang actual 2768 (center point of center wafer in non metal boat) From maurice at snf.stanford.edu Tue Jun 14 16:23:23 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 16:23:23 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-14 05:50:01: Pull and clean Message-ID: Ran LTO400pc 00:20:00 expected~2700ang actual 2768 (center point of center wafer in non metal boat) From maurice at snf.stanford.edu Tue Jun 14 16:23:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 16:23:48 -0700 Subject: Comment tylanbpsg SNF 2011-05-12 16:15:37: test complete Message-ID: logged From maurice at snf.stanford.edu Tue Jun 14 16:23:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 16:23:59 -0700 Subject: Comment tylanbpsg SNF 2011-04-15 09:29:21: oil and filter changed Message-ID: logged From maurice at snf.stanford.edu Tue Jun 14 16:24:07 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 14 Jun 2011 16:24:07 -0700 Subject: Comment tylanbpsg SNF 2011-05-12 08:45:19: rebuilding loader Message-ID: logged From chienyuc at snf.stanford.edu Thu Jun 16 19:03:26 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 16 Jun 2011 19:03:26 -0700 Subject: Comment tylanbpsg SNF 2011-06-16 19:03:26: Found tube not closed nor enabled Message-ID: Tube is not closed for 50minutes according to the status, and the unknown user didn't enable the tool but ran LTO400PC starting from 3:30pm. From maurice at snf.stanford.edu Wed Jun 22 14:36:24 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Jun 2011 14:36:24 -0700 Subject: Problem tylanbpsg SNF 2011-06-22 14:36:23: wand contaminated Message-ID: non metal From seymour at snf.stanford.edu Wed Jun 22 14:47:27 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Jun 2011 14:47:27 -0700 Subject: Problem tylanbpsg SNF 2011-06-22 14:36:23: wand contaminated Message-ID: replaced wand tip From dwnam at snf.stanford.edu Wed Jun 29 00:39:29 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 29 Jun 2011 00:39:29 -0700 Subject: Comment tylanbpsg SNF 2011-06-29 00:39:28: Deposition is much less than expected Message-ID: Ran 30min of LTO400pc but only got 40nm while 500nm is expected. From dwnam at snf.stanford.edu Wed Jun 29 00:40:21 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 29 Jun 2011 00:40:21 -0700 Subject: Comment tylanbpsg SNF 2011-06-29 00:40:21: Dep rate is much less than expected Message-ID: Ran 30min of LTO400pc and only got 40nm while 500nm is expected. From dwnam at snf.stanford.edu Wed Jun 29 00:40:57 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 29 Jun 2011 00:40:57 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 00:40:57: Dep rate is much less than expected Message-ID: Ran 30min of LTO400pc but only got 40nm dep while 500nm is expected. From tberg at snf.stanford.edu Wed Jun 29 06:50:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Jun 2011 06:50:11 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-29 06:50:10: broken injector Message-ID: From seymour at snf.stanford.edu Wed Jun 29 09:37:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 09:37:53 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 00:40:57: Dep rate is much less than expected Message-ID: broken ijnjector From seymour at snf.stanford.edu Wed Jun 29 09:39:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 09:39:35 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-29 06:50:10: broken injector Message-ID: replaced broken injector and loader sheath. passed cold and hot leak check. needs test after repair From seymour at snf.stanford.edu Wed Jun 29 09:40:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 09:40:02 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 09:40:01: needs test after repair Message-ID: From ajamo at snf.stanford.edu Wed Jun 29 15:36:47 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 29 Jun 2011 15:36:47 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 15:36:46: Dep rate is less than half Message-ID: Just ran LTO350PC. I usually get 600 +/- 40 Ang ( many data points ) with 5 min process time but today it is only 244 Ang - 9 pt woollam measurements. From ajamo at snf.stanford.edu Wed Jun 29 17:50:46 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 29 Jun 2011 17:50:46 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 17:50:46: LTO still low, low, low Message-ID: Ran my wafers back through a second time in LTO. I used LTO350PC for 5 min (again) which usually gives 600 +/- 25 Ang and this time only 135A was deposited in the middle of the clean boat. A monitor measured in the back of the metal boat was ~350Ang, so uniformity is not great From lennonl at snf.stanford.edu Thu Jun 30 05:42:38 2011 From: lennonl at snf.stanford.edu (lennonl at snf.stanford.edu) Date: Thu, 30 Jun 2011 05:42:38 -0700 Subject: Problem tylanbpsg SNF 2011-06-30 05:42:38: LTO low Message-ID: Very low lto deposited for LTO300PC, usually around 550A but now only 150A From seymour at snf.stanford.edu Thu Jun 30 07:05:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 07:05:00 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-30 07:05:00: lo dep rate Message-ID: From seymour at snf.stanford.edu Thu Jun 30 09:20:14 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:20:14 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 09:40:01: needs test after repair Message-ID: failed test From seymour at snf.stanford.edu Thu Jun 30 09:20:34 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:20:34 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 15:36:46: Dep rate is less than half Message-ID: O2 injector broken From seymour at snf.stanford.edu Thu Jun 30 09:21:15 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:21:15 -0700 Subject: Problem tylanbpsg SNF 2011-06-29 17:50:46: LTO still low, low, low Message-ID: previous showedthat From seymour at snf.stanford.edu Thu Jun 30 09:21:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:21:55 -0700 Subject: Problem tylanbpsg SNF 2011-06-30 05:42:38: LTO low Message-ID: another broken injector, O2 this time From seymour at snf.stanford.edu Thu Jun 30 09:22:25 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:22:25 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-30 07:05:00: lo dep rate Message-ID: replaced broken O2 injector From seymour at snf.stanford.edu Thu Jun 30 09:24:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:24:19 -0700 Subject: Problem tylanbpsg SNF 2011-06-30 09:24:19: needs test Message-ID: replaced broken injector. replaced rear baffle with half baffle. leak check good. presently at 250 degrees, when up to temp a test is needed. From seymour at snf.stanford.edu Thu Jun 30 09:25:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:25:05 -0700 Subject: Comment tylanbpsg SNF 2011-06-29 00:39:28: Deposition is much less than expected Message-ID: replaced broken injector (Si) From seymour at snf.stanford.edu Thu Jun 30 09:25:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 09:25:52 -0700 Subject: Comment tylanbpsg SNF 2011-06-29 00:40:21: Dep rate is much less than expected Message-ID: replaced broken injector, (Si) From maurice at snf.stanford.edu Thu Jun 30 10:52:30 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:52:30 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-30 10:52:29: running a test Message-ID: From maurice at snf.stanford.edu Thu Jun 30 14:19:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:19:41 -0700 Subject: Shutdown tylanbpsg SNF 2011-06-30 10:52:29: running a test Message-ID: ran LTO400pc 00:20:00 expexted ~2700 ang Actually 2716 (center spot of center wafer in non metal boat) system up From maurice at snf.stanford.edu Thu Jun 30 14:19:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:19:57 -0700 Subject: Problem tylanbpsg SNF 2011-06-30 09:24:19: needs test Message-ID: test complete ran LTO400pc 00:20:00 expexted ~2700 ang Actually 2716 (center spot of center wafer in non metal boat) system up From maurice at snf.stanford.edu Thu Jun 30 14:20:07 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:20:07 -0700 Subject: Comment tylanbpsg SNF 2011-06-16 19:03:26: Found tube not closed nor enabled Message-ID: logged From maurice at snf.stanford.edu Thu Jun 30 14:20:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:20:21 -0700 Subject: Comment tylanbpsg SNF 2011-06-14 08:34:07: 11 dummies added to non metal box Message-ID: logged