From prisbe at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear tylanbpsg: Dummy non metals Message-ID: Plenty of dummies. From narya at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: narya at snf.stanford.edu (narya at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem tylanbpsg: Very high leak pressure. Probably due to the PSG deposition prior to my LTO350 Message-ID: From emc at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Apr 15, 2000 Subject: Problem tylanbpsg: leak? Message-ID: twice it failed leak check while trying to run LTO450 (at step 45, the PRCPR was >100, which ends it.) From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem Clear tylanbpsg: cleaned door seal Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem Clear tylanbpsg: cleaned door seal Message-ID: From phimmer at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Apr 22, 2000 Subject: Shutdown tylanbpsg: burnbox alarming Message-ID: From prisbe at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: Apr 24, 2000 Subject: Shutdown Clear tylanbpsg: burnbox alarming Message-ID: fixed by Jim McVittie temporarily From mokhberi at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: mokhberi at snf.stanford.edu (mokhberi at snf.stanford.edu) Date: May 10, 2000 Subject: Shutdown tylanbpsg: Message-ID: pressure is too high. Receipe dose not go through the deposition step and jumps to the end From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 11, 2000 Subject: Shutdown Clear tylanbpsg: Vacuum pump was low on oil. Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown tylanbpsg: SiH4 gas cylinder change Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown tylanbpsg: shutdown for cleaning Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown Clear tylanbpsg: Cylinder changed Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 23, 2000 Subject: Shutdown Clear tylanbpsg: completed Message-ID: From mbartsch at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: May 23, 2000 Subject: Problem tylanbpsg: "Metal" wand was on the floor, chipped/bent Message-ID: Hey - when I showed up to use the LTO furnace the vaccuum wand was lying on the floor and the head was bent and chipped. I assume it needs a cleaning at least before it can be used again. Thanks. msb From latta at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 24, 2000 Subject: Problem Clear tylanbpsg: Wand replaced. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 24, 2000 Subject: Comment tylanbpsg: Test. Message-ID: From phimmer at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: May 25, 2000 Subject: Problem tylanbpsg: no deposition psg400 Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 25, 2000 Subject: Problem Clear tylanbpsg: completed Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Jun 19, 2000 Subject: Problem tylanbpsg: Message-ID: A poor uniformity (alomst 20%) was seen on the wafers that were facing the source. This was the case for most of the wafers thast were in the source side aswell asthe load side and the center of the tube. The wafers that facing the load side have good uniformity From amol at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Jun 22, 2000 Subject: Problem tylanbpsg: Partices on lid Message-ID: Particles on lid. They look like sawdust. Probably need tube cleaning. From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jun 26, 2000 Subject: Problem Clear tylanbpsg: Normal for the deposition on the tube Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear tylanbpsg: replaced injectors Message-ID: From chcheng at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem tylanbpsg: Message-ID: Couldn't pass the leak check, jump to step 95 From yiching at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Aug 3, 2000 Subject: Problem tylanbpsg: Failed leak check Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Aug 4, 2000 Subject: Problem tylanbpsg: LTO450P failed stp45 lk chk twice and it disabled me from CORAL Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear tylanbpsg: Cleaned door seal Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear tylanbpsg: Cleaned door seal Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear tylanbpsg: Cleaned door seal Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 15, 2000 Subject: Shutdown tylanbpsg: Shutdown for cleaning Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 18, 2000 Subject: Shutdown tylanbpsg: Cleaning completed Message-ID: The tube has been cleaned and poly coated. Needs to have a uniformity check done before being taken off of shutdown. From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 18, 2000 Subject: Shutdown Clear tylanbpsg: Cleaning completed Message-ID: From ejwong at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: ejwong at snf.stanford.edu (ejwong at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem tylanbpsg: Boat In/Out steps need to be done manually Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 22, 2000 Subject: Shutdown Clear tylanbpsg: Cleaning completed Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 22, 2000 Subject: Problem Clear tylanbpsg: fixed Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 22, 2000 Subject: Shutdown Clear tylanbpsg: completed Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 23, 2000 Subject: Shutdown Clear tylanbpsg: completed Message-ID: From sanli at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well Message-ID: I was running PSG400. In the first run, it alarmed several times, but did the deposition. Then, I was doing my 2nd run when the