LTO uniformity good- System Up!

Nancy Latta latta at snf.stanford.edu
Tue Aug 14 17:35:00 PDT 2001


Folks,

Below are the uniformity results for today's LTO run; LTO400 for
00:20:00.  The readings are broken down by three test wafers per boat,
load end to pump end.

Boat1  3453A  3486A  3864A
Boat2  3808A  3845A  4025A

Boat3  4043A  4395A  4413A
Boat4  4324A  4456A  4456A


			Nancy



More information about the tylanbpsg mailing list