From seymour at snf.stanford.edu Mon Feb 6 15:03:34 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Feb 2012 15:03:34 -0800 Subject: Comment tylanbpsg SNF 2012-02-06 15:03:33: changed oil Message-ID: level glass cleaned From tberg at snf.stanford.edu Tue Feb 14 13:46:23 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:46:23 -0800 Subject: Comment tylanbpsg SNF 2011-07-14 09:06:38: oil changed Message-ID: Noted From tberg at snf.stanford.edu Tue Feb 14 13:46:35 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:46:35 -0800 Subject: Comment tylanbpsg SNF 2011-09-30 09:59:00: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:46:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:46:50 -0800 Subject: Comment tylanbpsg SNF 2011-02-04 08:41:45: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:47:06 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:47:06 -0800 Subject: Comment tylanbpsg SNF 2011-10-21 09:03:50: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:47:17 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:47:17 -0800 Subject: Comment tylanbpsg SNF 2011-10-28 18:06:53: stripped all dummies for 35 min but ... Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:47:29 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:47:29 -0800 Subject: Comment tylanbpsg SNF 2011-11-10 08:53:23: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:47:48 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:47:48 -0800 Subject: Problem tylanbpsg SNF 2011-12-05 03:56:54: keyboard stuck Message-ID: reset From tberg at snf.stanford.edu Tue Feb 14 13:48:06 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:48:06 -0800 Subject: Comment tylanbpsg SNF 2011-11-30 16:52:50: Quals Message-ID: noted From tberg at snf.stanford.edu Tue Feb 14 13:48:22 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Feb 2012 13:48:22 -0800 Subject: Shutdown tylanbpsg SNF 2011-12-12 07:26:11: Renovation Message-ID: System is back up and functional. Gases are on except B2H6.Needs test. From maurice at snf.stanford.edu Wed Feb 15 13:54:58 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Feb 2012 13:54:58 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-15 13:54:57: broken injector Message-ID: No dep on front boat. Looked inside ... left injector broken From tberg at snf.stanford.edu Thu Feb 16 11:59:59 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Feb 2012 11:59:59 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-15 13:54:57: broken injector Message-ID: injector replaced. hot and cold leak OK needs test From maurice at snf.stanford.edu Thu Feb 16 16:16:52 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 16 Feb 2012 16:16:52 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-16 16:16:51: not venting Message-ID: From maurice at stanford.edu Fri Feb 17 15:45:50 2012 From: maurice at stanford.edu (maurice stevens) Date: Fri, 17 Feb 2012 15:45:50 -0800 Subject: TylanBPSG update Message-ID: <4F3EE6AE.9070406@stanford.edu> Sorry, TylanBPSG down until Tues. Gate valve leaking...tube won't vent. From Ray: I replaced the slo pump valve, no effect. tube would open after 13 mins. So leak is bigger then 1470 sccm, but doesn't show up on the pump line glove test. I will do the gate valve on Tuesday morning. From maurice at snf.stanford.edu Fri Feb 17 15:46:40 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:46:40 -0800 Subject: Comment tylanbpsg SNF 2012-02-17 15:46:40: update/down over weekend Message-ID: >From Ray: "I replaced the slo pump valve, no effect. tube would open after 13 mins. So leak is bigger then 1470 sccm, but doesn't show up on the pump line glove test. I will do the gate valve on Tuesday morning. " From seymour at snf.stanford.edu Tue Feb 21 10:15:37 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 10:15:37 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-16 16:16:51: not venting Message-ID: pulled and cleaned gate valve. tube takes a little longer to vent, but it does vent to atmos From seymour at snf.stanford.edu Tue Feb 21 10:16:22 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 10:16:22 -0800 Subject: Problem tylanbpsg SNF 2012-02-21 10:16:21: needs test Message-ID: From maurice at snf.stanford.edu Tue Feb 21 11:28:28 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:28:28 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-21 11:28:27: Testing Message-ID: From seymour at snf.stanford.edu Tue Feb 21 11:52:02 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:52:02 -0800 Subject: Comment tylanbpsg SNF 2012-02-21 11:52:02: checked out the MFS460 Message-ID: Started the recipe after MSF460 problems cleared up. It was in step 20 and pumping N2 like it should. From maurice at snf.stanford.edu Tue Feb 21 15:46:30 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:46:30 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-21 15:46:30: right injector broken Message-ID: No dep on wafers in front boat. Looked in tube and saw that right injector is broken. From seymour at snf.stanford.edu Wed Feb 22 08:27:05 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 22 Feb 2012 08:27:05 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-21 15:46:30: right injector broken Message-ID: replaced silane injector. passed cold leak check. element on, running pump11. From maurice at snf.stanford.edu Wed Feb 22 12:01:23 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Feb 2012 12:01:23 -0800 Subject: Shutdown tylanbpsg SNF 2012-02-21 11:28:27: Testing Message-ID: compete From maurice at snf.stanford.edu Wed Feb 22 12:09:33 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Feb 2012 12:09:33 -0800 Subject: Problem tylanbpsg SNF 2012-02-22 12:09:33: Test thick Message-ID: Ran LTO0C 00:20:0 expected ~2800 ang Actual 3164 (center readngof center wafer in non metal boat) Will run anoher test later in the week front #3 3270.4 3134.9 3118.9 3153.6 3288.9 3093.4 3113.2 3188.1 3473.2 front#7 3362.1 3232.5 3164.8 3140 3232.6 3078.4 3124 3262 3498.1 front #11 3178.8 3045.7 3044.4 3085.9 3090 3140.2 3041.4 3121.3 3411.8 back #3 2897 2800.2 2789.5 2800.8 2817.1 2819.4 2783.8 2822.8 2873.8 back #7 2937.8 2843 2817.2 2805.7 2810.8 2876.4 2819.7 2836.9 2829.4 back#11 3920.2 3745.7 3716.5 3720.9 3701.7 3733.7 3704.8 3756.6 3823.4 From seymour at snf.stanford.edu Wed Feb 29 08:51:03 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Feb 2012 08:51:03 -0800 Subject: Comment tylanbpsg SNF 2012-02-29 08:51:03: oil filter changed Message-ID: