From wslee at snf.stanford.edu Mon Nov 7 10:41:30 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 7 Nov 2011 10:41:30 -0800 Subject: Problem tylanbpsg SNF 2011-11-07 10:41:30: LCD screen dead Message-ID: The LCD screen on the control panel is dark. The screen was originally lit until I loaded my recipe (LTO400PC) and it went dark. Based on the tycom terminal, the tube is still operating fine. My wafers are still processing. From maurice at snf.stanford.edu Mon Nov 7 10:47:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Nov 2011 10:47:28 -0800 Subject: Problem tylanbpsg SNF 2011-11-07 10:41:30: LCD screen dead Message-ID: tapped dispay...ok now From seymour at snf.stanford.edu Thu Nov 10 08:53:24 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Nov 2011 08:53:24 -0800 Subject: Comment tylanbpsg SNF 2011-11-10 08:53:23: oil and filter changed Message-ID: level glass cleaned From carini at snf.stanford.edu Thu Nov 10 18:04:09 2011 From: carini at snf.stanford.edu (carini at snf.stanford.edu) Date: Thu, 10 Nov 2011 18:04:09 -0800 Subject: Comment tylanbpsg SNF 2011-11-10 18:04:08: cleaning dummies Message-ID: I'm cleaning dummies. I'll put them in their boxes. From carini at snf.stanford.edu Fri Nov 11 16:29:34 2011 From: carini at snf.stanford.edu (carini at snf.stanford.edu) Date: Fri, 11 Nov 2011 16:29:34 -0800 Subject: Comment tylanbpsg SNF 2011-11-11 16:29:34: deposition rate Message-ID: From ywidjaja at snf.stanford.edu Sat Nov 12 11:30:42 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 12 Nov 2011 11:30:42 -0800 Subject: Problem tylanbpsg SNF 2011-11-12 11:30:42: low deposition rate Message-ID: Was running LTO400PC and get a low deposition rate (getting 180A for 9min, which translates to ~1200A/hr). Was running other processes, so I didn't have a chance to look at the gas flow, etc. during deposition step. From tberg at snf.stanford.edu Mon Nov 14 07:09:28 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Nov 2011 07:09:28 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-14 07:09:28: checking injectors Message-ID: From tberg at snf.stanford.edu Tue Nov 15 09:04:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:04:49 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-14 07:09:28: checking injectors Message-ID: Replaced broken O2 injector Needs a test From tberg at snf.stanford.edu Tue Nov 15 09:05:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:05:49 -0800 Subject: Comment tylanbpsg SNF 2011-11-15 09:05:49: Needs a test after injector change Message-ID: From kokab at snf.stanford.edu Wed Nov 16 02:02:47 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Wed, 16 Nov 2011 02:02:47 -0800 Subject: Problem tylanbpsg SNF 2011-11-16 02:02:47: keyboard doesn't work Message-ID: From tberg at snf.stanford.edu Wed Nov 16 06:44:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Nov 2011 06:44:40 -0800 Subject: Problem tylanbpsg SNF 2011-11-16 02:02:47: keyboard doesn't work Message-ID: Reset terminal From ywidjaja at snf.stanford.edu Sat Nov 19 02:57:28 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 19 Nov 2011 02:57:28 -0800 Subject: Problem tylanbpsg SNF 2011-11-19 02:57:27: pump program failed to run Message-ID: From zguo at snf.stanford.edu Mon Nov 21 00:53:00 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Mon, 21 Nov 2011 00:53:00 -0800 Subject: Problem tylanbpsg SNF 2011-11-21 00:52:59: PSG400 recipe not working Message-ID: Tried the below parameters for PSG 400, both case jump directly from step 25 to step 105, no deposition happened. 1) 4% doping SiH4=60 PH3=62 2) 8% doping SiH4=22 PH3=86 From zguo at snf.stanford.edu Mon Nov 21 00:54:28 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Mon, 21 Nov 2011 00:54:28 -0800 Subject: Problem tylanbpsg SNF 2011-11-21 00:54:28: LTO400PC not working Message-ID: Alarm sounds during process, and finally no SiO2 deposited. From maurice at snf.stanford.edu Mon Nov 21 07:57:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 Nov 2011 07:57:50 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-21 07:57:49: not pumping down Message-ID: Ray investigating problem From seymour at snf.stanford.edu Mon Nov 21 08:08:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:08:02 -0800 Subject: Problem tylanbpsg SNF 2011-11-19 02:57:27: pump program failed to run Message-ID: broken loader sheath, replacing at this time From seymour at snf.stanford.edu Mon Nov 21 08:09:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:09:33 -0800 Subject: Problem tylanbpsg SNF 2011-11-21 00:52:59: PSG400 recipe not working Message-ID: pump o vertemp interlock tripped ddue to pumping on major leak due to broken loader sheath From seymour at snf.stanford.edu Mon Nov 21 08:11:02 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:11:02 -0800 Subject: Problem tylanbpsg SNF 2011-11-21 00:54:28: LTO400PC not working Message-ID: pump aff due to loader sheath broken and tube pumped with major leakcaused by broken loader sheath From seymour at snf.stanford.edu Mon Nov 21 08:53:47 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:53:47 