LTO still on shutdown

Nancy Latta latta at
Fri Aug 10 18:25:59 PDT 2001


After running a uniformity test I cannot in good conscience release the
tube.  The most used boat, the second one from the load end of the
system, has a wafer to wafer spread of over 800A (about 30%) and the
thickness is half of what was expected.

More tests and adjustments will be made on Monday.


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