From jawad at nova.Stanford.EDU  Thu Jan 11 17:54:09 2001
From: jawad at nova.Stanford.EDU (Jawad Nasrullah)
Date: Thu, 11 Jan 2001 17:54:09 -0800 (PST)
Subject: can't use LTO reservation tonight
Message-ID: <Pine.GSO.4.31.0101111751001.25952-100000@pulsar.Stanford.EDU>

I got the great news of LTO coming back online a little too late to use my
reservation tonight. Please feel free to take it.  Sorry about the late
notification.

-jawad



From jgarate at snf.stanford.edu  Fri Jan 12 06:47:00 2001
From: jgarate at snf.stanford.edu (Jaime Garate)
Date: Fri, 12 Jan 2001 06:47:00 -0800
Subject: Release
Message-ID: <3A5F18E4.5300E9B0@snf.stanford.edu>

Hi Users,


Tylanbpsg has been release. I will be sending out the data for non
uniformity on wafer to wafer, and also within wafer.


Thanks, Jaime Garate


From jgarate at snf.stanford.edu  Fri Jan 12 14:28:46 2001
From: jgarate at snf.stanford.edu (Jaime Garate)
Date: Fri, 12 Jan 2001 14:28:46 -0800
Subject: Terminal Down!!
Message-ID: <3A5F851E.2186B9B2@snf.stanford.edu>

Hi Users,

Terminal that controls all the furnaces is down!! I believe that
it has a bad board. It wont allowed you to load a recipe.  Field service
will be coming on Tuesday, January16th to work on it.


Sorry for the inconvenience!!!!


Thanks, Jaime Garate


From jgarate at snf.stanford.edu  Tue Jan 16 10:58:22 2001
From: jgarate at snf.stanford.edu (Jaime Garate)
Date: Tue, 16 Jan 2001 10:58:22 -0800
Subject: Terminal Down!!
References: <3A5F851E.2186B9B2@snf.stanford.edu>
Message-ID: <3A6499CE.5D792B1E@snf.stanford.edu>

Hi Users,

Field service wont be in today to work on are terminal, but he will be
in tomorrow Wednesday, January 17th.


Sorry for the inconvenience!!!

Thanks, Jaime Garate



Jaime Garate wrote:
> 
> Hi Users,
> 
> Terminal that controls all the furnaces is down!! I believe that
> it has a bad board. It wont allowed you to load a recipe.  Field service
> will be coming on Tuesday, January16th to work on it.
> 
> Sorry for the inconvenience!!!!
> 
> Thanks, Jaime Garate


From jgarate at snf.stanford.edu  Wed Jan 17 12:46:55 2001
From: jgarate at snf.stanford.edu (Jaime Garate)
Date: Wed, 17 Jan 2001 12:46:55 -0800
Subject: Terminal Down!!
References: <3A5F851E.2186B9B2@snf.stanford.edu> <3A6499CE.5D792B1E@snf.stanford.edu>
Message-ID: <3A6604BF.14C54855@snf.stanford.edu>

Hi Users,

The terminal has been fixed, and also the monitor and key board have
been changed.

Thank you for your patience!

Thanks, Jaime Garate



Jaime Garate wrote:
> 
> Hi Users,
> 
> Field service wont be in today to work on are terminal, but he will be
> in tomorrow Wednesday, January 17th.
> 
> Sorry for the inconvenience!!!
> 
> Thanks, Jaime Garate
> 
> Jaime Garate wrote:
> >
> > Hi Users,
> >
> > Terminal that controls all the furnaces is down!! I believe that
> > it has a bad board. It wont allowed you to load a recipe.  Field service
> > will be coming on Tuesday, January16th to work on it.
> >
> > Sorry for the inconvenience!!!!
> >
> > Thanks, Jaime Garate


From mbadi at relgyro.Stanford.EDU  Sun Jan 21 19:19:23 2001
From: mbadi at relgyro.Stanford.EDU (Mohammed H. Badi)
Date: Sun, 21 Jan 2001 19:19:23 -0800 (PST)
Subject: LTO uniformity
Message-ID: <Pine.SOL.3.95.1010121191547.20146A-100000@relgyro.Stanford.EDU>

Hello all,
  Last Friday (1/19), Eehern Wong and I did a uniformity measurement for an
LTO film on Tylan BPSG.  The specifics and data are copied below for you --
we thought you might find it useful. 

LTO Despostion
    Purpose:  To put down 1500 A of LTO
    Program: PSG400 (67 mins + Variable Time (00:16:00) x2 )
    (PH3,SiH4) = (86,14) --> Doping: 8%
    Expected Rate: 220 A/min
    Process Time: 68 + Variable (00:07:30)
    Expected Rate: 200 A/min
    Measured Rate: 267 A/min
    Expected Thickness: 1500 A
    Measured Thickness: 2000 A
    Mean Thickness: 1994.7 A
    Standard Deviation: 106.02 A

moe.			
			
--------
Mohammed H. Badi		
650-906-0663	

---------- Forwarded message ----------
Date: Fri, 19 Jan 2001 16:12:08 -0800 (PST)
From: Eehern Wong <gumbi at stanford.edu>
To: Mohammed Hanif Badi <mbadi at stanford.edu>
Subject: LTO uniformity



              Wafer Schematic

                   (FLAT)
                ###########
              ##            ##
             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9    #
             ##              ##
              ##            ##
                 ###########

              col1 col2 col3
              ---- ---- ----
       row1 | 2013 1936 1835
       row2 | 2104 2001 1887
       row3 | 2148 2094 1934