January 2013 Archives by subject

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Starting: Fri Jan 11 13:14:48 PST 2013
Ending: Fri Jan 11 13:14:48 PST 2013
Messages: 112

Comment tylanbpsg: Test. latta at snf.stanford.edu
Comment tylanbpsg SNF 2012-08-15 15:27:20: New dummies seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-08-15 15:27:20: New dummies maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-08-30 10:46:01: oil and filter change seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-09-04 11:36:29: running BPSG test maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-09-04 11:36:29: running BPSG test maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-09-07 15:14:20: gatevalve interlock seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-09-10 12:14:43: ran lto350 for 30mins seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-09 09:28:42: changed oil seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-10 09:34:52: H2 regulator is creeping up tberg at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-10 09:34:52: H2 regulator is creeping up tberg at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-11 13:57:41: needs a test after repair seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-12 11:36:59: Test maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-10-12 11:36:59: Test maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-06 11:07:29: running lto400 for aa test seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-07 06:47:33: P:eeling and flaking normal for LTO tberg at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-07 15:49:14: MFS error lofaolain at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-08 09:34:42: tested lto seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-09 08:50:51: ran LTO300PC no alarms seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-09 09:09:22: Added 12 nonmetal dummies maurice at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-26 06:57:37: system had N2 interlock error seymour at snf.stanford.edu
Comment tylanbpsg SNF 2012-11-26 14:23:18: LTO still desposited despite MFS alarm sclaussen at snf.stanford.edu
Comment tylanbpsg SNF 2012-12-06 17:58:56: N2 interlock problem at step 120 alsune at snf.stanford.edu
Comment tylanbpsg SNF 2012-12-06 18:12:18: Additional note alsune at snf.stanford.edu
Comment tylanbpsg SNF 2012-12-19 09:52:41: oil and filter changed seymour at snf.stanford.edu
Problem Clear tylanbpsg: Cleaned door seal gaul at snf.stanford.edu
Problem Clear tylanbpsg: Cleaned door seal gaul at snf.stanford.edu
Problem Clear tylanbpsg: Cleaned door seal gaul at snf.stanford.edu
Problem Clear tylanbpsg: cleaned door seal gaul at snf.stanford.edu
Problem Clear tylanbpsg: cleaned door seal gaul at snf.stanford.edu
Problem Clear tylanbpsg: completed gaul at snf.stanford.edu
Problem Clear tylanbpsg: Dummy non metals prisbe at snf.stanford.edu
Problem Clear tylanbpsg: fixed gaul at snf.stanford.edu
Problem Clear tylanbpsg: Normal for the deposition on the tube gaul at snf.stanford.edu
Problem Clear tylanbpsg: replaced injectors gaul at snf.stanford.edu
Problem Clear tylanbpsg: replaced t/c/ sheath gaul at snf.stanford.edu
Problem Clear tylanbpsg: replaced t/c sheath gaul at snf.stanford.edu
Problem Clear tylanbpsg: Wand replaced. latta at snf.stanford.edu
Problem tylanbpsg: sigari at snf.stanford.edu
Problem tylanbpsg: chcheng at snf.stanford.edu
Problem tylanbpsg: "Metal" wand was on the floor, chipped/bent mbartsch at snf.stanford.edu
Problem tylanbpsg: Boat In/Out steps need to be done manually ejwong at snf.stanford.edu
Problem tylanbpsg: Failed leak check yiching at snf.stanford.edu
Problem tylanbpsg: failed twice in the gross leak check, and pump11 as well sanli at snf.stanford.edu
Problem tylanbpsg: leak? emc at snf.stanford.edu
Problem tylanbpsg: Leak check failed & MFS alarm yiching at snf.stanford.edu
Problem tylanbpsg: LTO450P failed stp45 lk chk twice and it disabled me from CORAL caudillo at snf.stanford.edu
Problem tylanbpsg: no deposition psg400 phimmer at snf.stanford.edu
Problem tylanbpsg: Partices on lid amol at snf.stanford.edu
Problem tylanbpsg: Very high leak pressure. Probably due to the PSG deposition prior to my LTO350 narya at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-24 07:26:56: phosphine cylinder change tberg at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-24 07:26:56: phosphine cylinder change tberg at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-25 03:30:20: nonmetal boats have too many glass (?) particles ... seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-25 03:30:20: nonmetal boats have too many glass (?) particles ... jaehlee at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-31 14:26:27: needs test after coat seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-08-31 14:26:27: needs test after coat maurice at snf.stanford.edu
