Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube.

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Jan 11 13:14:48 PST 2013


ran lto400 with no problems or alarms. Tube opened after the 8 mins of n2purge step in the recipe.



More information about the tylanbpsg-pcs mailing list