From sanli at piezo.Stanford.EDU  Thu Nov  1 13:16:46 2001
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Thu, 1 Nov 2001 13:16:46 -0800 (PST)
Subject: metal and non-metal wands
Message-ID: <Pine.GSO.4.33.0111011311550.12655-100000@piezo.Stanford.EDU>


Today I found that metal and non-metal wands were mixed. That is the
non-metal wand was hanging in the metal wand hanger, and vice versa. I
don't know how long it has been like this, but there is a good chance that
the recent users accidentally used the metal wand instead of the non-metal
wand and the non-metal wand instead of the metal wand. Therefore, both of
them are now metal wands. I suggest you to use clean non-metal tweezers to
load your non-metal wafers until the non-metal wand is cleaned.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html



From latta at snf.stanford.edu  Fri Nov  2 10:30:02 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Fri, 2 Nov 2001 10:30:02 -0800 (PST)
Subject: metal and non-metal wands
In-Reply-To: <Pine.GSO.4.33.0111011311550.12655-100000@piezo.Stanford.EDU>
Message-ID: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>

Folks,

Mike has cleaned and replaced the nonmetal wand tip.  He also has put a
label on the wand handle indicating it is nonmetal.

Fell free to use the wands again.

				Nancy




From beckwith at snf.stanford.edu  Fri Nov  2 13:01:59 2001
From: beckwith at snf.stanford.edu (Sharleen Beckwith)
Date: Fri, 2 Nov 2001 13:01:59 -0800
Subject: metal and non-metal wands
In-Reply-To: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>
References: <Pine.LNX.4.04.10111021028560.30143-100000@snf.stanford.edu>
Message-ID: <p0433010db8089be81c67@[171.64.99.54]>

Is there any way to figure out whether the tubes are now metal 
contaminated? I guess tylanbpsg is safe because it was down and being 
cleaned during the wand-swap? Some of us worry about these things.

>Delivered-To: beckwith at snf.stanford.edu
>Mailing-List: contact tylanbpsg-help at snf.stanford.edu; run by ezmlm
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>Date: Fri, 2 Nov 2001 10:30:02 -0800 (PST)
>From: Nancy Latta <latta at snf.stanford.edu>
>To: Sanli Ergun <sanli at piezo.Stanford.EDU>
>cc: tylannitride at snf.stanford.edu, tylanpoly at snf.stanford.edu,
>     tylanbpsg at snf.stanford.edu
>Subject: Re: metal and non-metal wands
>
>Folks,
>
>Mike has cleaned and replaced the nonmetal wand tip.  He also has put a
>label on the wand handle indicating it is nonmetal.
>
>Fell free to use the wands again.
>
>				Nancy

Do you mean it has been replaced with a new, clean, tip, or the old 
one was cleaned? Because I don't see how you can clean metal off of 
those tips since there is a metal rod imbedded in the quartz.

>Delivered-To: beckwith at snf.stanford.edu
>Mailing-List: contact tylanbpsg-help at snf.stanford.edu; run by ezmlm
>X-No-Archive: yes
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>Delivered-To: mailing list tylanbpsg at snf.stanford.edu
>Date: Tue, 30 Oct 2001 09:48:12 -0800
>From: Mike Dickey <mdickey at snf.stanford.edu>
>X-Accept-Language: en
>To: tylanbpsg at snf.stanford.edu, tylan at pcs.stanford.edu
>Subject: Pull and Clean
>
>We are going to put the BPSG tube down for a pull and clean tomorrow morning.

Sharleen

P. S. Thanks to Sanli for catching this and quickly reporting it!


From seymour at snf.stanford.edu  Fri Nov  2 15:18:27 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Fri, 02 Nov 2001 15:18:27 -0800
Subject: Silane cylinder change
Message-ID: <3BE329C2.ADC219AC@snf.stanford.edu>

I have reserved the above tools on Thursday Nov. 8 to change the silane
cylinder and leak check.



From seymour at snf.stanford.edu  Mon Nov  5 08:13:19 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 05 Nov 2001 08:13:19 -0800
Subject: silane cylinder change
Message-ID: <3BE6BA9F.5378448E@snf.stanford.edu>

I will be changing the silane cylinder on the above tool on Thursday
Nov. 8. This will require a 24 hour leak check so the tubes will be down
till Friday morning if all goes well.



From seymour at snf.stanford.edu  Wed Nov  7 08:40:05 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 07 Nov 2001 08:40:05 -0800
Subject: Silane cylinder change.
Message-ID: <3BE963E5.A1A2E3BB@snf.stanford.edu>

The silane cylinder went empty this morning. I had scheduled the change
for tomorrow, but due to higher then normal useage on Tuesday (60 lbs of
gas pressure in the cylinder in the morniing) I will have to do the
change today. I was waiting till Thursday to do the cylinder change
because some additional work needs to be done on the silane line, and
the parts for that job aren't ready this morning.





From seymour at snf.stanford.edu  Thu Nov  8 07:21:43 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 08 Nov 2001 07:21:43 -0800
Subject: Silane cylinder change
Message-ID: <3BEAA307.8574D5EF@snf.stanford.edu>

The cylinder change is completed. Leak check passed tubes are up to run.



From seymour at snf.stanford.edu  Mon Nov 12 13:57:31 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 12 Nov 2001 13:57:31 -0800
Subject: burnbox cleans
Message-ID: <3BF045CB.5BF09F81@snf.stanford.edu>

I have had to clean the burnbox three times in the last eight days. This
is primarily due to the increased usage of tylannitride low stress
nitride. Prior to the last few weeks the box required cleaning every two
weeks with a few exceptions. During the times of lower usage I would
schedule the clean for every other Monday morning from 6 am till about 9
am to allow cooling down and the clean. These faster coming cleans do
not allow me to schedule the clean and this requires the shutting down
of the above tool with little to no notice. I am sorry for the
inconvenience this will cause. We are looking into the nitride process
and equipment to see if we can  slow down the burnbox getting clogged
and needing a clean.
Ray Seymour
47425






From seymour at snf.stanford.edu  Tue Nov 20 15:22:19 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Tue, 20 Nov 2001 15:22:19 -0800
Subject: Wafer carrier top broken
Message-ID: <3BFAE5AB.25019558@snf.stanford.edu>

The top of the carrier has broken. I will replace it in the morning due
to the cleaning requirements of the replacement.
I believe the tube can still be ran with the end of the top missing,
with the uniformity affected in the back of the metal end.
Ray



From mdickey at snf.stanford.edu  Thu Nov 29 09:10:12 2001
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Thu, 29 Nov 2001 09:10:12 -0800
Subject: Pull and Clean
Message-ID: <3C066BF4.9C38E734@snf.stanford.edu>

The tube is being put down for a pull and clean.