From maurice at snf.stanford.edu Tue May 22 14:59:54 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 22 May 2012 14:59:54 -0700 Subject: Comment tylanbpsg SNF 2012-05-22 14:59:53: created new LTO disk Message-ID: New LTO disk only has: LTO400PC LTO 350PC LTO300PC PSG400 PUMP11 The process recipes have: IF GNTLK=ON GOTO 115 STEP 115 is aan abort From maurice at snf.stanford.edu Wed May 23 07:58:49 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 23 May 2012 07:58:49 -0700 Subject: Comment tylanbpsg SNF 2012-05-23 07:58:48: running interlock test Message-ID: From maurice at snf.stanford.edu Wed May 23 11:18:11 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 23 May 2012 11:18:11 -0700 Subject: Comment tylanbpsg SNF 2012-05-23 11:18:11: Abort step in BPSG recipes Message-ID: There is a new BPSG disk. It currently has 5 recipes. LTO300PC LTO350PC LTO400PC PSG400 PUMP11 If you need additional recipes let me know. These recipes have an addition abort step added. If the tube is disabled or if the burnbox fails in a step that has O2 or SiH4 then the recipe will abort, shut off O2 and SiH4, purge for 5 min in N2 and hold. The hold step is called "ABORT PURGE/HOLD". You will now know that your process was interupted. Pressing alarm ack will release the recipe hold and vent the tube. From maurice at snf.stanford.edu Wed May 23 11:51:16 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 23 May 2012 11:51:16 -0700 Subject: Shutdown tylanbpsg SNF 2012-04-23 21:11:35: Burnbox alarm Message-ID: Burn box interlocks in place. Tube now connected to coral. Abort step added to recipes that shuts off process gases if burnbox faults or tube is disabled in a step that has process gases. From seymour at snf.stanford.edu Thu May 24 08:19:12 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 May 2012 08:19:12 -0700 Subject: Comment tylanbpsg SNF 2012-05-24 08:19:12: oil changed Message-ID: From maurice at snf.stanford.edu Thu May 24 16:05:25 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2012 16:05:25 -0700 Subject: Problem tylanbpsg SNF 2012-03-23 13:57:08: non-metal dummy cassettes do not fit SRD Message-ID: true! Only WBDiff cassettes fit in the WBDiff sink. From maurice at snf.stanford.edu Thu May 24 16:05:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2012 16:05:50 -0700 Subject: Comment tylanbpsg SNF 2012-03-02 08:52:11: oil changed Message-ID: logged