From tberg at snf.stanford.edu Wed Aug 1 09:13:56 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:13:56 -0700 Subject: Problem tylanbpsg SNF 2012-07-31 13:39:46: needs test after pull and clean Message-ID: Last user ZZP reports test and run was good. Thanks, its back up From tberg at snf.stanford.edu Wed Aug 1 09:14:32 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:14:32 -0700 Subject: Comment tylanbpsg SNF 2012-06-09 17:43:10: Need more clean dummies Message-ID: noted From tberg at snf.stanford.edu Wed Aug 1 09:14:44 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:14:44 -0700 Subject: Comment tylanbpsg SNF 2012-07-03 11:16:21: oil changed Message-ID: noted From tberg at snf.stanford.edu Wed Aug 1 09:14:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:14:54 -0700 Subject: Comment tylanbpsg SNF 2012-07-12 14:16:37: changed oil Message-ID: noted From tberg at snf.stanford.edu Wed Aug 1 09:15:04 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:15:04 -0700 Subject: Comment tylanbpsg SNF 2012-05-24 08:19:12: oil changed Message-ID: noted From tberg at snf.stanford.edu Wed Aug 1 09:15:22 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:15:22 -0700 Subject: Comment tylanbpsg SNF 2012-05-23 07:58:48: running interlock test Message-ID: completed From tberg at snf.stanford.edu Wed Aug 1 09:15:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:15:54 -0700 Subject: Comment tylanbpsg SNF 2012-06-01 10:57:09: tube has a lot of deposition Message-ID: tube changed From tberg at snf.stanford.edu Wed Aug 1 09:16:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:16:10 -0700 Subject: Comment tylanbpsg SNF 2012-07-31 10:50:29: heating tube for a coat after pull and clean Message-ID: test and run OK From tberg at snf.stanford.edu Wed Aug 1 09:16:25 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 1 Aug 2012 09:16:25 -0700 Subject: Comment tylanbpsg SNF 2012-04-12 00:19:06: fork damaged Message-ID: noted From wslee at snf.stanford.edu Wed Aug 1 13:49:54 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 1 Aug 2012 13:49:54 -0700 Subject: Problem tylanbpsg SNF 2012-08-01 13:49:54: silane mfc alarm and possible low dep rate Message-ID: I encountered multiple silane mfc alarms during my run. It did not seem to effect the silane flow (always ~90 before and after clearing the alarm). I initially set the deposition time to 01:15:00 to finish in time for the next user but I ended up holding my wafers in the deposition step for 35min to give a total runtime of 01:50:00. After 01:50:00, the wafers had 9800A LTO - expected about 15000A based on prior runs. From seymour at snf.stanford.edu Wed Aug 1 14:58:03 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Aug 2012 14:58:03 -0700 Subject: Problem tylanbpsg SNF 2012-08-01 13:49:54: silane mfc alarm and possible low dep rate Message-ID: vendor was working on PLC for the toxic gas control and the signal to do a romote shutdown was sent to the silane cabinet and the isolation valve opened. The fault was found and reset. The LTO tube is operating correctly, but the source of silane was disrupted for a short period causing low thickness during the run.