Problem tylanbpsg:

sigari at snf.stanford.edu sigari at snf.stanford.edu
Fri Jan 11 13:14:48 PST 2013


A poor uniformity (alomst 20%) was seen on the wafers
that were facing the source. This was the case for most 
of the wafers thast were in the source side aswell asthe load side and the center of the tube. The wafers that facing the load side  have good uniformity




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