Problem tylanbpsg: Leak check failed & MFS alarm

yiching at snf.stanford.edu yiching at snf.stanford.edu
Fri Jan 11 13:14:48 PST 2013


Recipe: LTO400
Did not pass gross leak check. In fact, process pressure stayed at 2000 through step 30 when it failed (did not pump down at 25). Also got MFS alarm in step 25/30. 




More information about the tylanbpsg-pcs mailing list