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-21 07:57:49: not pumping down Message-ID: replaced loader sheath. tube bases at 2 mT and ROR was 20 mT/min. flowed silane and oxygen at lto400pc setpoints with no flow errors.puttint tube to yellow for a test. From seymour at snf.stanford.edu Mon Nov 21 08:54:10 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Nov 2011 08:54:10 -0800 Subject: Comment tylanbpsg SNF 2011-11-21 08:54:10: needs test after repair Message-ID: From chienyuc at snf.stanford.edu Thu Nov 24 15:12:56 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 24 Nov 2011 15:12:56 -0800 Subject: Problem tylanbpsg SNF 2011-11-24 15:12:55: Need more non-metal dummies Message-ID: Current non-metal dummies seem undergo somebody's strange stripping procedures and look poor. Notice unknown dust in 6:1 BOE bath of wbdiff, which may have some relation to the scratch-like dummies. Was using metal boat for my deposition. From mdickey at snf.stanford.edu Mon Nov 28 05:13:39 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 28 Nov 2011 05:13:39 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-28 05:13:39: pull and clean Message-ID: Down for pull and clean From seymour at snf.stanford.edu Mon Nov 28 06:34:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Nov 2011 06:34:01 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-28 06:34:01: pull and clean Message-ID: From seymour at snf.stanford.edu Wed Nov 30 11:14:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Nov 2011 11:14:38 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-28 05:13:39: pull and clean Message-ID: done From seymour at snf.stanford.edu Wed Nov 30 11:14:51 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Nov 2011 11:14:51 -0800 Subject: Problem tylanbpsg SNF 2011-11-24 15:12:55: Need more non-metal dummies Message-ID: noted From seymour at snf.stanford.edu Wed Nov 30 11:15:42 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Nov 2011 11:15:42 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-28 06:34:01: pull and clean Message-ID: pull and clean completed Hot and cold leak check passed. Coating tube at this time. From seymour at snf.stanford.edu Wed Nov 30 11:16:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Nov 2011 11:16:23 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-30 11:16:22: running ltocoat will need test after coat Message-ID: From maurice at snf.stanford.edu Wed Nov 30 14:28:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 14:28:38 -0800 Subject: Comment tylanbpsg SNF 2011-11-30 14:28:38: testing after pull/clean Message-ID: jaehlee is running a test for us From jaehlee at snf.stanford.edu Wed Nov 30 16:52:50 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Wed, 30 Nov 2011 16:52:50 -0800 Subject: Comment tylanbpsg SNF 2011-11-30 16:52:50: Quals Message-ID: I ran LTO400PC for an hour and 15 min, and the thickness was 1.09 um as expected. thanks! From maurice at snf.stanford.edu Wed Nov 30 20:07:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:07:47 -0800 Subject: Shutdown tylanbpsg SNF 2011-11-30 11:16:22: running ltocoat will need test after coat Message-ID: jeahlee reports growth rate normal after pull/clean From maurice at snf.stanford.edu Wed Nov 30 20:08:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:08:05 -0800 Subject: Comment tylanbpsg SNF 2011-11-30 14:28:38: testing after pull/clean Message-ID: jeahlee reports growth rate normal after pull/clean From maurice at snf.stanford.edu Wed Nov 30 20:08:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:08:21 -0800 Subject: Comment tylanbpsg SNF 2011-11-21 08:54:10: needs test after repair Message-ID: jeahlee reports growth rate normal after pull/clean From maurice at snf.stanford.edu Wed Nov 30 20:08:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:08:34 -0800 Subject: Comment tylanbpsg SNF 2011-11-15 09:05:49: Needs a test after injector change Message-ID: ok From maurice at snf.stanford.edu Wed Nov 30 20:08:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:08:55 -0800 Subject: Problem tylanbpsg SNF 2011-11-12 11:30:42: low deposition rate Message-ID: broken injector replaced From maurice at snf.stanford.edu Wed Nov 30 20:09:39 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:09:39 -0800 Subject: Comment tylanbpsg SNF 2011-11-11 16:29:34: deposition rate Message-ID: broken injector replaced From maurice at snf.stanford.edu Wed Nov 30 20:09:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:09:57 -0800 Subject: Comment tylanbpsg SNF 2011-11-10 18:04:08: cleaning dummies Message-ID: ok From maurice at snf.stanford.edu Wed Nov 30 20:10:13 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:10:13 -0800 Subject: Comment tylanbpsg SNF 2011-10-28 17:34:33: dummies all now being stripped and will leave them in cassette Message-ID: ok From maurice at snf.stanford.edu Wed Nov 30 20:21:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Nov 2011 20:21:29 -0800 Subject: Comment tylanbpsg SNF 2011-10-04 21:25:04: non-uniformity Message-ID: 9 TO 15% UNIFORMITY IS NORMAL ON LTO IF WAFERS ARE NOT ROTATED