Problem tylanbpsg SNF 2012-11-27 20:39:19: cmos - skip deposition steps

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri Jan 11 13:14:48 PST 2013


the reason recipe failed was leak rate too high (119.1) listed on run sheet. opened tube and cleaned door seal. base 16 mT ror was 21 mT/min.



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