Up again!

Nancy Latta latta at snf.stanford.edu
Fri Mar 23 17:22:24 PST 2001


Folks,

The second uniformity test is slightly better.  Here are the highlights;

Non-metal mean wafer to wafer ~20%, within a wafer ~10%
Metal side mean wafer to wafer ~1%, within a wafer ~5%

ue to popular demand, we'll call this good enough.  

Enjoy!





More information about the tylanbpsg mailing list