LTO uniformity

Mohammed H. Badi mbadi at relgyro.Stanford.EDU
Sun Jan 21 19:19:23 PST 2001


Hello all,
  Last Friday (1/19), Eehern Wong and I did a uniformity measurement for an
LTO film on Tylan BPSG.  The specifics and data are copied below for you --
we thought you might find it useful. 

LTO Despostion
    Purpose:  To put down 1500 A of LTO
    Program: PSG400 (67 mins + Variable Time (00:16:00) x2 )
    (PH3,SiH4) = (86,14) --> Doping: 8%
    Expected Rate: 220 A/min
    Process Time: 68 + Variable (00:07:30)
    Expected Rate: 200 A/min
    Measured Rate: 267 A/min
    Expected Thickness: 1500 A
    Measured Thickness: 2000 A
    Mean Thickness: 1994.7 A
    Standard Deviation: 106.02 A

moe.			
			
--------
Mohammed H. Badi		
650-906-0663	

---------- Forwarded message ----------
Date: Fri, 19 Jan 2001 16:12:08 -0800 (PST)
From: Eehern Wong <gumbi at stanford.edu>
To: Mohammed Hanif Badi <mbadi at stanford.edu>
Subject: LTO uniformity



              Wafer Schematic

                   (FLAT)
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             ##              ##
            ##  1    2    3   #
            #                  #
            #   4    5    6    #
            ##                 #
            ##  7    8    9    #
             ##              ##
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                 ###########

              col1 col2 col3
              ---- ---- ----
       row1 | 2013 1936 1835
       row2 | 2104 2001 1887
       row3 | 2148 2094 1934





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