Missing Quartz piece

Ray Seymour seymour at snf.stanford.edu
Tue May 22 15:15:38 PDT 2001


I have looked at the cover of the wafer carrier and there is a piece of
quartz about 3/16 by 1/2 inch broken off the top.
This should not have any effect on the process, unless further breakage
happens. It appears that something hit the edge of the cover, breaking
off the chipped area. Please use extreme care when handling the cover as
anymore quartz removal will damage the cover beyond use.
Ray Seymour




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