From phimmer at sunray.snffab.stanford.edu Thu Aug 2 07:47:35 2001 From: phimmer at sunray.snffab.stanford.edu (Phillip Himmer) Date: Thu, 2 Aug 2001 07:47:35 -0700 (PDT) Subject: reservation Message-ID: <200108021447.HAA11042@sunray.snffab.stanford.edu> I canceled my reservation from 17:30 to 21:30 phil From rcrane at snf.stanford.edu Mon Aug 6 17:29:41 2001 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 06 Aug 2001 17:29:41 -0700 Subject: Toxic gas tests complete Message-ID: <3B6F3675.B7C5D461@snf.stanford.edu> The toxic gas alarm system tests are now complete. All tools using toxic gases are back up with the following exceptions: tylanpoly tylanbpsg tylanSiGe tystar 1 EPI Silane MFC calibrations are still being completed. Tools should be up tomorrow. Thanks, Dick From seymour at snf.stanford.edu Tue Aug 7 07:30:58 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 07 Aug 2001 07:30:58 -0700 Subject: SIH4 calibration Message-ID: <3B6FFBA2.21312EFF@snf.stanford.edu> The calibration has been completed. Tube is up to run. From takamura at stanford.edu Tue Aug 7 16:46:30 2001 From: takamura at stanford.edu (Yayoi Takamura) Date: Tue, 7 Aug 2001 16:46:30 -0700 (PDT) Subject: remove reservation Message-ID: Hi, I have removed my reservation on tylanbpsg for Wednesday afternoon. Thanks, Yayoi **************************************************************** Yayoi Takamura CISX Building, Room 300 Stanford University Stanford, CA 94305 (650) 725-0418 takamura at leland.stanford.edu www.stanford.edu/~takamura/ **************************************************************** From seymour at snf.stanford.edu Wed Aug 8 14:18:42 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 08 Aug 2001 14:18:42 -0700 Subject: tube clean Message-ID: <3B71ACB2.50FF7AEE@snf.stanford.edu> the tube has been cleaned and leak check, cold and hot passed. tube now getting a coat. From latta at snf.stanford.edu Fri Aug 10 18:25:59 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 10 Aug 2001 18:25:59 -0700 Subject: LTO still on shutdown Message-ID: <3B7489A7.CB6AE958@snf.stanford.edu> Folks, After running a uniformity test I cannot in good conscience release the tube. The most used boat, the second one from the load end of the system, has a wafer to wafer spread of over 800A (about 30%) and the thickness is half of what was expected. More tests and adjustments will be made on Monday. Nancy From seymour at snf.stanford.edu Tue Aug 14 15:48:45 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 14 Aug 2001 15:48:45 -0700 Subject: tube status Message-ID: <3B79AACD.D7E428CC@snf.stanford.edu> The tube is all back together and coated. The characterization is being ran at this time and the results should be known later this evening. From latta at snf.stanford.edu Tue Aug 14 17:35:00 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 14 Aug 2001 17:35:00 -0700 Subject: LTO uniformity good- System Up! Message-ID: <3B79C3B4.C5177FF8@snf.stanford.edu> Folks, Below are the uniformity results for today's LTO run; LTO400 for 00:20:00. The readings are broken down by three test wafers per boat, load end to pump end. Boat1 3453A 3486A 3864A Boat2 3808A 3845A 4025A Boat3 4043A 4395A 4413A Boat4 4324A 4456A 4456A Nancy From takamura at stanford.edu Mon Aug 20 09:28:21 2001 From: takamura at stanford.edu (Yayoi Takamura) Date: Mon, 20 Aug 2001 09:28:21 -0700 (PDT) Subject: cancel reservation Message-ID: Hi, I have canceled my reservation for this morning. Sorry for the late notice. Yayoi **************************************************************** Yayoi Takamura CISX Building, Room 300 Stanford University Stanford, CA 94305 (650) 725-0418 takamura at leland.stanford.edu www.stanford.edu/~takamura/ **************************************************************** From beckwith at snf.stanford.edu Wed Aug 22 13:44:36 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 22 Aug 2001 13:44:36 -0700 (PDT) Subject: Comment tylanbpsg 2001-08-22 13:12:33: my wafers came out clean...have not looked (fwd) Message-ID: ---------- Forwarded message ---------- Date: Aug 22, 2001 1:12:33 