gross leak check failed, and process aborted. I tried again, and it failed again. I gave up, and now I'm trying to pump it down. But, it keeps on alarming. From yiching at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem tylanbpsg: Leak check failed & MFS alarm Message-ID: Recipe: LTO400 Did not pass gross leak check. In fact, process pressure stayed at 2000 through step 30 when it failed (did not pump down at 25). Also got MFS alarm in step 25/30. From yiching at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown tylanbpsg: MFS alarm . Unable to pump down. Message-ID: MFS alarm during step 10 of PUMP11. I pressed "clear" on the panel, but the alarm came on again a few minutes later and the program ended without pumping down. Other follow-up problems with tylanbpsg: 1. After I unloaded my wafers, I noticed lots of white/silver particles/flakes on my wafers. These look similar to the particles on top of the shroud. 2. Shroud is sticky. (sticks to the tissue paper I used to rest it on). Also the back end looks very dirty. From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 31, 2000 Subject: Shutdown Clear tylanbpsg: replaced t/c sheath Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear tylanbpsg: replaced t/c sheath Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear tylanbpsg: replaced t/c/ sheath Message-ID: From jgarate at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown tylanbpsg: prcpr to high on recipe psg400 8% Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown Clear tylanbpsg: Removed inlet screen to pump Message-ID: From utkan at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: utkan at snf.stanford.edu (utkan at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg: Date: Nov 17, 2000 5:08:31 PM Message-ID: The tube needs to be alligned with the furnace. Also, there are problems with the mechanism that brings the tube out. From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-09 12:08:51: TGO issue Message-ID: <26795100.89.1344539331639.JavaMail.coral@shine> From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-09 12:08:51: TGO issue Message-ID: <13975204.18.1344892938006.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-08-15 15:27:20: New dummies Message-ID: <510134.57.1345069640853.JavaMail.coral@shine> Added metal and non metal dummies From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-17 15:18:12: power glitch Message-ID: <26405781.148.1345241893380.JavaMail.coral@shine> From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-17 15:18:12: power glitch Message-ID: <1342877.62.1345508926805.JavaMail.coral@shine> element on From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-24 07:26:56: phosphine cylinder change Message-ID: <1438817.107.1345818416757.JavaMail.coral@shine> From jaehlee at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-25 03:30:20: nonmetal boats have too many glass (?) particles ... Message-ID: <29619282.172.1345890620957.JavaMail.coral@shine> they need to be cleaned soon. From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-24 07:26:56: phosphine cylinder change Message-ID: <2367310.8.1346074065978.JavaMail.coral@shine> cylinder changed and leak checked back on line From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-08-30 10:46:01: oil and filter change Message-ID: <13057317.117.1346348762506.JavaMail.coral@shine> oil pressure would not come up when pump restarted. From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-30 10:47:58: doing pull and clean Message-ID: <5394753.118.1346348879528.JavaMail.coral@shine> possible pump change due to tube not pumping down after pump maintenance From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-08-30 10:47:58: doing pull and clean Message-ID: <4131776.12.1346436335924.JavaMail.coral@shine> pull and clean completed heating up for a coat cycle will need a test after coat From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-25 03:30:20: nonmetal boats have too many glass (?) particles ... Message-ID: <22705162.13.1346436379945.JavaMail.coral@shine> clean boats installed after tube clean From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-08-15 15:27:20: New dummies Message-ID: <3492169.14.1346436404954.JavaMail.coral@shine> noted From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-31 14:26:27: needs test after coat Message-ID: <16403606.29.1346448387845.JavaMail.coral@shine> pull and clean completed coat ran. needs test. From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-09-04 11:36:29: running BPSG test Message-ID: <12906020.16.1346783790378.JavaMail.coral@shine> From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-08-31 14:26:27: needs test after coat Message-ID: <25100916.25.1346799452144.JavaMail.coral@shine> test complete From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-09-04 11:36:29: running BPSG test Message-ID: <30162556.26.1346799524155.JavaMail.coral@shine> Test complete Ran LTO400PC 00:20:00 expected~2900A Actual 2945 (center point of center wafer of non metal boat) From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-09-07 15:14:20: gatevalve interlock Message-ID: <4515299.80.1347056060911.JavaMail.coral@shine> The tube wasstarted and the alarm went off. I couldnt reset or ack alarm so aborted run. I turned off MFS460 and when I turned it back on I couldnt get controller out of manual. I put on white gear and found the door closed but the door flag no made. I adjusted flag. I found the bottom row of the membrane switches not responding to pressure. I looked at drawing of membrane switched and determined