From sgchong at snf.stanford.edu Sat Oct 1 19:41:24 2011 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 1 Oct 2011 19:41:24 -0700 Subject: Problem tylanbpsg SNF 2011-10-01 19:41:24: wafer came out with white irregular patterns Message-ID: Wafer came out with white irregular patterns From tberg at snf.stanford.edu Mon Oct 3 06:59:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Oct 2011 06:59:31 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-03 06:59:30: leak Message-ID: From seymour at snf.stanford.edu Mon Oct 3 11:10:21 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Oct 2011 11:10:21 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-03 06:59:30: leak Message-ID: replaced broken loader sheath. Base pressure 11 mT ror was 14 mT/min From seymour at snf.stanford.edu Mon Oct 3 11:10:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Oct 2011 11:10:33 -0700 Subject: Problem tylanbpsg SNF 2011-10-01 19:41:24: wafer came out with white irregular patterns Message-ID: big leak From seymour at snf.stanford.edu Mon Oct 3 11:10:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Oct 2011 11:10:55 -0700 Subject: Problem tylanbpsg SNF 2011-10-03 11:10:54: needs test after repair Message-ID: From cfchiang at snf.stanford.edu Tue Oct 4 21:25:05 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 4 Oct 2011 21:25:05 -0700 Subject: Comment tylanbpsg SNF 2011-10-04 21:25:04: non-uniformity Message-ID: Aparently visable non-uniformity ~9% standard deviation out of ~2.4um deposition. From seymour at snf.stanford.edu Fri Oct 7 07:32:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Oct 2011 07:32:52 -0700 Subject: Problem tylanbpsg SNF 2011-10-03 11:10:54: needs test after repair Message-ID: testing competed From tberg at snf.stanford.edu Mon Oct 10 05:49:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2011 05:49:10 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-10 05:49:09: Scheduled Pull and clean Message-ID: From maurice at snf.stanford.edu Tue Oct 11 16:02:13 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:02:13 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-10 05:49:09: Scheduled Pull and clean Message-ID: test complete ran LTO400PC 00:20:00 EXPECTED ~2800ANG ACTUALLY 2784 From maurice at snf.stanford.edu Tue Oct 11 16:02:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:02:33 -0700 Subject: Problem tylanbpsg SNF 2011-09-29 16:32:29: panel display gone to black Message-ID: OK NOW From maurice at snf.stanford.edu Tue Oct 11 16:02:45 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:02:45 -0700 Subject: Comment tylanbpsg SNF 2011-08-23 23:01:29: Test runs went well Message-ID: LOGGED From grahamab at snf.stanford.edu Fri Oct 14 11:51:32 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:51:32 -0700 Subject: Problem tylanbpsg SNF 2011-10-14 11:51:32: MFS alarm for decreased silane flow Message-ID: Running LTO400PC. After 70min of deposition, MFS alarm went off for silane flow problem. Recipe calls for 85sccm, flow was at ~35sccm when I saw the problem and continued dropping over the next 1-2 minutes before aborting the recipe. From seymour at snf.stanford.edu Fri Oct 14 11:59:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:59:00 -0700 Subject: Problem tylanbpsg SNF 2011-10-14 11:51:32: MFS alarm for decreased silane flow Message-ID: turned on silane valve that turned off with arsine MST alarm went off. From kokab at snf.stanford.edu Sat Oct 15 22:33:49 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sat, 15 Oct 2011 22:33:49 -0700 Subject: Problem tylanbpsg SNF 2011-10-15 22:33:49: the keyboard is not working Message-ID: From tberg at snf.stanford.edu Mon Oct 17 08:02:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2011 08:02:18 -0700 Subject: Problem tylanbpsg SNF 2011-10-15 22:33:49: the keyboard is not working Message-ID: Front panel pane is working and Tycom is working. Not sure what the issue was From wangss at snf.stanford.edu Tue Oct 18 17:39:01 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Tue, 18 Oct 2011 17:39:01 -0700 Subject: Problem tylanbpsg SNF 2011-10-18 17:39:00: tycom computer froze Message-ID: can not load pump progam From wangss at snf.stanford.edu Tue Oct 18 18:11:35 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Tue, 18 Oct 2011 18:11:35 -0700 Subject: Comment tylanbpsg SNF 2011-10-18 18:11:34: Hold the furnace in Step 35 of LTO400PC Message-ID: since tycom is not working, I can not load the pump program. Run the previous recipe "LTO400PC" and hold the process in step 35 "Initial Pumpdown". Please quit the process tomorrow morning after you fix the tycom. thanks, From seymour at snf.stanford.edu Wed Oct 19 08:14:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Oct 2011 08:14:18 -0700 Subject: Problem tylanbpsg SNF 2011-10-18 17:39:00: tycom computer froze Message-ID: reset tycom. loaded and started pump11 From seymour at snf.stanford.edu Wed Oct 19 08:16:41 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Oct 2011 08:16:41 -0700 Subject: Comment tylanbpsg SNF 2011-10-18 18:11:34: Hold the furnace in Step 35 of LTO400PC Message-ID: running pump11 From kokab at snf.stanford.edu Thu Oct 20 06:18:27 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Thu, 20 Oct 2011 06:18:27 -0700 Subject: Problem tylanbpsg SNF 2011-10-20 06:18:26: keyboard is no working Message-ID: From tberg at snf.stanford.edu Thu Oct 20 06:25:28 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Oct 2011 06:25:28 -0700 Subject: Problem tylanbpsg SNF 2011-10-20 06:18:26: keyboard is no working Message-ID: Reset terminal keyboard is fine now From seymour at snf.stanford.edu Fri Oct 21 09:03:51 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:03:51 -0700 Subject: Comment tylanbpsg SNF 2011-10-21 09:03:50: oil and filter changed Message-ID: From jprovine at snf.stanford.edu Mon Oct 24 02:35:00 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 24 Oct 2011 02:35:00 -0700 Subject: Problem tylanbpsg SNF 2011-10-24 02:35:00: tycom unresponsive Message-ID: the tycom computer is unresponsive to any keyboard commands. it is auto-updating as usual, but no commands can be entered and thus no programs loaded. the keyboard has power (caps lock and num lock lights are active and keystroke "beep" works for those buttons) but no text can be entered. From tberg at snf.stanford.edu Mon Oct 24 06:57:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Oct 2011 06:57:40 -0700 Subject: Problem tylanbpsg SNF 2011-10-24 02:35:00: tycom unresponsive Message-ID: reset terminal From tberg at snf.stanford.edu Tue Oct 25 06:27:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:27:31 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-25 06:27:30: water work Message-ID: From tberg at snf.stanford.edu Tue Oct 25 11:15:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 11:15:38 -0700 Subject: Shutdown tylanbpsg SNF 2011-10-25 06:27:30: water work Message-ID: water work done From jaehlee at snf.stanford.edu Fri Oct 28 17:34:33 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 28 Oct 2011 17:34:33 -0700 Subject: Comment tylanbpsg SNF 2011-10-28 17:34:33: dummies all now being stripped and will leave them in cassette Message-ID: From jaehlee at snf.stanford.edu Fri Oct 28 18:06:53 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 28 Oct 2011 18:06:53 -0700 Subject: Comment tylanbpsg SNF 2011-10-28 18:06:53: stripped all dummies for 35 min but ... Message-ID: Some wafers are still covered with oxide. Depending on how they were loaded, LTO thickness can be much thicker than expected (>> 6 um).