LTO Furnace

Jaime Garate jgarate at snf.stanford.edu
Wed Aug 23 14:33:27 PDT 2000


Hi Users,

Here is the data that was collected from the characterization test
perform by Eehern Wong.

Recipe: LTO400

Wafer to Wafer non uniformity: Less than 9%
Within wafer non uniformity: Less than 9%


Recipe: LTOPSG40

Wafer to Wafer non uniformity: Less than 9%
Within wafer non uniformity: Less than 9%


Thanks, Jaime Garate



More information about the tylanbpsg mailing list