the horizontal line to be bad. I plugged another front panel to CPU board and put controller in auto. User started run and all was ok. I will change the front panel on Monday From zzp at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-09-07 17:40:52: no O2 flow Message-ID: <32551213.83.1347064853260.JavaMail.coral@shine> little deposition obtained From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-09-07 17:40:52: no O2 flow Message-ID: <27134440.7.1347295058737.JavaMail.coral@shine> replaced faulty MFS460 front panel. Flowed O2 and Silane with no problems. From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-09-10 12:14:43: ran lto350 for 30mins Message-ID: <20785473.60.1347304484583.JavaMail.coral@shine> O2 setpoint 136 sccm flow 132.9 sccm SIH4 setpoint 155 sccm flow 152 sccm system working corectly From eldwin at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-09-23 23:56:37: quartz sheath of boat handler broken Message-ID: <10579552.5.1348469797599.JavaMail.coral@shine> Quartz sheath was broken during training last week and needs to be replaced. Dummy wafers stripped and left in box. From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-09-23 23:56:37: quartz sheath of boat handler broken Message-ID: <27324458.8.1348496285126.JavaMail.coral@shine> replaced both broken boat loader fork sheaths From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-09 02:05:07: TGO system in fault Message-ID: <16326102.17.1349773508414.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-09 02:05:07: TGO system in fault Message-ID: <4862296.5.1349790849611.JavaMail.coral@shine> TGO CL96 is functional again From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-09 09:28:42: changed oil Message-ID: <20439454.17.1349800123316.JavaMail.coral@shine> sight glass clean From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-10 09:34:18: Pump is dead Message-ID: <31783343.44.1349886859076.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-10 09:34:52: H2 regulator is creeping up Message-ID: <25217668.45.1349886893413.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-10 09:34:52: H2 regulator is creeping up Message-ID: <24610903.47.1349887476125.JavaMail.coral@shine> wrong tool From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-10 09:34:18: Pump is dead Message-ID: <4702206.86.1349979627081.JavaMail.coral@shine> pump replaced. tube changed, good base and ror. tube is hot and coat recipe running. From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-10-11 11:21:03: will need test after coat. Message-ID: <24863970.87.1349979664448.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-10-11 11:21:03: will need test after coat. Message-ID: <22855461.97.1349989004601.JavaMail.coral@shine> coat has completed. From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-11 13:57:41: needs a test after repair Message-ID: <16078783.98.1349989062150.JavaMail.coral@shine> From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-12 11:36:59: Test Message-ID: <19145168.118.1350067019835.JavaMail.coral@shine> running test vafter tube pull From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-10-12 11:36:59: Test Message-ID: <27271821.124.1350081392751.JavaMail.coral@shine> Test complete lto400pc 00:20:00 Expected~2900A Actually 2859 center spot of center wafer in non metal boat From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-17 16:13:59: TGO: Silane sensor in fault Message-ID: <2700116.13.1350515639910.JavaMail.coral@shine> Silane off at cabinet From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-10-17 16:13:59: TGO: Silane sensor in fault Message-ID: <29705514.53.1350661002794.JavaMail.coral@shine> Calcon FS has inspected sensor and found it functioning as normal. We will continue to monitor this sensor. From jasonlin at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-02 22:06:35: MFC Alarm during dep Message-ID: <131198.226.1351919195585.JavaMail.coral@shine> Also the furnace tube didn't come out at the end of the recipe From jaehlee at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-05 18:59:16: MFC alarm at step #120 and the tube didn't come out Message-ID: <23156357.39.1352170756796.JavaMail.coral@shine> I couldn't make the alarm entire silent even after pressing yellow button for a several times. After pressing abort button, alarm doesn't stop even for a few second. From jaehlee at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube. Message-ID: <26375025.40.1352170850936.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-06 11:07:29: running lto400 for aa test Message-ID: <22634749.15.1352228850255.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube. Message-ID: <16201875.22.1352233080565.JavaMail.coral@shine> ran lto400 with no problems or alarms. Tube opened after the 8 mins of n2purge step in the recipe. From jasonlin at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-07 03:03:13: Peeling Message-ID: <10658746.40.1352286194731.JavaMail.coral@shine> Peeling/flaking on the two rods that hold the wafer boats From tberg at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-07 06:47:33: P:eeling and flaking normal for LTO Message-ID: <13558385.2.1352299654223.JavaMail.coral@shine> P:eeling and flaking normal for LTO we will vacuum loose particles as much as possible From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-07 03:03:13: Peeling Message-ID: <30117391.3.1352302712440.JavaMail.coral@shine> removed peeling, flaking silica from loader rails and baffles, replaced broken boat fork quartz sheath. back running pump11 From lofaolain at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-07 15:49:14: MFS error Message-ID: <18312796.7.1352332154470.