LTO uniformity

[Mohammed H. Badi]

Hello all,
  Last Friday (1/19), Eehern Wong and I did a uniformity measurement for an
LTO film on Tylan BPSG.  The specifics and data are copied below for you --
we thought you might find it useful. 

LTO Despostion
    Purpose:  To put down 1500 A of LTO
    Program: PSG400 (67 mins + Variable Time (00:16:00) x2 )
    (PH3,SiH4) = (86,14) --> Doping: 8%
    Expected Rate: 220 A/min
    Process Time: 68 + Variable (00:07:30)
    Expected Rate: 200 A/min
    Measured Rate: 267 A/min
    Expected Thickness: 1500 A
    Measured Thickness: 2000 A
    Mean Thickness: 1994.7 A
    Standard Deviation: 106.02 A

moe.			
			
--------
Mohammed H. Badi		
650-906-0663	

---------- Forwarded message ----------
Date: Fri, 19 Jan 2001 16:12:08 -0800 (PST)
From: Eehern Wong <gumbi at stanford.edu>
To: Mohammed Hanif Badi <mbadi at stanford.edu>
Subject: LTO uniformity



              Wafer Schematic

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              col1 col2 col3
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       row1 | 2013 1936 1835
       row2 | 2104 2001 1887
       row3 | 2148 2094 1934