PM From: beckwith at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Subject: Comment tylanbpsg 2001-08-22 13:12:33: my wafers came out clean...have not looked at them under the scope, but the look good my eyeball. There is white "stuff" on the edge of the tube and on the door seal again. Addendum: They looked OK when I looked at them using the nanospec. From beckwith at snf.stanford.edu Wed Aug 22 13:46:06 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 22 Aug 2001 13:46:06 -0700 (PDT) Subject: Comment tylanbpsg 2001-08-22 13:40:33: oxide is very non-uniform on each wafer (fwd) Message-ID: ---------- Forwarded message ---------- Date: Aug 22, 2001 1:40:34 PM From: beckwith at snf.stanford.edu To: tylanbpsg-pcs at snf.stanford.edu Subject: Comment tylanbpsg 2001-08-22 13:40:33: oxide is very non-uniform on each wafer here are the measurements, I only had 2 wafers: 10880 11052 10471 10576 10540 10489 10560 10449 10248 10249 Also, the growth rate seems to have increased from our previous runs. From takamura at stanford.edu Thu Aug 23 11:58:23 2001 From: takamura at stanford.edu (Yayoi Takamura) Date: Thu, 23 Aug 2001 11:58:23 -0700 (PDT) Subject: remove reservation Message-ID: Hi, I decided to do only one run today so the tube will be free from 1pm to 4pm. Sorry for the late notice. yayoi **************************************************************** Yayoi Takamura CISX Building, Room 300 Stanford University Stanford, CA 94305 (650) 725-0418 takamura at leland.stanford.edu www.stanford.edu/~takamura/ **************************************************************** From chion at Stanford.EDU Thu Aug 23 12:19:17 2001 From: chion at Stanford.EDU (Chi On Chui) Date: Thu, 23 Aug 2001 12:19:17 -0700 (PDT) Subject: remove reservation In-Reply-To: Message-ID: I will take that. Thanks Yayoi! /Chi On > Hi, > > I decided to do only one run today so the tube will be free from 1pm to > 4pm. Sorry for the late notice. > > yayoi > > **************************************************************** > Yayoi Takamura > CISX Building, Room 300 > Stanford University > Stanford, CA 94305 > (650) 725-0418 > takamura at leland.stanford.edu > www.stanford.edu/~takamura/ > **************************************************************** > > Chi On Chui Ph.D. Candidate, Department of Electrical Engineering Center for Integrated Systems 014, Stanford University Stanford, CA 94305 Tel: (650)725-3612(o), (650)703-1910(c) URLs: http://www.stanford.edu/~chion From mokhberi at stanford.edu Mon Aug 27 14:23:38 2001 From: mokhberi at stanford.edu (Ali Mokhberi) Date: Mon, 27 Aug 2001 14:23:38 -0700 Subject: removed reservation Message-ID: <4.3.2.7.2.20010827142227.02951810@mokhberi.pobox.stanford.edu> I have removed my reservation for Tue 9:30-13:00 and Wed 16:30-18:00 Thanks Ali From seymour at snf.stanford.edu Wed Aug 29 09:19:03 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 29 Aug 2001 09:19:03 -0700 Subject: shutdown Message-ID: <3B8D15F7.F7737249@snf.stanford.edu> The pump failed on bpsg last night. The tube thickness was near time to clean so I will do the clean and replace the pump. I will try to get the tube up before Friday but I do not know if I can get it coated and have the characterization done before the holiday weekend. From seymour at snf.stanford.edu Thu Aug 30 14:16:43 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 30 Aug 2001 14:16:43 -0700 Subject: tube status Message-ID: <3B8EAD3B.C667F68@snf.stanford.edu> The pump was replaced with a rebuilt one. the tube has been cleaned and coated. needs characterization. From latta at snf.stanford.edu Fri Aug 31 13:55:24 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 31 Aug 2001 13:55:24 -0700 (PDT) Subject: Released for use! Message-ID: Thickness measurements available in equip archives on web. From mbadi at relgyro.stanford.edu Fri Aug 31 19:17:07 2001 From: mbadi at relgyro.stanford.edu (Mohammed H. Badi) Date: Fri, 31 Aug 2001 19:17:07 -0700 (PDT) Subject: tube free sat morning. Message-ID: i removed my reservation for sat morning. moe. -------- Mohammed H. Badi Bounce. 650-906-0663