From npapte at snf.stanford.edu Fri Jun 1 10:57:10 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Fri, 1 Jun 2012 10:57:10 -0700 Subject: Comment tylanbpsg SNF 2012-06-01 10:57:09: tube has a lot of deposition Message-ID: tube has a lot of deposition. might need to be cleaned. Dummies look OK. From raneeyoo at snf.stanford.edu Thu Jun 7 23:57:30 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Thu, 7 Jun 2012 23:57:30 -0700 Subject: Problem tylanbpsg SNF 2012-06-07 23:57:30: very low depo Message-ID: From tberg at snf.stanford.edu Fri Jun 8 06:48:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Jun 2012 06:48:54 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-08 06:48:53: injector broken Message-ID: turned off breaker and vented From seymour at snf.stanford.edu Fri Jun 8 11:24:40 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Jun 2012 11:24:40 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-08 06:48:53: injector broken Message-ID: replacedbroken silane injector. base and ror good. element breaker on/ needs test after repair From karthikv at snf.stanford.edu Sat Jun 9 17:43:10 2012 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sat, 9 Jun 2012 17:43:10 -0700 Subject: Comment tylanbpsg SNF 2012-06-09 17:43:10: Need more clean dummies Message-ID: From mtan at snf.stanford.edu Mon Jun 11 23:49:17 2012 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 11 Jun 2012 23:49:17 -0700 Subject: Problem tylanbpsg SNF 2012-06-11 23:49:16: low depo Message-ID: 3 hr using 400pc deposited 6000 A From seymour at snf.stanford.edu Tue Jun 12 09:47:49 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 12 Jun 2012 09:47:49 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-12 09:47:49: O2 injector broken Message-ID: I removed loader and truned off element breaker From seymour at snf.stanford.edu Wed Jun 13 11:47:19 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Jun 2012 11:47:19 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-12 09:47:49: O2 injector broken Message-ID: replaced broken O2 injector. base good, ror good element breaker is on running pump11 From tberg at snf.stanford.edu Mon Jun 18 06:32:42 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2012 06:32:42 -0700 Subject: Problem tylanbpsg SNF 2012-06-07 23:57:30: very low depo Message-ID: injectors changed-running OK From tberg at snf.stanford.edu Mon Jun 18 06:33:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2012 06:33:08 -0700 Subject: Problem tylanbpsg SNF 2012-06-11 23:49:16: low depo Message-ID: injectors changed running OK From mtang at snf.stanford.edu Sat Jun 23 14:21:45 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 14:21:45 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-23 14:21:44: No silanes Message-ID: Silane gas cabinets are shut down due to fire detection problem. From tberg at snf.stanford.edu Mon Jun 25 10:57:40 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 10:57:40 -0700 Subject: Shutdown tylanbpsg SNF 2012-06-23 14:21:44: No silanes Message-ID: Silane back on