From jcdoll at snf.stanford.edu Sun Mar 6 19:18:55 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 6 Mar 2011 19:18:55 -0800 Subject: Comment tylanbpsg SNF 2011-03-06 19:18:55: mfs alarm Message-ID: minute 7 of an LTO400PC step. ACKed it and it went away. From maurice at snf.stanford.edu Thu Mar 10 10:54:49 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 Mar 2011 10:54:49 -0800 Subject: Comment tylanbpsg SNF 2011-03-10 10:54:49: new dummies added Message-ID: Added 13 new clean non metal dummies From lindaw at snf.stanford.edu Sun Mar 13 18:34:41 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 13 Mar 2011 18:34:41 -0700 Subject: Comment tylanbpsg SNF 2011-03-13 18:34:40: boat drive cable is making a rythmic thumping noise Message-ID: The drive cable for the BPSG furnace is making a rythmic thumping noiise, and the near cable is vibrating. Like it is still trying to load the boat. The furnace is at step 25 of pump 11 program. From tberg at snf.stanford.edu Mon Mar 14 14:12:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Mar 2011 14:12:10 -0700 Subject: Comment tylanbpsg SNF 2011-03-13 18:34:40: boat drive cable is making a rythmic thumping noise Message-ID: loader is not making noise now From ajamo at snf.stanford.edu Tue Mar 15 11:36:21 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 15 Mar 2011 11:36:21 -0700 Subject: Problem tylanbpsg SNF 2011-03-15 11:36:20: Door won't open Message-ID: Tube is enabled, stopped the pump program and have been waiting about 20 min. Cannot open door. Manual+Fast+OUT is not working. "Below atm" light is off. PRCPR reads 2000. From seymour at snf.stanford.edu Tue Mar 15 12:05:07 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 Mar 2011 12:05:07 -0700 Subject: Problem tylanbpsg SNF 2011-03-15 11:36:20: Door won't open Message-ID: replaced loader driver board. checked operation several times and door opens correctly and slow push ends after about 30 seconds. From griffin at snf.stanford.edu Mon Mar 21 21:25:20 2011 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Mon, 21 Mar 2011 21:25:20 -0700 Subject: Problem tylanbpsg SNF 2011-03-21 21:25:19: MFC alarms - no dep Message-ID: There were several MFC alarms. Apparently if you do not clear every alarm, you can end up with no dep. A user cleared at least one alarm early, I cleared a later one. No deposition. LTO300PC, 1 hour. From narii at snf.stanford.edu Mon Mar 21 22:12:57 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 21 Mar 2011 22:12:57 -0700 Subject: Problem tylanbpsg SNF 2011-03-21 22:12:57: SiH4 flow problem Message-ID: Even after clearing alarm, no SiH4 flow at all. SiH4 input remained at 0. From tberg at snf.stanford.edu Tue Mar 22 06:10:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Mar 2011 06:10:41 -0700 Subject: Problem tylanbpsg SNF 2011-03-21 21:25:19: MFC alarms - no dep Message-ID: Air operated valve to cylinder was not opened-opened From tberg at snf.stanford.edu Tue Mar 22 06:10:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Mar 2011 06:10:50 -0700 Subject: Problem tylanbpsg SNF 2011-03-21 22:12:57: SiH4 flow problem Message-ID: Air operated valve to cylinder was not opened-opened From tberg at snf.stanford.edu Thu Mar 24 05:51:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 24 Mar 2011 05:51:20 -0700 Subject: Shutdown tylanbpsg SNF 2011-03-24 05:51:20: Pull and clean Message-ID: From seymour at snf.stanford.edu Fri Mar 25 09:35:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 09:35:53 -0700 Subject: Shutdown tylanbpsg SNF 2011-03-24 05:51:20: Pull and clean Message-ID: pull and clean completed From seymour at snf.stanford.edu Fri Mar 25 09:37:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 09:37:46 -0700 Subject: Problem tylanbpsg SNF 2011-03-25 09:37:45: running coat Message-ID: pull and clean completed, leak check passed. tube has heated up to 400 and I have started lto400. will need a test after coat completed. From jcdoll at snf.stanford.edu Fri Mar 25 10:49:47 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Fri, 25 Mar 2011 10:49:47 -0700 Subject: Comment tylanbpsg SNF 2011-03-25 10:49:46: o2 mfs error Message-ID: O2 MFS error during what looks to be an innitial tube coating after pull and clean. cleared it @ 10:50am From maurice at snf.stanford.edu Fri Mar 25 13:49:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 Mar 2011 13:49:57 -0700 Subject: Comment tylanbpsg SNF 2011-03-25 13:49:57: coat complete/running test Message-ID: From maurice at snf.stanford.edu Sat Mar 26 12:04:16 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 26 Mar 2011 12:04:16 -0700 Subject: Comment tylanbpsg SNF 2011-03-25 13:49:57: coat complete/running test Message-ID: Test complete ran LTO400pc 00:20:00 expected ~2500 ang Actual 2448 (center point of center wafer in non metal boat) On wafer % range from woolam =10.22. This is normal ~5. It should get better as the boats are coated. We will try to retest this later in the week. t,tc,c,bc,b,l,lc,rc,r 2280,2323,2448,2613,2791,2720,2560,2371,2366 From ywidjaja at snf.stanford.edu Mon Mar 28 04:19:21 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Mon, 28 Mar 2011 04:19:21 -0700 Subject: Problem tylanbpsg SNF 2011-03-28 04:19:20: pump program failed Message-ID: It was alarming when I came. I tried re-running the pump program twice and it failed to run both times. From seymour at snf.stanford.edu Mon Mar 28 07:44:40 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Mar 2011 07:44:40 -0700 Subject: Shutdown tylanbpsg SNF 2011-03-28 07:44:40: will not pump down Message-ID: From seymour at snf.stanford.edu Mon Mar 28 09:48:21 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Mar 2011 09:48:21 -0700 Subject: Shutdown tylanbpsg SNF 2011-03-28 07:44:40: will not pump down Message-ID: found a small crack in one of the loader sheaths. rebuilt loader abd checked tube base and leak rate. Both were good. running pump recipe. From seymour at snf.stanford.edu Mon Mar 28 09:48:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Mar 2011 09:48:52 -0700 Subject: Problem tylanbpsg SNF 2011-03-28 04:19:20: pump program failed Message-ID: pump recipe running at this time. From seymour at snf.stanford.edu Mon Mar 28 09:49:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Mar 2011 09:49:17 -0700 Subject: Problem tylanbpsg SNF 2011-03-25 09:37:45: running coat Message-ID: coat finished