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-08 09:34:42: tested lto Message-ID: <13911963.28.1352396083206.JavaMail.coral@shine> i ran lto400 for 10 mins with no alarms From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-09 08:50:51: ran LTO300PC no alarms Message-ID: <5574798.3.1352479852054.JavaMail.coral@shine> From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-09 09:09:22: Added 12 nonmetal dummies Message-ID: <26935588.4.1352480962669.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-19 13:58:50: loader sheath broken Message-ID: <6895609.0.1353362331071.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-19 13:58:50: loader sheath broken Message-ID: <3677586.0.1353431019056.JavaMail.coral@shine> replaced broken quartz. tube based at 22 mT and ror was 11 mT From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-05 18:59:16: MFC alarm at step #120 and the tube didn't come out Message-ID: <20630610.1.1353431086767.JavaMail.coral@shine> tube has been running without alarm From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-02 22:06:35: MFC Alarm during dep Message-ID: <28831187.2.1353431145346.JavaMail.coral@shine> tube has been running without alarms From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-26 06:57:37: system had N2 interlock error Message-ID: <32126195.6.1353941857828.JavaMail.coral@shine> tube wouldn't vent. had to vent manually to allow wafers to be removed from tube. From sclaussen at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-26 13:53:21: MFS alarm during deposition Message-ID: <29311073.40.1353966802270.JavaMail.coral@shine> From sclaussen at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-11-26 14:23:18: LTO still desposited despite MFS alarm Message-ID: <18070609.43.1353968599476.JavaMail.coral@shine> From carini at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: carini at snf.stanford.edu (carini at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-27 20:39:19: cmos - skip deposition steps Message-ID: <11059995.26.1354077559921.JavaMail.coral@shine> I run CMOS with 30min and 1h30min times set and after step 35 it jumped to step 110 skipping the deposition steps. From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-27 20:39:19: cmos - skip deposition steps Message-ID: <30960387.36.1354121051963.JavaMail.coral@shine> the reason recipe failed was leak rate too high (119.1) listed on run sheet. opened tube and cleaned door seal. base 16 mT ror was 21 mT/min. From carini at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: carini at snf.stanford.edu (carini at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-28 12:18:17: MFS alarm no O2- wafers still in Message-ID: <2460099.14.1354133897946.JavaMail.coral@shine> I need someone helping me to abort this process safely. From maurice at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-28 12:51:04: no O2 flow during dep Message-ID: <21186348.16.1354135865012.JavaMail.coral@shine> "CMOS" recipe deposition steop 50 From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Shutdown tylanbpsg SNF 2012-11-28 12:51:04: no O2 flow during dep Message-ID: <13378954.5.1354143180708.JavaMail.coral@shine> ran tube in manual, gave O2 a setpoint and turned O2 on it flowed for a couple of seconds then stopped. The O2 solenoid was not turned on. I checked pnumatic vlve electrical air solenoid connection and O2 flowed to setpoint From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-28 12:18:17: MFS alarm no O2- wafers still in Message-ID: <33522950.6.1354143279632.JavaMail.coral@shine> O2 electrical solenoid connectiion not making good connection to plug. I ran the tube in manual and O2 flowed to setpoint. From jsegal at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-30 12:13:02: frequent MFS alarms during dep Message-ID: <15359367.2.1354306383454.JavaMail.coral@shine> N2PURGE reads 1.2, then goes back to 0 From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Problem tylanbpsg SNF 2012-11-30 12:13:02: frequent MFS alarms during dep Message-ID: <24007229.10.1354312799303.JavaMail.coral@shine> the alarms are for N2 MFC not at zero when the MFS460 has no setpoint for N2. this does not effect the deposition. From alsune at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-12-06 17:58:56: N2 interlock problem at step 120 Message-ID: <1047580.13.1354845537549.JavaMail.coral@shine> While running the LTO300PC for 5min, the process stopped at step 120, giving a MFS alarm. I attempted to end the program only to found that the tube didn't respond anymore. To resolve this situation, I've seeked the help of John Shott, and we manually vented the system. I've retreived the wafers and loaded the pump11 program. Everthing seems fine now, but feel that this issue should be addressed, for it happened before (according to coral log). Regards, Wooshik Jung (alsune) From alsune at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-12-06 18:12:18: Additional note Message-ID: <9364928.15.1354846339244.JavaMail.coral@shine> After PUMP11 recipe ended, the ATM LED is still not lit. John Shott suggested that there might be a vacuum pressure sensor malfunctioning... Hope this help resolving the problem. Thanks,. Wooshik From seymour at snf.stanford.edu Fri Jan 11 13:14:48 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:14:48 -0000 Subject: Comment tylanbpsg SNF 2012-12-19 09:52:41: oil and filter changed Message-ID: <21745561.26.1355939561797.JavaMail.coral@shine> level glass cleaned