Silane Cylinder change for furnaces

Keith Gaul gaul at snf.stanford.edu
Wed Sep 27 09:46:50 PDT 2000


   All -
     The silane cylinder that supports the furnaces needs to be changed
out. This will happen tomorrow morning around 7:30 and will continue
until Friday morning around 8 a.m. There is plenty of silane until then,
I just didn't want it to run out over the weekend. The tools affected
are:
tylansige
tylanpoly
tylanbpsg
tystar1
               Keith




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