Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Jan 11 13:14:48 PST 2013


I was running PSG400. In the first run, it alarmed several times, but did the deposition. Then, I was doing my 2nd run when the gross leak check failed, and process aborted. I tried again, and it failed again. I gave up, and now I'm trying to pump it down. But, it keeps on alarming.




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