From hopcroft at snf.stanford.edu Wed Mar 14 03:10:48 2001 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Wed, 14 Mar 2001 03:10:48 -0800 (PST) Subject: gas shroud broken Message-ID: The LTO gas shroud is broken. Check with maintenance before using. Matt Hopcroft hopcroft at snf.stanford.edu 650.736.2380 From seymour at snf.stanford.edu Thu Mar 15 07:26:43 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 15 Mar 2001 07:26:43 -0800 Subject: burnbox Message-ID: <3AB0DF32.DA73B915@snf.stanford.edu> The temperature of the burnbox is below the setpoint and the system is in the alarm state. I will disassemble the heater assembly and determine the problem. I will advise as to the expected down time as soon as possible. From seymour at snf.stanford.edu Thu Mar 15 09:42:56 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 15 Mar 2001 09:42:56 -0800 Subject: burnbox shutdown Message-ID: <3AB0FF1F.EA81B62B@snf.stanford.edu> I have a replacement element and I'm installing it now. The burnbox and the LPCVD's should be up by noon. Ray Seymour From seymour at snf.stanford.edu Thu Mar 15 13:53:25 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 15 Mar 2001 13:53:25 -0800 Subject: burnbox Message-ID: <3AB139D5.FBBB0DF8@snf.stanford.edu> The burnbox is up to temp and the tubes are ok to run. Ray Seymour From seymour at snf.stanford.edu Fri Mar 16 08:11:50 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 16 Mar 2001 08:11:50 -0800 Subject: Quartz clean Message-ID: <3AB23B46.C5DF35F4@snf.stanford.edu> The tube has reached the limit on deposition and needs a pull and clean, which I have started. From seymour at snf.stanford.edu Tue Mar 20 08:17:34 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 20 Mar 2001 08:17:34 -0800 Subject: tube status Message-ID: <3AB7829D.D709D0C0@snf.stanford.edu> The clean is completed and the tube is leak tight. I'm heating the tube to do a pre coat at this time, then it will need to have a thickness and uniformity test when completed. From caudillomalik at netscape.net Tue Mar 20 11:25:45 2001 From: caudillomalik at netscape.net (David Caudillo) Date: Tue, 20 Mar 2001 14:25:45 -0500 Subject: tylanbpsg cancellation 3/21 10:00-14:30 Message-ID: <59BB7ED0.4DC1BBB1.0DC3DFDB@netscape.net> I will not be using my reservation time. -- David Caudillo __________________________________________________________________ Get your own FREE, personal Netscape Webmail account today at http://webmail.netscape.com/ From latta at snf.stanford.edu Fri Mar 23 17:22:24 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 23 Mar 2001 17:22:24 -0800 (PST) Subject: Up again! Message-ID: Folks, The second uniformity test is slightly better. Here are the highlights; Non-metal mean wafer to wafer ~20%, within a wafer ~10% Metal side mean wafer to wafer ~1%, within a wafer ~5% ue to popular demand, we'll call this good enough. Enjoy! From latta at snf.stanford.edu Wed Mar 28 11:52:49 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 28 Mar 2001 11:52:49 -0800 (PST) Subject: Sloppy Record Keeping Message-ID: Folks, A reminder message to fill out the log book before, during and after your LTO run. Recently vital information has been missing. It is your responsibility to fill out the form *completely*. We need the base pressure, leak check pressure and process pressure to keep up on the health of the system and to better serve you by reacting to the infomation you provide. Other people using the system need the thickness information to 1) figure the dep times, 2) know when to change the dummies and 3) know when to expect a tube clean of the system. Staff needs the same info to schedule tube and quartzware cleans. Thanks for your cooperation, Nancy From seymour at snf.stanford.edu Fri Mar 30 14:53:02 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 30 Mar 2001 14:53:02 -0800 Subject: [Fwd: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken] Message-ID: <3AC50E4D.50718EFB@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: Ray Seymour Subject: Re: Shutdown tylanbpsg 2001-03-30 01:52:29: one boat broken Date: Fri, 30 Mar 2001 14:51:40 -0800 Size: 906 URL: