Wafer carrier top broken

Ray Seymour seymour at snf.stanford.edu
Tue Nov 20 15:22:19 PST 2001

The top of the carrier has broken. I will replace it in the morning due
to the cleaning requirements of the replacement.
I believe the tube can still be ran with the end of the top missing,
with the uniformity affected in the back of the metal end.

More information about the tylanbpsg mailing list