Wafer carrier top broken

Ray Seymour seymour at snf.stanford.edu
Tue Nov 20 15:22:19 PST 2001


The top of the carrier has broken. I will replace it in the morning due
to the cleaning requirements of the replacement.
I believe the tube can still be ran with the end of the top missing,
with the uniformity affected in the back of the metal end.
Ray




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