Problem tylanbpsg SNF 2012-09-07 17:40:52: no O2 flow seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-09-07 17:40:52: no O2 flow zzp at snf.stanford.edu
Problem tylanbpsg SNF 2012-09-23 23:56:37: quartz sheath of boat handler broken eldwin at snf.stanford.edu
Problem tylanbpsg SNF 2012-09-23 23:56:37: quartz sheath of boat handler broken tberg at snf.stanford.edu
Problem tylanbpsg SNF 2012-10-11 11:21:03: will need test after coat. seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-10-11 11:21:03: will need test after coat. seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-02 22:06:35: MFC Alarm during dep jasonlin at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-02 22:06:35: MFC Alarm during dep seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-05 18:59:16: MFC alarm at step #120 and the tube didn't come out seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-05 18:59:16: MFC alarm at step #120 and the tube didn't come out jaehlee at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-07 03:03:13: Peeling jasonlin at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-07 03:03:13: Peeling seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-26 13:53:21: MFS alarm during deposition sclaussen at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-27 20:39:19: cmos - skip deposition steps carini at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-27 20:39:19: cmos - skip deposition steps seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-28 12:18:17: MFS alarm no O2- wafers still in carini at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-28 12:18:17: MFS alarm no O2- wafers still in seymour at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-30 12:13:02: frequent MFS alarms during dep jsegal at snf.stanford.edu
Problem tylanbpsg SNF 2012-11-30 12:13:02: frequent MFS alarms during dep seymour at snf.stanford.edu
Shutdown Clear tylanbpsg: burnbox alarming prisbe at snf.stanford.edu
Shutdown Clear tylanbpsg: Cleaning completed gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: Cleaning completed gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: completed gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: completed gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: completed gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: Cylinder changed wheeler at snf.stanford.edu
Shutdown Clear tylanbpsg: Removed inlet screen to pump gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: replaced t/c sheath gaul at snf.stanford.edu
Shutdown Clear tylanbpsg: Vacuum pump was low on oil. gaul at snf.stanford.edu
Shutdown tylanbpsg: mokhberi at snf.stanford.edu
Shutdown tylanbpsg: burnbox alarming phimmer at snf.stanford.edu
Shutdown tylanbpsg: Cleaning completed gaul at snf.stanford.edu
Shutdown tylanbpsg: Date: Nov 17, 2000 5:08:31 PM utkan at snf.stanford.edu
Shutdown tylanbpsg: MFS alarm . Unable to pump down. yiching at snf.stanford.edu
Shutdown tylanbpsg: prcpr to high on recipe psg400 8% jgarate at snf.stanford.edu
Shutdown tylanbpsg: shutdown for cleaning gaul at snf.stanford.edu
Shutdown tylanbpsg: Shutdown for cleaning gaul at snf.stanford.edu
Shutdown tylanbpsg: SiH4 gas cylinder change wheeler at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-09 12:08:51: TGO issue maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-09 12:08:51: TGO issue maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-17 15:18:12: power glitch maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-17 15:18:12: power glitch maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-30 10:47:58: doing pull and clean seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-08-30 10:47:58: doing pull and clean seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-09 02:05:07: TGO system in fault maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-09 02:05:07: TGO system in fault tberg at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-10 09:34:18: Pump is dead tberg at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-10 09:34:18: Pump is dead seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-17 16:13:59: TGO: Silane sensor in fault maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-10-17 16:13:59: TGO: Silane sensor in fault maurice at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube. seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-05 19:00:50: my wafer is still in the tube. jaehlee at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-19 13:58:50: loader sheath broken seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-19 13:58:50: loader sheath broken seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-28 12:51:04: no O2 flow during dep seymour at snf.stanford.edu
Shutdown tylanbpsg SNF 2012-11-28 12:51:04: no O2 flow during dep maurice at snf.stanford.edu

Last message date: Fri Jan 11 13:14:48 PST 2013
Archived on: Fri Jan 11 13:15:13 PST 2013

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